单色器晶体角度微振动的高精度原位检测技术

樊奕辰; 李中亮; 徐中民; 张琦; 刘运; 王劼; 樊奕辰; 李中亮; 徐中民; 张琦; 刘运; 王劼

doi:10.3788/CO.20201301.0156

[1]

上海光源线站工程(二期)初步设计报告[R]. 2017: 4.

Preliminary design report of SSRF beamline project (Phase Ⅱ)[R]. 2017: 4.

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CALIARI R M, BAGNATO O R, DE SOUZA JR L, et al.. Studies on flow-induced vibrations for the new high-dynamics DCM for sirius[C]. Proceedings of the 9th Edition of the Mechanical Engineering Design of Synchrotron Radiation Equipment and Instrumentation Conference, ALBA , 2016.

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JOSEP N, JUAN C M, JRODI J, et al.. Characterization of the dynamic performance of DCMs at Alba[C]. Proceedings of ESRF DCM Workshop , 2014.

[4]

PREISSNER C, LAI B, KASTENGREN A, et al.. Monochromator vibration considerations[C]. Proceedings of ESRF DCM Workshop, ESRF , 2014.

[5]

ALCOCK S. Off-line characterization & optimization of monochromators[C]. Proceedings of ESRF DCM Workshop, ESRF, 2014.

[6]

SERGEEV I, DOEHRMANN R, PETRA Ⅲ D. Vibrations in the DCM and their effect on the beam stability and source broadening[C]. Proceedings of ESRF DCM Workshop , ESRF, 2014.

[7]

KRISTIANSEN P, HORBACH J, DÖHRMANN R, et al.. Vibration measurements of high-heat-load monochromators for DESY PETRA Ⅲ extension[J]. Journal of Synchrotron Radiation, 2015, 22(4): 879-885. doi: 10.1107/S1600577515005664

[8]

CIATTO G, MORENO T, AUBERT N, et al.. First test experiments with FMB-Oxford direct drive DCM at the Sirius beamline of Synchrotron SOLEIL[C]. Proceedings of ESRF DCM Workshop, ESRF, 2014.

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Agilent Laser and Optics, User's Manual, Volume Ⅱ[M]. 5th ed. Santa Clara: Agilent Technologies, 2007.

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于海利.基于双频激光干涉测量的大行程纳米定位技术及其应用研究[D].长春: 中国科学院长春光学精密机械与物理研究所, 2011. http://cdmd.cnki.com.cn/Article/CDMD-80139-1012296951.htm

YU H L. Research on large stroke nano-positioning technology and application based on dual-frequency laser interferometer[D]. Changchun: Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, 2011. (in Chinese) http://cdmd.cnki.com.cn/Article/CDMD-80139-1012296951.htm

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陈科位, 于宏柱, 张善文, 等.大型衍射光栅刻划机刀架系统的设计[J].光学精密工程, 2013, 21(11): 2900-2905. http://d.old.wanfangdata.com.cn/Periodical/gxjmgc201311023

CHEN K W, YU H ZH, ZHANG SH W, et al.. Design of diamond carriage system for large diffraction grating ruling engine[J]. Opt. Precision Eng., 2013, 21(11): 2900-2905. (in Chinese) http://d.old.wanfangdata.com.cn/Periodical/gxjmgc201311023

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陈家华, 邹鹰, 卢启鹏, 等.梦之线光栅单色器温度起伏对能量漂移的影响[J].光学精密工程, 2018, 26(9): 2312-2318. http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=gxjmgc201809024

CHEN J H, ZOU Y, LU Q P, et al.. Effect on energy drift from temperature fluctuation at the dreamline monochromator[J]. Opt. Precision Eng., 2018, 26(9): 2312-2318. (in Chinese) http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=gxjmgc201809024

[13]

吴坤, 薛松, 卢启鹏, 等. SX-700单色器光栅正弦机构转角重复精度的模拟分析与测量[J].光学精密工程, 2010, 18(1): 45-51. http://d.old.wanfangdata.com.cn/Periodical/gxjmgc201001007

WU K, XUE S, LU Q P, et al.. Simulation analysis and measurement of rotation angle repeatability for grating sine mechanism of SX-700 monochromator[J]. Opt. Precision Eng., 2010, 18(1): 45-51. (in Chinese) http://d.old.wanfangdata.com.cn/Periodical/gxjmgc201001007

[14]

韩雅菲, 唐恩凌, 贺丽萍, 等.高速碰撞诱发闪光辐射温度的测量及误差分析[J].发光学报, 2018, 39(5): 653-660. http://d.old.wanfangdata.com.cn/Periodical/fgxb201805007

HAN Y F, TANG E L, HE L P, et al.. Measurement and error analysis of flash radiant temperature induced by high-velocity impact[J]. Chinese Journal of Luminescence, 2018, 39(5): 653-660. (in Chinese) http://d.old.wanfangdata.com.cn/Periodical/fgxb201805007

[15]

马宏, 王金波.仪器精度理论[M].北京:北京航空航天大学出版社, 2009.

MA H, WANG J B. Instrument Precision Theory[M]. Beijing: Beihang University Press, 2009. (in Chinese)

[16]

KELLY J, ALCOCK S G. Measurement & minimization of mount induced strain on double crystal monochromator crystals[J]. Journal of Physics: Conference Series, 2013, 425(5): 052024. doi: 10.1088/1742-6596/425/5/052024

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Agilent N1230A PCI Three-Axis Position Monitor Board, User's Guide[Z]. Agilent Technologies, USA, 2013.

[1]	上海光源线站工程(二期)初步设计报告[R]. 2017: 4. Preliminary design report of SSRF beamline project (Phase Ⅱ)[R]. 2017: 4.
[2]	CALIARI R M, BAGNATO O R, DE SOUZA JR L, et al.. Studies on flow-induced vibrations for the new high-dynamics DCM for sirius[C]. Proceedings of the 9th Edition of the Mechanical Engineering Design of Synchrotron Radiation Equipment and Instrumentation Conference, ALBA , 2016.
[3]	JOSEP N, JUAN C M, JRODI J, et al.. Characterization of the dynamic performance of DCMs at Alba[C]. Proceedings of ESRF DCM Workshop , 2014.
[4]	PREISSNER C, LAI B, KASTENGREN A, et al.. Monochromator vibration considerations[C]. Proceedings of ESRF DCM Workshop, ESRF , 2014.
[5]	ALCOCK S. Off-line characterization & optimization of monochromators[C]. Proceedings of ESRF DCM Workshop, ESRF, 2014.
[6]	SERGEEV I, DOEHRMANN R, PETRA Ⅲ D. Vibrations in the DCM and their effect on the beam stability and source broadening[C]. Proceedings of ESRF DCM Workshop , ESRF, 2014.
[7]	KRISTIANSEN P, HORBACH J, DÖHRMANN R, et al.. Vibration measurements of high-heat-load monochromators for DESY PETRA Ⅲ extension[J]. Journal of Synchrotron Radiation, 2015, 22(4): 879-885. doi: 10.1107/S1600577515005664
[8]	CIATTO G, MORENO T, AUBERT N, et al.. First test experiments with FMB-Oxford direct drive DCM at the Sirius beamline of Synchrotron SOLEIL[C]. Proceedings of ESRF DCM Workshop, ESRF, 2014.
[9]	Agilent Laser and Optics, User's Manual, Volume Ⅱ[M]. 5th ed. Santa Clara: Agilent Technologies, 2007.
[10]	于海利.基于双频激光干涉测量的大行程纳米定位技术及其应用研究[D].长春: 中国科学院长春光学精密机械与物理研究所, 2011. http://cdmd.cnki.com.cn/Article/CDMD-80139-1012296951.htm YU H L. Research on large stroke nano-positioning technology and application based on dual-frequency laser interferometer[D]. Changchun: Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, 2011. (in Chinese) http://cdmd.cnki.com.cn/Article/CDMD-80139-1012296951.htm
[11]	陈科位, 于宏柱, 张善文, 等.大型衍射光栅刻划机刀架系统的设计[J].光学精密工程, 2013, 21(11): 2900-2905. http://d.old.wanfangdata.com.cn/Periodical/gxjmgc201311023 CHEN K W, YU H ZH, ZHANG SH W, et al.. Design of diamond carriage system for large diffraction grating ruling engine[J]. Opt. Precision Eng., 2013, 21(11): 2900-2905. (in Chinese) http://d.old.wanfangdata.com.cn/Periodical/gxjmgc201311023
[12]	陈家华, 邹鹰, 卢启鹏, 等.梦之线光栅单色器温度起伏对能量漂移的影响[J].光学精密工程, 2018, 26(9): 2312-2318. http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=gxjmgc201809024 CHEN J H, ZOU Y, LU Q P, et al.. Effect on energy drift from temperature fluctuation at the dreamline monochromator[J]. Opt. Precision Eng., 2018, 26(9): 2312-2318. (in Chinese) http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=gxjmgc201809024
[13]	吴坤, 薛松, 卢启鹏, 等. SX-700单色器光栅正弦机构转角重复精度的模拟分析与测量[J].光学精密工程, 2010, 18(1): 45-51. http://d.old.wanfangdata.com.cn/Periodical/gxjmgc201001007 WU K, XUE S, LU Q P, et al.. Simulation analysis and measurement of rotation angle repeatability for grating sine mechanism of SX-700 monochromator[J]. Opt. Precision Eng., 2010, 18(1): 45-51. (in Chinese) http://d.old.wanfangdata.com.cn/Periodical/gxjmgc201001007
[14]	韩雅菲, 唐恩凌, 贺丽萍, 等.高速碰撞诱发闪光辐射温度的测量及误差分析[J].发光学报, 2018, 39(5): 653-660. http://d.old.wanfangdata.com.cn/Periodical/fgxb201805007 HAN Y F, TANG E L, HE L P, et al.. Measurement and error analysis of flash radiant temperature induced by high-velocity impact[J]. Chinese Journal of Luminescence, 2018, 39(5): 653-660. (in Chinese) http://d.old.wanfangdata.com.cn/Periodical/fgxb201805007
[15]	马宏, 王金波.仪器精度理论[M].北京:北京航空航天大学出版社, 2009. MA H, WANG J B. Instrument Precision Theory[M]. Beijing: Beihang University Press, 2009. (in Chinese)
[16]	KELLY J, ALCOCK S G. Measurement & minimization of mount induced strain on double crystal monochromator crystals[J]. Journal of Physics: Conference Series, 2013, 425(5): 052024. doi: 10.1088/1742-6596/425/5/052024
[17]	Agilent N1230A PCI Three-Axis Position Monitor Board, User's Guide[Z]. Agilent Technologies, USA, 2013.