乌氏干涉测量的信息读取

张景和; 张顺国; 董跃华; 张景和; 张顺国; 董跃华

[1] 苏绍璟. 大量程纳米级光栅位移测量理论及关键技术研究 . 长沙:国防科技大学 ,2001. SU SH J. The theory and key technology of the large range of nano-grating displacement measurement . Changsha:National University of Defense Technology,2001.(in Chinese) [2] TOLLES W M. Nanoscience and nanotechnology in Europe[J]. Nanotechnology,1996,(7):59-105. [3] 高宏堂. 2.5维大范围纳米激光干涉测长信号处理子系统的研究 . 北京:中国计量科学研究院 ,2005. GAO H T. The study of 2.5-dimensional large-scale laser interferometer measuring signal processing subsystem . Beijing:National Institute of Metrology P.R.China.,2005.(in Chinese) [4] 宋浩. 高精度大量程位移测量与校准器的研究 . 武汉:华中科技大学 ,2007. SONG H. The study of large range and high-precision displacement measurement and calibration devices . Wuhan:Huazhong University of Science and Technology,2007.(in Chinese) [5] SUN CH S,YU L CH,SUN Y X,et al.. Scanning white-light interferometer for measurement of the thickness of a transparent oil film on water[J]. Appl. Opt.,2005,44:5202-5205. [6] 夏豪杰. 高精度二维平面光栅测量系统及关键技术研究 . 合肥:合肥工业大学 ,2006. XIA H J. High-precision of two-dimensional grating measurement system and key technologies . Hefei:Hefei University of Technology,2006.(in Chinese) [7] 郧建平. 基于白光干涉的表面形貌接触和非接触两用测量系统的研究 . 武汉:华中科技大学 ,2008. YUN J P. The study based on white light interference surface morphology of dual-use contact and non-contact measurement system . Wuhan:Huazhong University of Science and Technology,2008.(in Chinese) [8] 李东光,张国雄. 高速精密激光干涉测量的研究现状及其关键技术[J]. 航空精密制造技术 ,1998,34(6):29-34. LI D G,ZHANG G X. High speed precision laser interferometry's research and its key technologies[J]. Aviation Precision Manufacturing Technol.,1998,34(6):29-34.(in Chinese) [9] 李家猛. 嵌入式光纤温度传感器的设计 . 合肥:合肥工业大学 ,2007. LI J M. The design of embedded fiber-optic temperature sensor . Hefei:Hefei University of Technology,2007.(in Chinese) [10] 张丽平. 光栅测量在汽车轮毂跳动量测量中的应用 . 长春:长春理工大学 ,2008. ZHANG L P. The application of grating measured in the beating wheel measurement . Changchun:Changchun University of Science and Technology,2008.(in Chinese) [11] 陈莉. 球面曲率半径的单频激光干涉测量研究 . 南京:南京理工大学 ,2005. CHEN L. The study of single-frequency laser interferometer measure in spherical radius of curvature . Nanjing:Nanjing University of Science and Technology,2005.(in Chinese) [12] 韩旭东,艾华. 共光路移相单频激光干涉测长系统[J]. 光学技术 ,2004,30(2):195-198. HAN D X,AI H. Common-path phase single-rate laser interferometric system[J]. Opt. Technique,2004,30(2):195-198.(in Chinese) [13] 张景和.V形法测量中支撑对测量精度的影响[J]. 光学精密工程 ,1998(5):128-132. ZHANG J H. Support for the measurement accuracy influence in V measurement[J]. Opt. Precision Eng.,1998(5):128-132.(in Chinese) [14] 刘岩,龙科慧,王立朋,等. 栅尺动态测量仪[J]. 光学精密工程 ,1993,1(2):14-19. LIU Y,LONG K H,WANG L P,et al.. Grating dynamic measuring instrument[J]. Opt. Precision Eng.,1993,1(2):14-19.(in Chinese) [15] BINNIG G,QUATE C F,GEBRER C. Atomic force microscope[J]. Phys. Rev. Lett.,1986,56(9):930-933.