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Characterizing curved surface roughness of Wolter-Ⅰ X-ray grazing incidence telescope

ZHANG Ya-chao LIU Peng WANG Xiao-guang HE Ling-ping CHEN Bo

张亚超, 刘鹏, 王晓光, 何玲平, 陈波. X射线散射法测量Wolter-Ⅰ型掠入射望远镜的表面粗糙度[J]. 中国光学(中英文), 2019, 12(3): 587-595. doi: 10.3788/CO.20191203.0587
引用本文: 张亚超, 刘鹏, 王晓光, 何玲平, 陈波. X射线散射法测量Wolter-Ⅰ型掠入射望远镜的表面粗糙度[J]. 中国光学(中英文), 2019, 12(3): 587-595. doi: 10.3788/CO.20191203.0587
ZHANG Ya-chao, LIU Peng, WANG Xiao-guang, HE Ling-ping, CHEN Bo. Characterizing curved surface roughness of Wolter-Ⅰ X-ray grazing incidence telescope[J]. Chinese Optics, 2019, 12(3): 587-595. doi: 10.3788/CO.20191203.0587
Citation: ZHANG Ya-chao, LIU Peng, WANG Xiao-guang, HE Ling-ping, CHEN Bo. Characterizing curved surface roughness of Wolter-Ⅰ X-ray grazing incidence telescope[J]. Chinese Optics, 2019, 12(3): 587-595. doi: 10.3788/CO.20191203.0587

X射线散射法测量Wolter-Ⅰ型掠入射望远镜的表面粗糙度

基金项目: 

国家自然科学基金资助项目 U1631117

详细信息
  • 中图分类号: O434

Characterizing curved surface roughness of Wolter-Ⅰ X-ray grazing incidence telescope

doi: 10.3788/CO.20191203.0587
Funds: 

National Natural Science Foundation of China U1631117

More Information
    Author Bio:

    ZHANG Ya-chao(1989—), is a Ph.D. student at Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences. His current research interests include the calibration of X-ray optical system. E-mail:zyc198902@126.com

    CHEN Bo(1961—), is a professor in the Chinese Academy of Sciences. He received his Ph.D. degree from Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences in 2003. His current research interests include soft X-ray and extreme ultraviolet sources, radiation metrology and optical space instruments. E-mail:chenb@ciomp.ac.cn

    Corresponding author: CHEN Bo, E-mail:chenb@ciomp.ac.cn
  • 摘要: 研究X射线散射法在软X射线掠入射望远镜反射镜的表面粗糙度测量中的应用。首先,在光滑表面近似和细光束条件下,根据Harvey-Shack表面散射理论得出反射镜的面形仅影响总反射光分布中的镜向部分,对散射部分的影响可以忽略不计;然后设计了X射线散射法测量Wolter-Ⅰ型软X射线掠入射望远镜的表面粗糙度的实验方案,并且对引起系统误差的主要因素进行了分析,确定了进行仿真实验时的参数;最后用Zemax对实验方案进行了仿真。在空间频率高于28/mm时,表面粗糙度的仿真测量结果与真值吻合得非常好。本文研究结果显示:在光滑表面近似和细光束条件下,反射镜的面形仅影响表面粗糙度的低频部分的测量准确性,对高频部分测量准确性的影响可以忽略不计,利用X射线散射法可以准确测量软X射线掠入射望远镜的表面粗糙度。

     

  • Figure 1.  Schematic diagram of X-rays reflected by a rough surface. θi is the grazing incidence angle and θ and φ are the scattering grazing and azimuth angles, respectively

    Figure 2.  Schematic diagram for surface roughness characterization

    Figure 3.  Error of PSD-function determination caused by the finite width of a receiving slit

    Figure 4.  Error of PSD-function determination ηs for different widths of the receiving slits S=50 μm, 100 μm, 200 μm. Calculations are performed at an incident wavelength of λ=4.47 nm, a primary beam grazing incident angle of θ0=5.24° and a sample-detector distance of D=336 mm

    Figure 5.  (a) Scattering diagram, (b)surface figure effect, (c)scattered component of the scattering diagram, (d)analysis of the surface figure effect on the scattering diagram

    Figure 6.  PSD data extracted from the scattering diagram and its real value

    Table  1.   Specifications of solar soft X-ray grazing incidence telescope in our lab

    Parameter Telescope Paraboloid Hyperboloid
    Nodal focal length/mm 659.885 495
    Optic length/mm 47.5 47.5
    Gap about joint/mm 5
    Vertex radius/mm -2.431 457 33 -2.440 466 51
    Inner radius rinner/mm 80.075 946 99 75.414 332 72
    Outer radius router/mm 81.505 495 11 79.771 451 35
    Conic constant ε2 -1 -1.007 424 25
    Location of focus/mm 1 364.867 410 92 705
    下载: 导出CSV
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出版历程
  • 收稿日期:  2018-05-18
  • 修回日期:  2018-06-12
  • 刊出日期:  2019-06-01

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