表面改性碳化硅基底反射镜加工技术现状

康健; 宣斌; 谢京江; 康健; 宣斌; 谢京江

doi:10.3788/CO.20130606.824

[1] EALEY M A,WEAVER Q. Development history and trends for reaction bonded silicon carbide mirrors[J]. SPIE,1996,2856:66-72. [2] 范镝. 碳化硅光学表面抛光机理研究[J]. 激光与光电子学进展,2012,49(022202):022202-1-022202-4. FAN D. Study on the polishing mechanism of Silicon Carbide optical surface[J]. Laser and Optoelectronics Progress,2012,49(022202):022202-1-022202-4.(in Chinese) [3] 韩杰才,张宇民,赫晓东. 大尺寸轻型SiC光学反射镜研究进展[J]. 宇航学报,2001,22(6):124-132. HAN J C,ZHANG Y M,HE X D. Optical large scale lightweight SiC mirrors[J]. J. Astronautics,2001,22(6):124-132.(in Chinese) [4] 张长瑞,周新贵,曹英斌,等. SiC及其复合材料轻型反射镜的研究进展[J]. 航天返回与遥感,2003,24(2):14-19. ZHANG CH R,ZHOU X G,CAO Y B,et al.. The development of light-weight optics made of SiC and SiC matrix composites[J]. Spacecraft Recovery and Remote Sensing,2003,24(2):14-19. (in Chinese) [5] 杨秉新. 空间相机用碳化硅(SiC)反射镜的研究[J]. 航天返回与遥感,2003,24(1):15-18. YANG B X. Research of SiC reflection mirror for space camera[J]. Spacecraft Recovery and Remote Sensing,2003,24(1):15-18.(in Chinese) [6] TOBIN E,MAGIDA M,KISHNER S,et al.. Design, fabrication and test of a meter-class reaction bonded SiC mirror blank[J]. SPIE,1995,2543:12-21. [7] 张玉娣,周新贵,张长瑞. C_f/SiC陶瓷基符合材料的发展与应用现状[J]. 材料工程,2005(4):60-63. ZHANG Y D,ZHOU X G,ZHANG CH R. Development and application of C_f/SiC ceramic matrix composites[J]. Material Eng.,2005(4):60-63.(in Chinese) [8] ZHANG J H,ZHANG Y M,HAN J C,et al.. Design and fabrication of large-scale lightweight SiC space mirror[J]. SPIE,2006,6148:61480U1-61480U6. [9] ZHOU H,ZHANG CH R,CAO Y B,et al.. Lightweight C/SiC mirrors for space application[J]. SPIE,2006,6148:61480L1-61480L6. [10] 高劲松,申振峰,王笑夷,等. SiC空间反射镜材料及其表面改性技术现状分析[J]. 中国光学与应用光学,2009,2(2):71-78. GAO J S,SHEN ZH F,WANG X Y,et al.. Research status of SiC space mirror material and its surface modification[J]. Chinese J. Opt. Appl. Opt.,2009,2(2):71-78.(in Chinese) [11] 申振峰,高劲松,陈红,等. 两种常用碳化硅反射镜基底表面改性的研究[J]. 光学技术,2009,35(1):21-24. SHEN ZH F,GAO J S,CHEN H,et al.. Research of the surface modification for two kinds of silicon carbide mirror in common use[J]. Optical Technique,2009,35(1):21-24.(in Chinese) [12] BOUGOIN M,LAVENAC J. From HERSCHEL to GAIA, 3-meter class SiC space optics[J]. SPIE,2011,8126:81260V-1-81260-10. [13] SUGANUMA M,KATAYAMA H,NAITOH M,et al.. Development and tests of interferometry facility in 6-m diameter radiometer thermal vacuum chamber in Tsukuba Space Center[J]. SPIE,2010,7731:77313X-1-77313X-7. [14] KORHONEN T,KEINANEN P,PASANEN M,et al.. Polishing and testing of the 1.5 m SiC mirror of the ALADIN instrument on the ADM-Aeolus satellite of ESA[J]. SPIE,2008,7102: 710219-1-710219-7. [15] 赵文星,张舸,赵汝成,等. 轻质碳化硅质反射镜坯体的制造工艺[J]. 光学精密工程,2011,19(11):2609-2617. ZHAO W X,ZHANG G,ZHAO R CH,et al.. Fabrication of silicon carbide lightweight mirror blank[J]. Opt. Precision Eng.,2011,19(11):2609-2617.(in Chinese) [16] 张学军,李志来,张忠玉. 基于SiC材料的空间相机非球面反射镜结构设计[J]. 红外与激光工程,2007,36(5):577-582. ZHANG X J,LI ZH L,ZHANG ZH Y. Space telecope aspherical mirror structure design based on SiC material[J]. Infrared and Laser Engineering,2007,36 (5):577-582.(in Chinese) [17] 张舸,赵汝成,赵文星. 大尺寸轻型碳化硅质镜体的制造与材料性能测试[J]. 光学精密工程,2006,14(5):759-763. ZHANG G,ZHAO R CH,ZHAO W X. Fabrication and test of large scale light-weight SiC mirror[J]. Opt.d Precision Eng.,2006,14(5):759-763. (in Chinese) [18] ZHANG Y M,ZHOU Y F,HAN J C,et al.. Preparation of silicon coating on SiC mirror by EB-PVD[J]. SPIE,2006,6149:61492C1-61492C5. [19] 张剑寒,张宇民,韩杰才,等. 空间用碳化硅反射镜的设计制造与测试[J]. 光学精密工程,2006,14(2):179-184. ZHANG J H,ZHANG Y M,HAN J C,et al.. Design, fabrication and testing of space-borne SiC mirror[J]. Opt. Precision Eng.,2006,14(2):179-184.(in Chinese) [20] 张舸,赵汝成,赵文兴. 空间用反应烧结碳化硅反射镜坯体制备技术研究[J]. 空间科学学报,2011,31(3):401-405. ZHANG G,ZHAO R CH,ZHAO W X. Study on fabrication technology of reaction bonded silicon carbide mirror blank for space[J]. Chinese J. Space Sci.,2011,31(3):401-405.(in Chinese) [21] 唐惠东,李龙珠,孙媛媛,等. SiC反射镜镜坯制备工艺的综述与探讨[J]. 佛山陶瓷, 2011,8:16-21. TANG H D,LI L ZH,SUN Y Y,et al. Development of SiC mirror blank preparation technics[J]. Foshan Ceramics,2011,8:16-21.(in Chinese) [22] 彭晓英,陈玉峰. 轻型碳化硅陶瓷反射镜材料研究进展[J]. 中国陶瓷,2009,45(4):9-12. PENG X Y,CHEN Y F. The development research of reflective porcelain materials with lightweight silicon carbide[J]. China Ceramics,2009, 45(4):9-12.(in Chinese) [23] 康念辉,李圣怡,郑子文,等. 典型碳化硅光学材料的超光滑抛光试验研究[J]. 中国机械工程,2008,19(21):2528-2532. KANG N H,LI S Y,ZHENG Z W,et al.. Experimental research on super-smooth polishing process of typical silicon carbide materials[J]. China Mechanical Engineering,2008,19(21):2528-2532.(in Chinese) [24] JOHNSON S. SiC coatings on RB SiC mirrors for ultra-smooth surfaces[J]. SPIE,1993,2018:237-247. [25] 苑永涛,刘红,陈益超,等. RB-SiC高致密、超光滑SiC表面改性涂层的制备[J]. 航天返回与遥感,2011,32(6):74-77. YUAN Y T,LIU H,CHEN Y CH,et al.. Preparation of high compact and super-smooth SiC surface modification coating on RB-SiC mirror[J]. Spacecraft Recovery and Remote Sensing,2011,32(6):74-77.(in Chinese) [26] 陈红,高劲松,宋琦,等. 离子辅助制备碳化硅改性薄膜[J]. 光学精密工程,2008,16(3):381-385. CHEN H,GAO J S,SONG Q,et al.. Si modified coating on SiC substrate by ion beam assisted deposition[J]. Opt. Precision Eng.,2008,16(3):381-385.(in Chinese) [27] 唐惠东,李龙珠,孙媛媛,等. SiC反射镜表面改性研究进展[J].江苏陶瓷, 2011,44(6):8-12. TANG H D,LI L ZH,SUN Y Y,et al.. Research development of surface modification of SiC mirror[J]. Jiangsu Ceramics,2011,44(6):8-12. (in Chinese) [28] TANG H D,HUANG Z R,TAN S H. PVD SiC and PVD Si coatings on RB SiC for surface modification[J]. SPIE,2006,6149:61490A1-61490A2. [29] ZHANG F. Optical characteristics of silicon modified on silicon carbide surface. Proceedings of International Conference on Frontiers of Laser Processing,Changchun,P.R.China:ICFL,2011. [30] 苑永涛,刘红,邵传兵,等. RB-SiC表面改性Si涂层的制备与性能[J]. 强激光与粒子束,2011,23(5):1281-1284. YUAN Y T,LIU H,SHAO CH B,et al.. Preparation and performance of Si coating on RB-SiC mirror for surface modification[J]. High Power Laser and Particle Beams,2011,23(5):1281-1284.(in Chinese) [31] 申振峰,高劲松,陈红,等. 空间用SiC反射镜表面改性的性能和可靠性评估[J] 光子学报,2009,38(9):2353-2357. SHEN ZH F,GAO J S,CHEN H,et al.. Performance and reliability evaluation for the surface modification of space used silicon carbide mirror[J]. Acta Photonica Sinica,2009,38(9):2353-2357.(in Chinese) [32] SHEN ZH F,GAO J S. Surface modification of SiC mirror by IARE method[J]. SPIE,2011,7995:79952l-1-79952l-4. [33] SHEN ZH F,GAO J S. Using DLC buffer layer to improve the effect of surface modification of RB-SiC mirror by SiC coating[C]. Proceedings of International Conference on Frontiers of Laser Processing,Changchun,P.R.China: ICFL,2011. [34] 蒋芳,杨勇,黄政仁. 反射镜用SiC陶瓷表面改性涂层的研究进展[J]. 机械工程材料,2012,36(12):1-4. JIANG F,YANG Y,HUANG ZH R. Research progress of SiC ceramic surface modification with coating for mirror[J]. Materials Mechanical Eng.,2012,36(12):1-4.(in Chinese) [35] 高劲松,申振峰,王笑夷,等. 空间反射镜基底材料碳化硅表面改性研究[J]. 光学学报,2009,29(9):2624-2629. GAO J S,SHEN ZH F,WANG X Y,et al.. Research on surface modification of space used SiC mirror[J]. Acta Optica Sinica,2009,29(9):2624-2629.(in Chinese) [36] JOSEPH R,DEEPAK S,CHRIS W,et al. Silicon carbide optics for space and ground based astronomical telescopes[J]. SPIE,2012,8450:845002-1-845002-8. [37] 高明辉,刘磊,任建岳. 空间相机反射镜碳化硅材料性能测试[J]. 光学精密工程,2007,15(8):1170-1174. GAO M H,LIU L,REN J Y. Characteristic test of SiC for space camera's mirror[J]. Opt. Precision Eng.,2007,15(8):1170-1174.(in Chinese) [38] 张峰,范镝,高劲松. 碳化硅表面硅改性层的特性研究[J]. 激光与光电子学进展,2012,49(032202):032202-1-032202-5. ZHANG F,FAN D,GAO J S. Study on characteristics of silicon modification layer on silicon carbide surface[J]. Laser and Optoelectronics Progress,2012,49(032202):032202-1-032202-5.(in Chinese) [39] 王孝坤. 大口径离轴碳化硅非球面反射镜加工与检测技术研究[J]. 激光与光电子学进展,2012,49(011201):011201-1-011201-5. WANG X K. Fabrication and testing of large aperture off-axis SiC aspheric mirror[J]. Laser and Optoelectronics Progress,2012,49(011201):011201-1-011201-5.(in Chinese) [40] 李俊峰,宋淑梅. 应用双摆动技术加工离轴碳化硅反射镜[J]. 光学精密工程,2012,20(8):1669-1675. LI J F,SONG S M. Manufacture of SiC off-axis aspheric mirrors by double-swing method[J]. Opt. Precision Eng.,2012,20(8):1669-1675.(in Chinese) [41] 李圣怡,戴一帆,解旭辉,等.大中型光学非球面制造与测量新技术[M]. 国防工业出版社,2011:92-96. LI S Y,DAI Y F,XIE X H,et al.. New Technology for Manufacturing and Measurement of Large and Middle-scale Aspheric Surfaces[M]. National Defense Industry Press,2011:92-96.(in Chinese) [42] AIKENS D M. The origin and evolution of the optics specifications for the National Ignition Facility[J]. SPIE,1995,2536:2-12 [43] ENGLISH R E,AIKENS D M,WHISTLER W T,et al.. Implementation of ISO 10110 optics drawing standards for the National Ignition Facility[J]. SPIE,1995,2536:51-56. [44] WANG D Y,ENGLISH R E J,AIKENS D M. Implementation of ISO 10110 optics drawing standards for the National Ignition Facility[J]. SPIE,1999,3782:502-508. [45] 张峰,徐领娣,范镝,等. 表面改性非球面碳化硅反射镜的加工[J]. 光学精密工程,2008,16(12):2479-2484. ZHANG F,XU L D,FAN D,et al.. Fabrication of surface modification aspheric SiC mirror[J]. Opt. Precision Eng.,2008,16(12):2479-2484.(in Chinese) [46] 袁志刚,唐才学,郑楠,等. 磁流变数控抛光技术研究[J]. 制造业自动化,2013,35(1):48-51. YUAN ZH G,TANG C X,ZHENG N,et al. The research on magnetorheological finishing[J]. Manufacturing Automation,2013,35(1):48-51.(in Chinese) [47] 王芳杰,郭忠达,阳志强,等. 单晶碳化硅磁流变抛光工艺实验研究[J]. 科技创新导报,2010,32(11):112-113. WANG F J,GUO ZH D,YANG ZH Q,et al.. Study on magnetorheological polishing process of single crystal silicon carbide[J]. Science and Technology Innovation Herald,2010,32(11):112-113.(in Chinese) [48] 张峰,邓伟杰. 碳化硅表面硅改性层的磁介质辅助抛光[J]. 光学学报,2012,32(11):1116001-1-1116001-6. ZHANG F,DENG W J. Magnetic-Medium assistant polishing of silicon modification layer on silicon carbide surface[J]. Acta Optica Sinica,2012,32(11)1116001-1-1116001-6.(in Chinese) [49] 廖文林,戴一帆,周林,等. 离子束抛光加工矩形离轴非球面镜[J]. 国防科技大学学报,2011,33(1):100-104. LIAO W L,DAI Y F,ZHOU L,et al.. Ion beam figuring for rectangular off-axis aspheric mirrors[J]. J. National University of Defense Technology,2011,33(1):100-104.(in Chinese) [50] 张峰. 空间相机碳化硅反射镜表面硅改性层的组合式抛光[J]. 中国激光,2013,40(7):0716001-1-0716001-5. ZHANG F. Combined type polishing of silicon modification layer on silicon carbide mirror for space camera[J]. Chinese J. Lasers,2013,40(7):0716001-1-0716001-5.(in Chinese)