Volume 13 Issue 2
Apr.  2020
Turn off MathJax
Article Contents
ZHAO Yun, LV Jin-guang, QIN Yu-xin, TAO Jin, LIANG Zhong-zhu, WANG Wei-biao, NI Qi-liang, MENG De-jia, LIANG Jing-qiu. Optimization design and experimental study of micro-Fourier transform spectrometer[J]. Chinese Optics, 2020, 13(2): 411-425. doi: 10.3788/CO.20201302.0411
Citation: ZHAO Yun, LV Jin-guang, QIN Yu-xin, TAO Jin, LIANG Zhong-zhu, WANG Wei-biao, NI Qi-liang, MENG De-jia, LIANG Jing-qiu. Optimization design and experimental study of micro-Fourier transform spectrometer[J]. Chinese Optics, 2020, 13(2): 411-425. doi: 10.3788/CO.20201302.0411

Optimization design and experimental study of micro-Fourier transform spectrometer

doi: 10.3788/CO.20201302.0411
Funds:  National Natural Science Foundation(No.61627819, No.61575193, No.61805239, No.61727818, No.61735018);Jilin Province Science and Technology Development Plan(No.20190303063SF, No.20180201024GX, No.20150520101JH, No.20170204077GX, No.20190101012JH, No.20160204064GX); Jilin Province Young and Middle-aged Science and Technology Innovation Leaders and Team Project(No.20190101012JH); National Fund for Applied Optics Open Fund
More Information
  • Author Bio:

    ZHAO Yun(1993—), male, born in Zibo City, Shandong Province.Master degree.In 2016, he obtained the bachelor's degree from Hefei University of Technology.Since 2016, he has been studying for the master degree in the CAS Changchun Institute of Optics, Fine Mechanics and Physics, where he is mainly engaged in the research of optical design.E-mail:1002803876@qq.com

    LV Jin-guang(1984—), male, born in Jiaohe City, Jilin Province.Ph.D.and associate researcher.Mainly engaged in the research of micro optical systems design and optical information processing.E-mail:jinguanglv@163.com

    LIANG Jing-qiu(1962—), female, born in Shenyang City, Liaoning Province. Doctoral supervisor. Mainly engaged in the research of micro optical systems, micro-optical electromechanical systems (MOEMS) and microstructure optics. E-mail:liangjq@ciomp.ac.cn

  • Corresponding author: LV Jin-guang, E-mail:jinguanglv@163.com; LIANG Jing-qiu, E-mail:liangjq@ciomp.ac.cn
  • Received Date: 28 Feb 2019
  • Rev Recd Date: 20 Mar 2019
  • Publish Date: 01 Apr 2020
  • In order to achieve the goal of miniaturization and light weight of Fourier transform spectrometer, a light-weight grid beam splitter structure was designed instead of the traditional parallel plate beam splitter. The influence of the grid edge of the grid beam splitter on spectrum reconstruction was analyzed, and the tolerance of production error was proposed. The micro-Fourier transform spectrometer was modeled and simulated, and the optimal structure of the grid beam splitter was obtained. The spectral inversion was performed by system simulation, and the restored spectrum was obtained. The spectral error introduced by the grid beam splitter was calculated. The construction and debugging of the prototype was completed, and the recovered spectrum of the actual system was obtained, which proved the feasibility of the miniaturized system. Compared with the traditional Fourier transform spectrometer, the miniaturization system has the advantages of small volume and good stability, and can be used for online monitoring.

     

  • loading
  • [1]
    BRACHET F, HÉBERT P J, CANSOT E, et al..Static Fourier transform spectroscopy breadboards for atmospheric chemistry and climate[J]. Proceedings of SPIE, 2008, 7100:710019. doi: 10.1117/12.797686
    [2]
    LACAN A, BRÉON F M, ROSAK A, et al..A static Fourier transform spectrometer for atmospheric sounding:concept and experimentalimplementation[J]. Optics Express, 2010, 18(8):8311-8331. doi: 10.1364/OE.18.008311
    [3]
    付建国, 梁静秋, 梁中翥.一种静态傅里叶变换红外光谱仪的光学系统分析与设计[J].光学学报, 2012, 32(2):0222006. http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=gxxb201202042

    FU J G, LIANG J Q, LIANG ZH ZH. Analysis and design for the optical system of a static infrared Fourier transform spectrometer[J]. Acta Optica Sinica, 2012, 32(2):0222006. (in Chinese) http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=gxxb201202042
    [4]
    李相贤, 徐亮, 高闽光, 等.分析温室气体及CO2碳同位素比值的傅里叶变换红外光谱仪[J].光学 精密工程, 2014, 22(9):2359-2368. http://d.old.wanfangdata.com.cn/Periodical/gxjmgc201409011

    LI X X, XU L, GAO M G, et al..Fourier transform infrared greenhouse analyzer for gases and carbon isotope ratio[J]. Opt. Precision Eng., 2014, 22(9):2359-2368. (in Chinese) http://d.old.wanfangdata.com.cn/Periodical/gxjmgc201409011
    [5]
    WALLRABE U, SOLF C, MOHR J, et al..Miniaturized Fourier transform spectrometer for the near infrared wavelength regime incorporating an electromagnetic linear actuator[J]. Sensors and Actuators A:Physical, 2005, 123-124:459-467. doi: 10.1016/j.sna.2005.05.014
    [6]
    FENG C, WANG B, LIANG ZH ZH, et al..Miniaturization of step mirrors in a static Fourier transform spectrometer:theory and simulation[J]. Journal of the Optical Society of America B, 2011, 28(1):128-133. doi: 10.1364/JOSAB.28.000128
    [7]
    IVANOVE V. Static Fourier transform spectroscopy with enhanced resolving power[J]. Journal of Optics A:Pure and Applied Optics, 2000, 2(6):519-528. doi: 10.1088/1464-4258/2/6/304
    [8]
    FENG C, LIANG J Q, LIANG ZH ZH. Spectrum constructing with nonuniform samples using least-squares approximation by cosine polynomials[J]. Applied Optics, 2011, 50(34):6377-6383. doi: 10.1364/AO.50.006377
    [9]
    陈少杰, 齐向东, 巴音贺希格, 等.用于激光诱导等离子体光谱分析的便携式中阶梯光栅光谱仪设计[J].发光学报, 2013, 34(5):672-677. http://d.old.wanfangdata.com.cn/Periodical/fgxb201305024

    CHEN SH J, QI X D, BAYANHESHIG, et al..A portable echelle spectrograph design for laser-induced breakdown spectroscopy[J]. Chinese Journal of Luminescence, 2013, 34(5):672-677. (in Chinese) http://d.old.wanfangdata.com.cn/Periodical/fgxb201305024
    [10]
    吕金光, 梁静秋, 梁中翥, 等.空间调制傅里叶变换红外光谱仪分束器楔形误差分析[J].光学学报, 2014, 34(10):1030001. http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=gxxb201410043

    LV J G, LIANG J Q, LIANG ZH ZH, et al..Analysis of wedge error of beam splitter in spatial modulation Fourier transform infrared spectrometer[J]. Acta Optica Sinica, 2014, 34(10):1030001. (in Chinese) http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=gxxb201410043
    [11]
    李晚侠, 卢启鹏, 宋源, 等.基于双直角分束器的反射式静态傅里叶光谱仪光学系统[J].光学学报, 2017, 37(8):0812004. http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=gxxb201708022

    LI W X, LU Q P, SONG Y, et al..Reflective static Fourier spectrometer optical system based on double right-angle beam splitter[J]. Acta Optica Sinica, 2017, 37(8):0812004. (in Chinese) http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=gxxb201708022
  • 加载中

Catalog

    通讯作者: 陈斌, bchen63@163.com
    • 1. 

      沈阳化工大学材料科学与工程学院 沈阳 110142

    1. 本站搜索
    2. 百度学术搜索
    3. 万方数据库搜索
    4. CNKI搜索

    Figures(15)

    Article views(1433) PDF downloads(108) Cited by()
    Proportional views

    /

    DownLoad:  Full-Size Img  PowerPoint
    Return
    Return