飞秒脉冲激光对硅基多层膜损伤特性

郑长彬; 邵俊峰; 李雪雷; 王化龙; 王春锐; 陈飞; 王挺峰; 郭劲; 郑长彬; 邵俊峰; 李雪雷; 王化龙; 王春锐; 陈飞; 王挺峰; 郭劲

doi:10.3788/CO.20191202.0371

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