光栅精密位移测量技术发展综述

高旭; 李舒航; 马庆林; 陈伟

doi:10.3788/CO.20191204.0741

Volume 12 Issue 4

Aug. 2019

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Chinese Optics > 2019 > 12(4): 741-752.

GAO Xu, LI Shu-Hang, MA Qing-lin, CHEN Wei. Development of grating-based precise displacement measurement technology[J]. Chinese Optics, 2019, 12(4): 741-752. doi: 10.3788/CO.20191204.0741

Citation:

GAO Xu, LI Shu-Hang, MA Qing-lin, CHEN Wei. Development of grating-based precise displacement measurement technology[J]. Chinese Optics, 2019, 12(4): 741-752. doi: 10.3788/CO.20191204.0741

GAO Xu, LI Shu-Hang, MA Qing-lin, CHEN Wei. Development of grating-based precise displacement measurement technology[J]. Chinese Optics, 2019, 12(4): 741-752. doi: 10.3788/CO.20191204.0741

Citation:

GAO Xu, LI Shu-Hang, MA Qing-lin, CHEN Wei. Development of grating-based precise displacement measurement technology[J]. Chinese Optics, 2019, 12(4): 741-752. doi: 10.3788/CO.20191204.0741

PDF( 3757 KB)

Development of grating-based precise displacement measurement technology

doi: 10.3788/CO.20191204.0741

GAO Xu^{1
,
,},
LI Shu-Hang^1
,,
MA Qing-lin¹,
CHEN Wei²

1.
Changchun University of Science and Technology, Changchun 130022, China
2.
Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China

Funds:

National Natural Science Foundation of China 51505078

Outstanding Youth Fund of Jilin Science and Technology Department 20180520187JH

Jilin Provincial Department of Education "13th Five-Year" Science and Technology Project Fund JJKH20190544KJ

China Postdoctoral Science Foundation Funded Project 2018M641778

More Information

Corresponding author: GAO Xu, E-mail:gaox19870513@163.com
Received Date: 07 Nov 2018
Rev Recd Date: 29 Dec 2018
Publish Date: 01 Aug 2019

Abstract

Abstract

Precision measurement is the basis of precision machining and it's one of the decisive factors of manufacturing accuracy in the manufacturing industry. It is widely used in the field of contemporary precision machinery manufacturing. The grating-based precise displacement measurement system play an important role in the field of precise displacement measurement because of its small environmental requirements and high resolution. The grating-based precise displacement measurement system includes optical measurement, signal reception, electronic subdivision and integral adjustment. In this paper, the optical path of optical measurement is introduced. Firstly, the principles of classical grating interferometric displacement measurement are introduced. Secondly, the key technologies of the grating-based precise displacement measurement system are summarized. Thirdly, the latest representative measurement techniques are compared and analyzed, and their advantages and disadvantages are summarized. Finally, prospects are provided for the future of grating-based precise displacement measurement technology wherein the the development trend of its high precision, high resolution, high robustness, miniaturization, multi-dimension and multi-technological fusion are revealed.
- displacement measurement,
- grating,
- high precision measurement,
- interference and diffraction

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References(43)

References

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