Interferometer instrument transfer function testing method
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摘要: 为了得到干涉仪的空间频率响应特性,开展了针对干涉仪的仪器传递函数的测评方法研究。建立了干涉仪成像系统的仪器传递函数的理论计算模型,利用光学设计软件仿真了菲索型干涉仪检测光路,计算并分析了该干涉系统的仪器传递函数的理论值。对基于特定频率点下的正弦位相板的方法测评干涉仪的仪器传递函数进行仿真分析,并与干涉仪的仪器传递函数的理论值进行了比对,其最大误差不超过0.6%,验证了该方法的正确性。
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关键词:
- 菲索型干涉仪 /
- 干涉仪的仪器传递函数(ITF) /
- 空间频率响应特性 /
- 调制传递函数(MTF)
Abstract: To acquire the spatial frequency response of the interferometer, the testing method on instrument transfer function(ITF) of interferometer was researched. First, the theoretical calculation model of instrument transfer function of imaging system was established, and the testing model of Fizeau interferometer was simulated via lens design program. Then the theoretical value was calculated and anaysed. Comparing ITF based on the method of sine phase plate with the theoretical ITF, the error is less than 0.6%, and this method is proved to be feasible via the simulation of the optical design program. -
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