Fabrication of hard infrared anti-reflection coating with broadband in the wavelength of 0.8-1.7 μm and 3.7-4.8 μm based on oxide material
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摘要: 从实际应用出发，在0入射的条件下，在ZnS基底上针对0.8~1.7 m和3.7~4.8 m两个红外波段，设计并制备了双波段红外增透膜。论述了材料选择、膜系设计和制备方法，最终使用等离子辅助沉积技术在ZnS窗口上制备出双波段红外增透膜，透过率及环境测试结果表明：在0.8~1.7 m波段双面平均透过率大于95%，在3.7~4.8 m波段双面平均透过率大于96%。膜层结合牢固并有良好的耐摩擦性能。Abstract: This paper demonstrates the design and fabrication of the dual-band antireflection coating in 0.8-1.7 m and 3.7-4.8 m wavelength region at 0 incident angle on the ZnS substrate based on oxide materials. The choosing on evaporation materials, optical coating design and fabrication method, et al. are discussed in detail. The dual-band IR antireflection coating has been successfully produced by Plasma Ion Assisted Deposition(PIAD) technique on both side of the ZnS substrate. Transmittance and environment test results show that the average transmittance is larger than 95% during 0.8-1.6 m wavelength region and larger than 96% during 3.7-4.8 m wavelength region, respectively. The firm adhesion and good tribology ability have been obtained referring to the general specification for optical coatings.
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