[1] DETLEV R,STEFAN G,SALVADOR B,et al..Ultraviolet optical and microstructural properties of MgF2 and LaF3 coatings deposited by ion-beam sputtering and boat and electron- beam evaporation[J]. Appl. Opt.,2002,41(16):3196-3204. [2] LIAO B H,LI C C. Antireflection coatings for deep ultraviolet optics deposited by magnetron sputtering from Al targets[J]. Optics Express,2011,19(8):7507-7512. [3] SUN J,LI X,ZHANG W L,et al.. Laser-induced damage resistant of AlF3 films[J]. SPIE,2013,8786:278620-1-5. [4] SUN J,LI X,ZHANG W L,et al.. Effects of substrate temperatures and deposition rates on properties of aluminum fluoride thin films in deep-ultraviolet region[J]. Appl. Opt.,2012,51(35):8481-8489. [5] HUANG L C,JIN C H,PAUL W W,et al.. AlF3 film deposited by IAD with end-Hall ion source using SF6 as working gas[J]. Appl. Surface Sci.,2009,156:1232-1235. [6] LEE C C,LIAO B H,LIU M C. Developing new manufacturing methods for the improvement of AlF3 thin films[J]. Optics Express,2008,16(10):6904-6909. [7] 唐晋发,顾培夫,刘旭,等.现代光学薄膜技术[M]. 浙江:浙江大学出版社,2006. TANG J F,GU P F,LIU X,et al.. Modern Optical Thin Film Technology[M]. Zhejiang:Zhejiang University Press,2006.(in Chinese) [8] GUO C,KONG M D,LIN D W,et al.. Microstructure-related properties of magnesium fluoride films at 193nm by oblique-angle deposition[J].Optics Express,2013,21(1):960-967. [9] LIU C D,KONG M D,GUO C,et al.. Theoretical design of shadowing masks for uniform coatings on spherical substrates in planetary rotation systems[J].Optics Express,2012,20(21):23790-23791. [10] 常艳贺,金春水,李春,等. 热蒸发紫外LaF3薄膜光学常数的表征[J]. 中国激光,2012,39(8):0807002-1-4. CHANG Y H,JIN C SH,LI CH,et al.. Characterization of optical constants of ultraviolet LaF3 films by thermal evaporation[J]. Chinese J. Lasers,2012,39(8):0807002-1-4.(in Chinese) [11] 郭春,林大伟,张云洞,等. 光度法确定LaF3薄膜光学常数[J]. 光学学报,2011,31(7):0731001-1-7. GUO C,LIN D W,ZHANG Y D,et al..Determination of optical constants of LaF3 Films from spectrophotometric measurements[J]. Acta Optica Sinica,2011,31(7):0731001-1-7.(in Chinese) [12] 张立超,高劲松. 长春光机所深紫外光学薄膜技术研究进展[J]. 光学 精密工程,2012,20(11):2395-2401. ZHANG L CH,GAO J S. Developments of DUV coating technologies in CIOMP[J]. Opt. Precision Eng.,2012,20(11):2395-2401.(in Chinese)