| [1] 董莉莉,金宏. 采用可变光阑的自动调光系统的稳定性分析[J]. 光学 精密工程 ,1999,7(1):100-104. DONG L L,JIN H. The stabilization analysis of automatically adjustable optical-intensity system using iris diaphragm[J]. Opt. Precision Eng.,1999,7(1):100-104.(in Chinese) [2] 李为,李德熊,陈南光.摄影仪器[M]. 北京:北京理工大学出版社,1993. LI W,LI D X,CHEN N G. Photography Apparatus[M]. Beijing:Beijing University of Technology,1993.(in Chinese) [3] 王义龙. 特殊口径调光系统的研制及其实验研究 .哈尔滨:哈尔滨工业大学,2007. WANG Y L. Development of the special caliber dimming system and its experimental study . Harbin:Graduate Harbin Institute of Technology,2007.(in Chinese) [4] 巩岩,张巍. 光刻曝光系统的现状与发展[J]. 中国光学与应用光学 ,2008,1(1):25-35. GONG Y,ZHANG W. Present status and progress in 193 nm exposure system in lithography[J]. Chinese J. Opt. Appl. Opt.,2008,1(1):25-35.(in Chinese) [5] 王丽萍. 极紫外投影光刻光学系统[J]. 中国光学与应用光学 ,2010,3(5):452-461. WANG L P. Optical system of extreme ultraviolet lithography[J]. Chinese J. Opt. Appl. Opt.,2010,3(5):452-461.(in Chinese) [6] 《光学仪器设计手册》编辑组.光学仪器设计手册[M]. 北京:国防工业出版社,1972. Editor group of 《Optics Apparatus Design Manual》. Optics Apparatus Design Manual[M]. Beijing:National Defence Industry Press,1972.(in Chinese) [7] 常远,甄万才. 齿轮传动与蜗轮蜗杆传动性能比较与消隙机构[J]. 电子工业专用设备 ,2007,(144):74-76. CHANG Y,ZHEN W C. Gear and worm-wheel steering gear's performances comparison and backlash eliminated structure[J]. Equipment Electronic Products Manufacturing,2007,(144):74-76.(in Chinese) [8] 程文冬,曹岩. 直齿轮啮合疲劳强度的有限元仿真与失效分析[J]. 西安工业大学学报 ,2010,30(3):239-242. CHENG W D,CAO Y. Simulation study of meshing fatigue strength of involute cylinder gear[J]. J. Xi'an Technological University,2010,30(3):239-242.(in Chinese) |