[1] TOTSU K, FUJISHIRO K, TANAKA S, et al.. Fabrication of three-dimensional microstructure using maskless gray-scale lithography[J]. Sensors and Actuators A:Physical, 2006, 130-131:387-392. doi: 10.1016/j.sna.2005.12.008
[2] ZHANG T, GAO F, JIANG X Q. Surface topography acquisition method for double-sided near-right-angle structured surfaces based on dual-probe wavelength scanning interferometry[J]. Optics Express, 2017, 25(20):24148-24156. doi: 10.1364/OE.25.024148
[3] HOU P X, LIU C, CHENG H M. Field Emission from Carbon Nanotubes[M]. Nanomaterials Handbook. 2nd Ed. CRC Press, 2017: 255-272.
[4] MORITA S, GIESSIBL F J, MEYER E, et al.. Noncontact Atomic Force Microscopy[M]. Berlin:Springer, 2015.
[5] 董恺琛, 娄帅, 姚杰, 等.脉冲激光沉积薄膜的残余应力测量[J].光学 精密工程, 2018, 26(1):70-76. http://www.cnki.com.cn/Article/CJFDTOTAL-GXJM201801011.htm

DONG K CH, LOU SH, YAO J, et al.. Measurement of residual stresses in pulsed laser deposited thin films[J]. Opt. Precision Eng., 2018, 26(1):70-76.(in Chinese) http://www.cnki.com.cn/Article/CJFDTOTAL-GXJM201801011.htm
[6] TSUDA Y, KITASAKO Y, SADR A, et al.. Effects of brushing timing after erosive challenge on enamel loss in situ: White light interferometer and nanoindentation study[J]. Dental Materials Journal, 2016, 35(4) 613-620. doi: 10.4012/dmj.2015-405
[7] DAO T, THOMAS T, MARX D, et al.. Evaluation of non-destructive etch depth measurement for through silicon vias[C]. 2012 IEEE International Conference on IC Design & Technology, IEEE, 2012: 1-4.
[8] ZHOU Y F, CAI H ZH, ZHONG L Y, et al.. Eliminating the influence of source spectrum of white light scanning interferometry through time-delay estimation algorithm[J]. Optics Communications, 2017, 391:1-8. doi: 10.1016/j.optcom.2016.12.006
[9] XUE CH Y, LIU J, CHOU X J, et al.. White-light transmission reflection interference technology application in three-dimensional reconstruction method validation for microstructures[C]. Proceedings of the 3rd International Congress on Image and Signal Processing, IEEE, 2010, 2: 867-870.
[10] 刘燕德, 万常斓.芝麻油掺伪的近红外透射光谱检测技术[J].农业机械学报, 2012, 43(7):136-140. doi: 10.6041/j.issn.1000-1298.2012.07.025

LIU Y D, WAN CH L. Analysis of sesame oil adulteration using near infrared transmission spectroscopy[J]. Transactions of the Chinese Society for Agricultural Machinery, 2012, 43(7):136-140.(in Chinese) doi: 10.6041/j.issn.1000-1298.2012.07.025
[11] 秦五昌, 汤修映, 彭彦昆, 等.基于可见/近红外透射光谱的孵化早期受精鸡蛋的判别[J].光谱学与光谱分析, 2017, 37(1):200-204. http://www.cnki.com.cn/Article/CJFDTOTAL-GUAN201701044.htm

QIN W CH, TANG X Y, PENG Y K, et al.. Identification of fertilized chicken eggs based on visible/near-infrared spectrum during early stage of incubation[J]. Spectroscopy and Spectral Analysis, 2017, 37(1):200-204.(in Chinese) http://www.cnki.com.cn/Article/CJFDTOTAL-GUAN201701044.htm
[12] THOMAS D J. 3D white light interferometry assessment of robotic laser scalpel assisted surgery to minimise scar tissue formation[J]. International Journal of Surgery, 2017, 38:117-118. doi: 10.1016/j.ijsu.2016.12.037
[13] XIAO Y, QIU L R, ZHAO W Q. Laser confocal cylindrical radius measurement method and its system[J]. Applied Optics, 2017, 56(23):6596-6602. doi: 10.1364/AO.56.006596
[14] TAPILOUW A M, CHANG Y W, YU L Y, et al.. Reduction of batwing effect in white light interferometry for measurement of patterned sapphire substrates(PSS) wafer[J]. Proceedings of SPIE, 2016, 9960:996006. doi: 10.1117/12.2236874
[15] TERESCHENKO S, LEHMANN P, GOLLOR P, et al.. Vibration compensated high-resolution scanning white-light Linnik-interferometer[J]. Proceedings of SPIE, 2017, 10329:1032940. doi: 10.1117/12.2270226