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键合型掺铒纳米晶-聚合物波导放大器的制备

李彤 张美玲 王菲 张大明 汪国平

李彤, 张美玲, 王菲, 张大明, 汪国平. 键合型掺铒纳米晶-聚合物波导放大器的制备[J]. 中国光学(中英文), 2017, 10(2): 219-225. doi: 10.3788/CO.20171002.0219
引用本文: 李彤, 张美玲, 王菲, 张大明, 汪国平. 键合型掺铒纳米晶-聚合物波导放大器的制备[J]. 中国光学(中英文), 2017, 10(2): 219-225. doi: 10.3788/CO.20171002.0219
LI Tong, ZHANG Mei-ling, WANG Fei, ZHANG Da-ming, WANG Guo-ping. Fabrication of optical waveguide amplifiers based on bonding-type NaYF4: Er nanoparticles-polymer[J]. Chinese Optics, 2017, 10(2): 219-225. doi: 10.3788/CO.20171002.0219
Citation: LI Tong, ZHANG Mei-ling, WANG Fei, ZHANG Da-ming, WANG Guo-ping. Fabrication of optical waveguide amplifiers based on bonding-type NaYF4: Er nanoparticles-polymer[J]. Chinese Optics, 2017, 10(2): 219-225. doi: 10.3788/CO.20171002.0219

键合型掺铒纳米晶-聚合物波导放大器的制备

doi: 10.3788/CO.20171002.0219
基金项目: 

国家自然科学基金资助项目 11274247

国家自然科学基金资助项目 11574218

国家自然科学基金资助项目 11504243

国家自然科学基金资助项目 61475061

广东省自然科学基金资助项目 2016A030313042

广东省自然科学基金资助项目 2015A030310400

详细信息
    作者简介:

    李彤 (1984-), 女, 吉林长春人, 博士后, 主要从事平面光波导放大器方面的研究。E-mail:litong0722@foxmail.com

    通讯作者:

    王菲 (1978-), 女, 黑龙江哈尔滨人, 副教授, 主要从事平面光波导集成器件方面的研究。E-mail:wang_fei@jlu.edu.cn

  • 中图分类号: TN256

Fabrication of optical waveguide amplifiers based on bonding-type NaYF4: Er nanoparticles-polymer

Funds: 

National Natural Science Foundation of China 11274247

National Natural Science Foundation of China 11574218

National Natural Science Foundation of China 11504243

National Natural Science Foundation of China 61475061

Guangdong Provincial Natural Science Foundation of China 2016A030313042

Guangdong Provincial Natural Science Foundation of China 2015A030310400

  • 摘要: 为了克服主客掺杂型有源材料均匀性和稳定性差的问题,采用键合掺杂方法,将高温热解法制备的油酸修饰掺铒氟钇钠纳米晶粒与甲基丙烯酸甲酯发生共聚反应,形成键合型有源芯层材料。纳米晶粒均匀固定在聚合物分子链上,抑制了高浓度掺杂时的团聚析出且材料更稳定。纳米粒子在聚合物中的质量百分比达到约1wt%,具有良好的成膜性,用原子力显微镜照片观察薄膜表面粗糙度为1.76 nm。用椭偏仪测量薄膜光学性质,并用柯西色散模型拟合出薄膜折射率随波长的变化关系,材料在1 550 nm信号光波长的折射率为1.485。设计嵌入式波导结构,采用有限元方法进行模式分析和计算光场强度分布。采用紫外光刻和感应耦合等离子体刻蚀工艺制备凹槽形下包层,填充有源材料制备条形波导放大器。实验结果表明,当1 550 nm信号光功率为0.1 mW,1 480 nm泵浦光功率为390 mW时,在1.2 cm长的样品中得到了3.58 dB的信号光相对增益。

     

  • 图 1  掺铒放大器在1480 nm泵浦下的光放大原理示意图

    Figure 1.  Schematic diagram of the principle of Erbium-doped amplifier under 1480 nm pumping light

    图 2  OA-NaYF4: Er-PMMA的分子结构示意图

    Figure 2.  Structure scheme of the OA-NaYF4: Er-PMMA

    图 3  复合材料OA-NaYF4: Er-PMMA的折射率随波长变化曲线 (a) 薄膜剖面显微镜照片 (b) 薄膜AFM照片

    Figure 3.  Curve of refraction index of the OA-NaYF4: Er-PMMA with different wavelength. The inset (a) shows the microscope photo of the cross section of the film. The inset (b) shows the AFM image of the surface of the film

    图 4  波导放大器的结构设计 (a) 嵌入式波导结构示意图 (b) 波导中传输的电场强度分布的等高线图 (c) 电场强度的三维曲面图

    Figure 4.  Structure design of waveguide amplifiers. (a) cross section of the embedded waveguides, (b) color contour and (c) three-dimensional surface plot of the distribution of electric field intensity of the waveguide

    图 5  嵌入式结构波导放大器的制备流程图

    Figure 5.  Fabrication process of embedded waveguide amplifiers

    图 6  波导放大器的增益测试 (a) 刻蚀的PMMA凹槽的SEM照片;(b)980 nm泵浦下,器件表面沿波导传输线的上转换发光照片;(c)1480 nm泵浦下,波导放大器的相对增益随泵浦光功率的变化曲线

    Figure 6.  Gain test of the waveguide amplifier. (a) SEM micrograph of a 9 μm wide and 4 μm deep groove of PMMA cladding, (b) photo of up-conversion fluorescence along a waveguide under 980 nm pumping, (c) relative gain as a function of pump power under 1480 nm pumping light

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出版历程
  • 收稿日期:  2016-10-26
  • 修回日期:  2016-12-08
  • 刊出日期:  2017-04-01

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