[1] CHEN J, BOS P J, VITHANA H, et al.. An electro-optically controlled liquid crystal diffraction grating[J]. Applied Physics Letters, 1995, 67(18):2588-2590. doi: 10.1063/1.115140
[2] PFEIFFER F, WEITKAMP T, BUNK O, et al.. Phase retrieval and differential phase-contrast imaging with low-brilliance X-ray sources[J]. Nat. Phys., 2006, 2(4):258-261. doi: 10.1038/nphys265
[3] 柳龙华, 刘刚, 熊瑛, 等.大高宽比、高线密度X射线透射光栅的制作[J].光学 精密工程, 2009, 17(1):72-75. doi: 10.3321/j.issn:1004-924X.2009.01.012

LIU L H, LIU G, XIONG Y, et al.. Fabrication of high-aspect-ratio and high-density X-ray transmission grating[J]. Opt. Precision Eng., 2009, 17(1):72-75.(in Chinese) doi: 10.3321/j.issn:1004-924X.2009.01.012
[4] 罗跃川, 张志友, 石莎, 等.提高OLED光导出效率的异形金属光栅的设计与优化[J].发光学报, 2010, 31(6):784-789. http://d.old.wanfangdata.com.cn/Periodical/fgxb201006002

LUO Y CH, ZHANG ZH Y, SHI SH, et al.. Design and optimizing of an abnormal metal grating used to enhance the light-output efficiency of organic light-emitting diode[J]. Chinese Journal of Luminescence, 2010, 31(6):784-789.(in Chinese) http://d.old.wanfangdata.com.cn/Periodical/fgxb201006002
[5] 刘镜, 刘娟, 王涌天, 等.亚波长金属光栅的表面等离子体激元共振特性[J].中国光学, 2011, 4(4):363-368. doi: 10.3969/j.issn.2095-1531.2011.04.007

LIU J, LIU J, WANG Y T, et al.. Resonant properties of sub-wavelength metallic gratings[J]. Chinese Optics, 2011, 4(4):363-368.(in Chinese) doi: 10.3969/j.issn.2095-1531.2011.04.007
[6] 王子强.单级衍射光栅的设计与制作[D].长春: 长春理工大学, 2013. http://www.wanfangdata.com.cn/details/detail.do?_type=degree&id=Y2529828

WANG Z Q. The design and fabrication of single-order diffraction grating[D]. Changchun: Changchun University of Science and Technology, 2013.(in Chinese) http://www.wanfangdata.com.cn/details/detail.do?_type=degree&id=Y2529828
[7] 杜立群, 鲍其雷, 赵明, 等.在金属基底上制作高深宽比金属微光栅的方法[J].光学 精密工程, 2015, 23(3):700-707. http://d.old.wanfangdata.com.cn/Periodical/gxjmgc201503013

DU L Q, BAO Q L, ZHAO M, et al.. Fabrication of metal micro-grating with high aspect ratio on metal substrate[J]. Opt. Precision Eng., 2015, 23(3)700-707.(in Chinese) http://d.old.wanfangdata.com.cn/Periodical/gxjmgc201503013
[8] 王鑫, 王永红, 吕有斌, 等.SU-8光刻胶应变分布光学全场检测方法[J].中国光学, 2016, 9(3):379-384. http://www.chineseoptics.net.cn/CN/abstract/abstract9452.shtml

WANG X, WANG Y H, LV Y B, et al.. Whole field optical detection method of strain distribution of SU-8 photoresist[J]. Chinese Optics, 2016, 9(3):379-384.(in Chinese) http://www.chineseoptics.net.cn/CN/abstract/abstract9452.shtml
[9] ROMANO L, VILA-COMAMALA J, KAGIAS M, et al. High aspect ratio metal microcasting by hot embossing for X-ray optics fabrication[C]. 42nd Micro- and nano-engineering conference MNE, 2017, 176: 6-10. http://www.sciencedirect.com/science/article/pii/S0167931716305445
[10] TIWARI P, MONDAL P, SRIVASTAVA A K, et al. Fabrication of high aspect ratio submicron gratings on 100 nm titanium membranes using electron beam lithography[J]. AIP Conference. Proceedings, 2017, 1832(1):060023. https://www.researchgate.net/publication/317144013_Fabrication_of_high_aspect_ratio_submicron_gratings_on_100nm_titanium_membranes_using_electron_beam_lithography
[11] KENNTNER J, ALTAPOVA V, GRUND T, et al. Fabrication and characterization of analyzer gratings with high aspect ratios for phase contrast imaging using a Talbot interferometer[J]. AIP Conference. Proceedings, 2012, 1437(1):89-93. http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=CC0213505348
[12] DAVID C, BRUDER J, ROHBECK T, et al.. Fabrication of diffraction gratings for hard X-ray phase contrast imaging[J]. Microelectronic Engineering, 2007, 84(5-8):1172-1177. doi: 10.1016/j.mee.2007.01.151
[13] GREGUS J A, GREEN C A, YOON E, et al.. Real-time latent image monitoring during holographic fabrication of submicron diffraction gratings[J]. Journal of Vacuum Science & Technology B Microelectronics & Nanometer Structures, 1993, 11(6):2468-2472. https://www.researchgate.net/publication/224462820_Real-time_latent_image_monitoring_during_holographic_fabrication_of_submicron_diffraction_gratings
[14] 赵劲松, 李立峰, 吴振华.全息光栅实时显影监测曲线的理论模拟[J].光学学报, 2004, 24(8):1146-1150. doi: 10.3321/j.issn:0253-2239.2004.08.027

ZHAO J S, LI L F, WU ZH H. Modeling of in-situ monitoring curves during development of holographic gratings[J]. Acta Optica Sinica, 2004, 24(8):1146-1150.(in Chinese) doi: 10.3321/j.issn:0253-2239.2004.08.027
[15] 孔鹏, 巴音贺希格, 李文昊, 等.全息光栅非对称曝光显影的理论模拟及实时监测[J].光学学报, 2010, 30(1):65-69. http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=gxxb201001012

KONG P, BAYANHESHIG, LI W H, et al.. Modeling and in-situ monitoring of the asymmetric exposure and development of holographic grating[J]. Acta Optica Sinica, 2010, 30(1):65-69.(in Chinese) http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=gxxb201001012
[16] SVAKHIN A S, SYCHUGOV V A, TIKHOMIROV A E. Diffraction gratings with high optical strength for laser resonators[J]. Quantum Electronics, 1994, 24(3):233-235. doi: 10.1070/QE1994v024n03ABEH000060
[17] 林华.介质膜光栅: 光刻胶掩模占宽比和离子束刻蚀槽深的监控[D].北京: 清华大学, 2005. http://cdmd.cnki.com.cn/Article/CDMD-10003-2007034923.htm

LIN H. Multilayer dielectric gratings: in-situ monitoring of duty cycle of photoresist mask and ion-beam-etched groove depth[D]. Beijing: Tsinghua University, 2005.(in Chinese) http://cdmd.cnki.com.cn/Article/CDMD-10003-2007034923.htm
[18] 樊叔维.任意槽形光栅衍射特性的矢量理论分析与计算[J].光学 精密工程, 2000, 8(1):5-10. doi: 10.3321/j.issn:1004-924X.2000.01.012

FAN SH W. Vector theory analysis and numerical calculation for any shape profile dielectric gratings[J]. Opt. Precision Eng., 2000, 8(1):5-10.(in Chinese) doi: 10.3321/j.issn:1004-924X.2000.01.012
[19] 陈勇.软X射线自支撑闪耀透射光栅的制作[D].合肥: 中国科学技术大学, 2013. http://cdmd.cnki.com.cn/Article/CDMD-10358-1014189421.htm

CHEN Y. Fabrication of soft X-ray freestanding blazed transmission gratings[D]. Hefei: University of Science and Technology of China, 2013.(in Chinese) http://cdmd.cnki.com.cn/Article/CDMD-10358-1014189421.htm
[20] YANG J, WANG ZH, WANG F, et al.. Atomically thin optical lenses and gratings[J]. Light: Science & Applications, 2016, 5(3):e16046. http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=gkxyyy-e201602004
[21] 曹艳波, 艾华.亚波长闪耀光栅矢量衍射效率计算[J].中国光学与应用光学, 2010, 3(6):679-683. doi: 10.3969/j.issn.2095-1531.2010.06.023

CAO Y B, AI H. Calculation of vectorial diffraction efficiency of subwavelength blazed gratings[J]. Chinese Journal of Optics and Applied Optics, 2010, 3(6):679-683.(in Chinese) doi: 10.3969/j.issn.2095-1531.2010.06.023
[22] 王斌.亚波长介质光栅设计简化模式法的修正及相关研究[D].北京: 中国科学院大学, 2014. http://ir.ciomp.ac.cn/handle/181722/41473

WANG B. Modification and research on simplified modal method for dielectric subwavelength gratings design[D]. Beijing: University of Chinese Academy of Sciences, 2014.(in Chinese) http://ir.ciomp.ac.cn/handle/181722/41473