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非球面光学元件的面形检测技术

师途 杨甬英 张磊 刘东

师途, 杨甬英, 张磊, 刘东. 非球面光学元件的面形检测技术[J]. 中国光学(中英文), 2014, 7(1): 26-46. doi: 10.3788/CO.20140701.026
引用本文: 师途, 杨甬英, 张磊, 刘东. 非球面光学元件的面形检测技术[J]. 中国光学(中英文), 2014, 7(1): 26-46. doi: 10.3788/CO.20140701.026
SHI Tu, YANG Yong-ying, ZHANG Lei, LIU Dong. Surface testing methods of aspheric optical elements[J]. Chinese Optics, 2014, 7(1): 26-46. doi: 10.3788/CO.20140701.026
Citation: SHI Tu, YANG Yong-ying, ZHANG Lei, LIU Dong. Surface testing methods of aspheric optical elements[J]. Chinese Optics, 2014, 7(1): 26-46. doi: 10.3788/CO.20140701.026

非球面光学元件的面形检测技术

doi: 10.3788/CO.20140701.026
基金项目: 

国家自然科学基金资助项目(No.11275172);中央高校基本科研业务费专项资金资助项目(No.2013QNA5006);现代光学仪器国家重点实验室创新基金资助项目(No.MOI201208)

详细信息
    作者简介:

    师途(1991—),女,河北宁晋人,博士研究生,2012年于南京理工大学获得学士学位,主要从事非球面检测方面的研究。E-mail:shitu0209@163.com

    通讯作者:

    刘东,E-mail:liudongopt@zju.edu.cn

  • 中图分类号: TQ171.65;TN247;TH741

Surface testing methods of aspheric optical elements

  • 摘要: 介绍了非球面各加工阶段的面形检测技术及其最新进展,重点介绍了非球面精密抛光期的面形检测技术,并对其中的非零位子孔径拼接干涉检测法和部分补偿法进行了详细阐述,提出了适用于大口径、深度非球面面形检测的组合干涉法的概念。概述了近年来受到关注的自由曲面非球面的发展和检测技术现状,展望了非球面检测技术的发展趋势。

     

  • [1] 潘君骅.光学非球面的设计、加工与检测[M]. 江苏:苏州大学出版社, 2004. PAN J H. Optical Aspheric Design, Processing and Testing[M]. Jiangsu:Suzhou University Press, 2004.(in Chinese) [2] FORBES G W. Shape specification for axially symmetric optical surfaces[J]. Optics Express, 2007, 15(8):5218-5226. [3] 杨力.先进光学制造技术[M]. 北京: 学出版社, 2001. YANG L. Advanced Optical Manufacturing Technologies[M]. Beijing:Science Press, 2001.(in Chinese) [4] 唐建冠, 伍凡, 吴时彬. 大口径非球面精磨表面形状检测技术研究[J]. 光学技术, 2001, 27(6):509-511. TANG J G, WU F, WU SH B. Research on testing techniques for larger aperture aspherical surface in the fine grinding stage[J]. Opt. Technique, 2001, 27(6):509-511.(in Chinese) [5] 乔玉晶, 吕宁. 非球面及非球面测量技术[J]. 哈尔滨商业大学学报 (自然科学版), 2005, 21(3):357-361. QIAO Y J, LV N. Study on aspheric surface and aspheric measurement[J]. J. Harbin University of Commerce(Natural Sciences Edition), 2005, 21(3):357-361.(in Chinese) [6] 闫峰涛, 范斌, 侯溪, 等. 基于子孔径拼接的Hindle球检测法[J]. 强激光与粒子束, 2012, 24(11):2555-2559. YAN F T, FAN B, HOU X, et al.. Hindle-sphere method based on sub-aperture stitching[J]. High Power Laser and Particle Beams, 2012, 24(11):2555-2559.(in Chinese) [7] ALIKENS D M, WOLFE C R. Use of power spectral density(PSD) functions in specifying optics for the National Ignition Facility[J]. SPIE, 1995, 2576:2812292. [8] BRAY M. Stitching interferometry: how and why it works[J]. SPIE, 1999, 3739:259-273. [9] 刘崇. 非球面环形子孔径拼接干涉测试方法研究[D].南京:南京理工大学, 2009. LIU C. Study of testing aspheric surface by annular subaperture stitching interference method[D]. Nanjig:Nanjing University of Science and Technology, 2009.(in Chinese) [10] KORDONSHI W, GORODKIN S. Material removal in magnetorheological finishing of optics[J]. Appl. Optics, 2011, 50(14):1984-1994. [11] 张坤领, 林彬, 王晓峰. 非球面加工现状[J]. 组合机床与自动化加工技术, 2007, (5):1-5, 10. ZHANG K L, LIN B, WANG X F. The status and developing tendency of the aspheric optic part machining[J]. Modular Machine Tool & Automatic Manufacturing Technique, 2007, (5):1-5, 10.(in Chinese) [12] 张金平. 夏克-哈特曼波前传感器检测大口径非球面应用研究[D].长春:中国科学院长春光学精密机械与物理研究所, 2012. ZHANG J P. Research on testing aspherical surface using Shack-Hartmann wavefront sensor[D]. Changchun:Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, 2012.(in Chinese) [13] 王孝坤. 激光跟踪仪检验非球面面形的方法[J]. 光子学报, 2012, 41(4):379-383. WANG X K. Measurement of aspherical surfaces by laser tracker[J]. Acta Photonica Sinica, 2012, 41(4):379-383.(in Chinese) [14] 卢文川, 张金平, 王孝坤, 等. Shack-Hartmann波前传感器非零位在轴检测离轴非球面反射镜[J]. 光学技术, 2012, 38(4):410-414. LU W CH, ZHANG J P, WANG X K, et al.. Shack-Hartmann Wavefront sensor nonnull testing off-axis aspheric surface on axis[J]. Optical Technique, 2012, 38(4):410-414.(in Chinese) [15] 雷柏平, 伍凡, 陈 强. 大口径非球面Ronchi光栅测量方法[J]. 光电工程, 2007, 34(5):140-144. LEI B P, WU F, CHEN Q. Measurement of large-aperture aspheric surfaces with Ronchi grating test method[J]. Opto-Electronic Eng., 2007, 34(5):140-144.(in Chinese) [16] 程颢波, 王英伟. 非球面零件光学检测技术研究[J]. 航空精密制造技术, 2004, 40(4):8-10. CHENG H B, WANG Y W. Research on testing technology for aspheric[J]. Aviation Precision Manufacturing Technology, 2004, 40(4):8-10.(in Chinese) [17] JING H, KING C, WALKER D. Simulation and validation of a prototype swing arm profilometer for measuring extremely large telescope mirror-segments[J]. Optics Express, 2010, 18(3):2036-2048. [18] BEUTLER A. 3D profilometry on aspheric and freeform lenses[J]. SPIE, 2011, 80082:80821J. [19] 耿安兵, 王彬. 基于轮廓仪测量数据的非球面方程反演技术[J]. 激光与光电子学进展, 2011, (4):91-95. GENG A B, WANG B. Inversion method for aspheric surface equation derivation based on data measured from talysurf[J]. Laser Optoelectronics Progress, 2011, (4):91-95.(in Chinese) [20] 韦涛. 非球面环形子孔径拼接检测方法及高精度定位方法研究[D].杭州:浙江大学, 2013. WEI T. Research of asphere testing using annular sub-aperture stitching method and a high-precision way to locate asphere[D]. Hangzhou:Zhejiang University, 2013.(in Chinese) [21] SU P, CHANG J O, ROBERT E P, et al.. Swing-arm optical CMM for aspherics[J]. SPIE, 2009, 7426:1-8. [22] 贾立得, 李圣怡, 戴一帆. 光学非球面形摆臂式轮廓法测量顶点曲率半径优化算法研究[J]. 仪器仪表学报, 2009, 30(9):1996-1999, 1794. JIA L D, LI SH Y, DAI Y F. Optimization algorithm for the measurement of vertex radius of aspherics with a swing-arm profilometer[J]. Chinese J. Scientific Instrument, 2009, 30(9):1996-1999, 1794.(in Chinese) [23] HARRIS D C. History of magnetorheological finishing[J]. SPIE, 2011, 8016:80160N/1-22. [24] 张斌, 王鸣, 马力. 非球面的光学测试技术[J]. 南昌大学学报 (工科版), 2003, 25(2):51-54. ZHANG B, WANG M, MA L. Optical testing technique for aspherical surface[J]. J. Nanchang University(Engineering & Technology), 2003, 25(2):51-54.(in Chinese) [25] 朱秋东, 郝群. 激光束偏转法非球面面形测量和计算[J]. 光学技术, 2002, 28(1):22-23, 27. ZHU Q D, HAO Q. Aspheric surface testing and calculating by laser deflectometry[J]. Optical Technique, 2002, 28(1):22-23, 27.(in Chinese) [26] 郎治国, 谭久彬. 大口径非球面的超精密回转扫描测量技术研究[J]. 光电子·激光, 2010, 21(6):898-902. LANG ZH G, TAN J B. Study of ultra-precise rotary scanning measuring technique for large aspheric surface[J]. J. Optoelectronics·Laser, 2010, 21(6):898-902.(in Chinese) [27] 王小鹏, 朱日宏, 王雷, 等. 数字刀口仪定量检验非球面光学元件面形[J]. 光学学报, 2011, 38(1):148-151. WANG X P, ZHU R H, WANG L, et al.. Digitized foucault tester for quantitative evaluation the surface of aspheric optical elements[J]. Acta Optica Sinica, 2011, 38(1):148-151.(in Chinese) [28] Ion beam polishing[2013-9-22]..[EB/OL].http://www.n-t-g.de. [29] MALACARA D. Optical Shop Testing[M]. New Jersey:John Wiley & Sons, Inc., 2007. [30] 伍凡. 非球面零检验的镜式补偿器设计[J].应用光学, 1994, 15(4):11-15. WU F. Design of mirror compensator for asphere null check[J]. J, Appl. Optics, 1994, 15(4):11-15.(in Chinese) [31] PALUSINSKI I A. Advancements in null corrector design and certification[D]. United States, Arizona:The University of Arizona, 2003. [32] 陈旭, 刘伟奇, 康玉思, 等. Offner补偿器的结构设计与装调[J]. 光学 精密工程, 2010, 18(1):88-93. CHEN X, LIU W Q, KANG Y S, et al.. Design and tolerance analysis of Offner compensator[J]. Opt. Precision Eng., 2010, 18(1):88-93.(in Chinese) [33] 伍凡. 非球面零检验的Dall补偿器设计[J]. 应用光学, 1993, 14(2):1-4. WU F. Design of dall compensator for aspherical surface null testing[J]. J. Appl. Optics, 1993, 14(2):1-4.(in Chinese) [34] OFFNER A. A null corrector for paraboloidal mirrors[J]. Appl. Optics, 1963, 2(2):153-155. [35] 伍凡. 非球面零检验的Offner补偿器设计[J]. 应用光学, 1993, 14(3):8-12. WU F. Design of reflective offner compensation for null testing of aspherical surface[J]. J. Appl. Optics, 1993, 14(3):8-12.(in Chinese) [36] 郭培基, 余景池, 孙侠菲. 一种大数值孔径小非球面检测用补偿器设计[J]. 光学 精密工程, 2002, 10(5):518-522. GUO P J, YU J C, SUN X F. Null lens design for small aspherical surface with large NA[J]. Opt. Precision Eng., 2002, 10(5):518-522.(in Chinese) [37] 郭培基, 余景池. 设计非球面检测用补偿器应注意的几个问题[J]. 光学技术, 2006, 32(1):118-120. GUO P J, YU J CH. Some problems about compensator designing[J]. Optical Technique, 2006, 32(1):118-120.(in Chinese) [38] MACGOVERN A J, WYANT J C. Computer generated holograms for testing optical elements[J]. Appl. Optics, 1971, 10(3):619-624. [39] 谢意, 陈强, 伍凡, 等. 凹非球面检测的双计算全息图设计及制作[J]. 光电工程, 2008, 35(6):59-62. XIE Y, CHEN Q, WU F, et al.. Design and fabrication of twin computer-generated holograms for testing concave aspherical surfaces[J]. Opto-Electronic Eng., 2008, 35(6):59-62.(in Chinese) [40] 王孝坤. 大口径离轴碳化硅非球面反射镜加工与检测技术研究[J]. 激光与光电子学进展, 2012(1):71-75. WANG X K. Fabrication and testing of large aperture off-axis sic aspheric mirror[J]. Laser Optoelectronics Progress, 2012(1):71-75.(in Chinese) [41] 康果果, 谢敬辉, 刘祎. 用于非球面检测的计算全息设计及其精度分析[J]. 光学技术, 2007, 33(5):654-657. KANG G G, XIE J H, LIU W. Design and error analysis of the CGH used for aspheric test[J]. Optical Technique, 2007, 33(5):654-657.(in Chinese) [42] 王成军. 双重计算全息图用于非球面绝对检验的研究[D].南京:南京理工大学, 2008. WANG CH J. Research of Aspheric surface absolute testing using a double-exposure hologram[D]. Nanjing:Nanjing University of Science and Technology, 2008.(in Chinese) [43] GREIVENKAMP J E, GAPPINGER R O. Design of a nonnull interferometer for aspheric wave fronts[J]. Appl. Optics, 2004, 43(27):5143-5151. [44] MURPHY P E, BROWN T G, MOORE D T. Interference imaging for aspheric surface testing[J]. Appl. Optics, 2000, 39(13):2122-2129. [45] 刘东, 杨甬英, 田超, 等. 非球面非零位检测中的回程误差分析与校正[J]. 光学学报, 2009, 29(3):688-696. LIU D, YANG Y Y, TIAN CH, et al.. Analysis and correction of retrace error for nonnull aspheric testing[J]. Acta Optica Sinica, 2009, 29(3):688-696.(in Chinese) [46] WU T, VALERA J D, MOORE A J. High-speed, sub-Nyquist interferometry[J]. Optics Express, 2011, 19(11):10111-10123. [47] 贺俊, 陈磊. 使用红外干涉仪测量非球面面形[J]. 光学 精密工程, 2010, 18(1):69-74. HE J, CHEN L. Measurement of aspheric surfaces by infrared interferometer[J]. Opt. Precision Eng., 2010, 18(1):69-74.(in Chinese) [48] LIU D, YANG Y Y, SHEN Y B, et al.. System optimization of radial shearing interferometer for aspheric testing[J]. SPIE, 2007, 6834:68340U/1-8. [49] LIU D, YANG Y Y, LUO Y J, et al.. Non-null interferometric aspheric testing with partial null lens and reverse optimization[J]. SIPE, 2009, 7426:74260M/1-7. [50] STAHL H P. Aspheric surface testing techniques[J]. SPIE, 1991:66-76. [51] KIM C J, WYANT J C. Polynomial fit of interferograms[J]. Appl. Optics, 1982, 21(24):4521-4525. [52] 王孝坤. 利用子孔径拼接法测量大口径凸面反射镜[J]. 应用光学, 2013, 34(1):95-100. WANG X K. Large convex mirror measurement by subaperture stitching interferometry[J]. J. Appl. Optics, 2013, 34(1):95-100.(in Chinese) [53] MURPHY P, FORBES G, FLEIG J, et al.. Stitching interferometry:a flexible solution for surface metrology[J]. Opt. Photonics News, 2003, 14(5):38-43. [54] MURPHY P E, FLEIG J, FORBES G, et al.. High precision metrology of domes and aspheric optics[J]. SPIE, 2005, 5786:112-121. [55] MURPHY P, DEVRIES G, FLEIG J, et al.. Measurement of high-departure aspheric surfaces using subaperture stitching with variable null optics[J]. SPIE, 2009, 7426:74260P/1-9. [56] 刘东. 通用数字化非球面高精度干涉检测技术与系统研究[D].杭州:浙江大学, 2010. LIU D. Interferometric testing system for general & digitizing aspheric testing[D]. Hangzhou:Zhejiang University, 2010.(in Chinese) [57] 陈善勇, 戴一帆, 解旭辉, 等. 子孔径拼接干涉测量的精度估计方法[J]. 光学学报, 2008, 28(5):883-888. CHEN S Y, DAI Y F, JIE X H, et al.. Approach to accuracy evaluation for subaperture stitching interferometry[J]. Acta Optica Sinica, 2008, 28(5):883-888.(in Chinese) [58] 王伟波, 谭久彬. 非球面非零位拼接测量的对准误差模型[J]. 光电子·激光, 2010, 21(2):240-244. WANG W B, TAN J B. Alignment error for aspheric surfaces nonnull stitching testing[J]. J. Optoelectronics·Laser, 2010, 21(2):240-244.(in Chinese) [59] 张蓉竹, 石琪凯, 蔡邦维, 等. 子孔径拼接干涉检测实验研究[J]. 光学技术, 2004, 30(2):173-175. ZHANG R ZH, SHI Q K, CAI B W, et al.. Study on the experiments of the stitching interferometer[J]. Optical Technique, 2004, 30(2):173-175.(in Chinese) [60] 王孝坤. 环形子孔径拼接检测非球面中的数据处理和标定[J]. 激光与光电子学进展, 2009(1):51-55. WANG X K. Data processing and calibration for testing aspheric surfaces by annular subaperture stitching interferometry[J]. Optical Manufacture, 2009(1):51-55.(in Chinese) [61] 王孝坤, 王丽辉, 张学军. 子孔径拼接干涉法检测非球面[J]. 光学 精密工程, 2007, 15(2):192-198. WANG X K, WANG L H, ZHANG X J. Testing asphere by subaperture stitching interferometric method[J]. Opt. Precision Eng., 2007, 15(2):192-198.(in Chinese) [62] 戴一帆, 曾生跃, 陈善勇. 环形子孔径测试的迭代拼接算法及其实验验证[J]. 光学 精密工程, 2009, 17(2):251-256. DAI Y F, ZENG SH Y, CHEN SH Y. Iterative stitching algorithm for annular subaperture testing and its experimental verification[J]. Opt. Precision Eng., 2009, 17(2):251-256.(in Chinese) [63] 侯 溪, 伍 凡, 吴时彬, 等. 以环形子孔径扫描法测量大口径非球面的研究[J]. 光电工程, 2004, 31(9):26-28, 65. HOU X, WU F, WU SH B, et al.. Study on the measurement of large-aperture aspheric surfaces with annular sub-aperture scanning method[J]. Opto-Electronic Eng., 2004, 31(9):26-28, 65.(in Chinese) [64] ZYGO.[2013-9-22].[EB/OL].http://www.zygo.com/?/met/interferometers/verifire/asphere/ [65] KUCHEL M F. Interferometric measurement of rotationally symmetric aspheric surfaces[J]. SPIE, 2009, 7389:738916/1-34. [66] 王孝坤, 郑立功. 中心遮拦光学元件检测中调整误差的精确去除[J]. 激光与光电子学进展, 2010(9):69-72. WANG X K, ZHENG L G. Accurate removement of misalignment errors from testing central obstructed optics[J]. Laser Optoelectronics Progress, 2010(9):69-72.(in Chinese) [67] 侯溪, 伍凡, 杨力, 等. 以环形子孔径法检测大口径非球面主镜的研究进展[J]. 强激光与粒子束, 2006, 18(5):705-708. HOU X, WU F, YANG L, et al.. Progress on testing large aspheric mirror with annular subaperture method[J]. High Power Laser and Particle Beams, 2006, 18(5):705-708.(in Chinese) [68] 王孝坤. 子孔径拼接检测非球面时调整误差的补偿[J]. 中国光学, 2013, 6(1):88-95. WANG X K. Compensation of misalignment error on testing aspheric surface by subaperture stitching interferometry[J]. Chinese Optics, 2013, 6(1):88-95.(in Chinese) [69] LIU D, YANG Y Y, TIAN C, et al.. Non-null interferometric system for general aspheric test[J]. SPIE, 2009, 7283:728305/1-6. [70] 刘惠兰, 郝 群, 沙定国, 等. 利用部分零位补偿透镜进行非球面面形测量[J]. 北京理工大学学报, 2004, 24(7):625-628. LIU H L, HAO Q, SHA D G, et al.. Testing an aspheric surface using part-compensating lens[J]. Transactions of Beijing Institute of Technology, 2004, 24(7):625-628.(in Chinese) [71] YANG Y Y, LIU D, SHEN Y B, et al.. Study on testing larger asphericity in non-null interferometer[J]. SPIE, 2007, 6834:68340T/1-9. [72] TIAN C, YANG Y Y, ZHUO Y M. Generalized data reduction approach for aspheric testing in a non-null interferometer[J]. Appl. Optics, 2012, 51(10):1598-1604. [73] 刘东, 杨甬英, 田超, 等. 用于非球面通用化检测的部分零位透镜[J]. 红外与激光工程, 2009, 38(2):322-325. LIU D, YANG Y Y, TIAN C, et al.. Partial null lens for general aspheric testing[J]. Infrared and Laser Eng., 2009, 38(2):322-325.(in Chinese) [74] 吕宁, 乔玉晶, 于晓洋. 一种基于部分补偿与稀疏阵列的深度非球面测量新方法[J]. 四川大学学报 (自然科学版), 2008, 45(5):1174-1178. LYU N, QIAO Y J, YU X Y. A new metrology method of steep aspheric surface based on part compensating and sparse CCD[J]. J. Sichuan University(Natural Science Edition), 2008, 45(5):1174-1178.(in Chinese) [75] 孙丹, 沙定国, 苏大图. 检测非球面面形的菲索干涉仪部分补偿器设计[J].中国光学学会光电技术专业委员会成立二十周年暨第十一届全国光电技术与系统学术会议文集, 2005:306-310. SUN D, SHA D G, SU D T. Part-compensating lens designing of aspheric surface testing in fizeau interferometer[J]. Proceeding of the twentieth anniversary of the Opto-Electronic Technology Professional Committee & 11th National Conference on Optoelectronic Technology and System, 2005:306-310.(in Chinese) [76] 翁俊淼. 非球面检测的若干基础理论研究[D].杭州:浙江大学, 2008. WENG J M. Research on several basic theories of aspheric testing[D]. Hangzhou:Zhejiang University, 2008.(in Chinese) [77] LIU D, YANG Y Y, TIAN C, et al.. Practical methods for retrace error correction in nonnull aspheric testing[J]. Optics Express, 2009, 17(9):7025-7035. [78] 骆永洁, 杨甬英, 田超, 等. 非球面部分补偿检测系统的误差分析与处理[J]. 浙江大学学报 (工学版), 2012, 46(4):636-642, 733. LUO Y J, YANG Y Y, TIAN CH, et al.. Error analysis and processing of partial compensatory aspheric testing system[J]. J. Zhejiang University(Engineering Science), 2012, 46(4):636-642, 733.(in Chinese) [79] 骆永洁. 非球面部分补偿干涉检测方法的误差分析及系统优化研究[D].杭州:浙江大学, 2011. LUO Y J. Research on error analysis and system optimization of aspheric partial compensatory interferometric testing method[D]. Hangzhou:Zhejiang University, 2011.(in Chinese) [80] TIAN C, YANG Y Y, ZHUO Y M. Computer-aided aberration compensation in optical system assembly[J]. Optik-International J. Light and Electron Optics, 2012, 5(33):IJLEO-52366/1-6. [81] WEI T, LIU D, TIAN C, et al.. New interferometric method to locate aspheric in the partial null aspheric testing system[J]. SPIE, 2012, 8417:84173l/1-6. [82] 田超. 非球面非零位环形子孔径拼接干涉检测技术与系统研究[D].杭州:浙江大学, 2013. TIAN CH. Measurement of aspheric surfaces by non-null annular subaperture stitching interferometry[D]. Hangzhou:Zhejiang University, 2013.(in Chinese) [83] 侯溪, 伍凡. 大型双曲面次镜面形检测技术现状及发展趋势[J]. 中国光学与应用光学, 2010, 3(4):310-317. HOU X, WU F. Status and trends of surface measurement technologies for large hyperboloidal secondary mirrors[J]. Chinese J. Optics and Appl. Optics, 2010, 3(4):310-317.(in Chinese) [84] SMITH W S, JONES G W. Comparison of metrology methods for large astronomical secondary mirrors[J]. SPIE, 1994, 2263:243-252. [85] BURGE J H, SU P, ZHAO C. Optical metrology for very large convex aspheres[J]. SPIE, 2008, 7018:701818/1-12. [86] SMITH K Z, SCHWENKER J P, BROWN R J. Current concepts for cryogenic optical testing of the JWST secondary mirror[J]. SPIE, 2004, 5494:141-151. [87] TRICARD M, KULAWIEC A, BAUER M, et al.. Subaperture stitching interferometry of high-departure aspheres by incorporating a variable optical null[J]. Crip Annals-Manufacturing Technology, 2010, 59(1):547-550. [88] 刘华, 卢振武, 李凤有, 等. 计算全息图检测大口径凹非球面系统的研究[J]. 红外与激光工程, 2007, 36(3):312-315. LIU H, LU ZH W, LI F Y, et al.. CGH testing for large concave surface[J]. Infrared and Laser Eng., 2007, 36(3):312-315.(in Chinese) [89] 卢振武, 刘华, 李凤有. 利用曲面计算全息图进行非球面检测[J]. 光学 精密工程, 2004, 12(6):555-559. LU ZH W, LIU H, LI F Y. Aspheric surface testing with CGH on curved surface[J]. Opt. Precision Eng., 2004, 12(6):555-559.(in Chinese) [90] FORBES G W. Characterizing the shape of freeform optics[J]. Optics Express, 2012, 20(3):2483-2499. [91] 关朝亮, 戴一帆, 尹自强. 自由曲面光学元件的慢刀伺服车削加工技术[J]. 激光与光电子学进展, 2010(2):98-103. GUAN CH L, DAI Y F, YIN Z Q. Freeform surface optical components machining by slow tool servo diamond Turning[J]. Laser Optoelectronics Progress, 2010(2):98-103.(in Chinese) [92] 王云霞, 卢振武, 刘华, 等. 自由曲面棱镜应用[J]. 红外与激光工程, 2007, 36(3):319-321. WANG Y X, LU ZH W, LIU H, et al.. Application of freeform surface prism[J]. Infrared and Laser Eng., 2007, 36(3):319-321.(in Chinese) [93] Jim burge fabrication and testing of large free-form surfaces[2013-9-22].[EB/OL].http://www.loft.optics.arizona.edu/documents/journal_articles/Jim_Burge_Fabrication_and_testing_of_large_free-form_surfaces.pdf. [94] LI S Y, CHEN S Y, DAI Y F. Inspection of free-form optics[J]. Nanotechnology and Precision Eng., 2005, 3(2):126-136.
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  • 收稿日期:  2013-10-17
  • 修回日期:  2013-12-14
  • 刊出日期:  2014-01-25

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