调整彩色滤光膜的致密性和疏水性以减少TFT-LCD制造中的气体释放

李吉; 张霞; 冯翊; 廖昌; 张杰; 尹勇明; 孟鸿

doi:10.37188/CO.EN-2023-0029

Article Contents

Chinese Optics > 2024 > Accepted Manuscript

LI Ji, ZHANG Xia, FENG Yi, LIAO Chang, ZHANG Jie, YIN Yong-ming, MENG Hong. Adjusting the compactness and hydrophobicity of color filters to decrease gas release during TFT-LCD fabrication[J]. Chinese Optics. doi: 10.37188/CO.EN-2023-0029

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Adjusting the compactness and hydrophobicity of color filters to decrease gas release during TFT-LCD fabrication

doi: 10.37188/CO.EN-2023-0029

LI Ji^{1, 2, 4
,},
ZHANG Xia⁴,
FENG Yi^{1, 2, 4},
LIAO Chang⁴,
ZHANG Jie⁴,
YIN Yong-ming^{3
,
,},
MENG Hong^{1, 2
,
,}

1.
School of Materials Science and Engineering, Peking University, Beijing 100871, China
2.
School of Advanced Materials, Shenzhen Graduate School, Peking University, Shenzhen 518055, China
3.
Department of Materials Science, Shenzhen MSU-BIT University, Shenzhen 518172, China
4.
TCL China Star Optoelectronics Technology Co., Ltd, Shenzhen, Guangdong, 518132, China

Funds: Supported by

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Author Bio:
LI Ji (1988—), Male, born in Huanggang, Hubei province. In 2013, he received his master's degree from South China University of Technology. Currently, he is a PhD candidate at Peking University. He is mainly engaged in research and development of display materials. E-mail: liji02@stu.pku.edu.cn

YIN Yong-ming (1989—), male, born in Chenzhou, Hunan province. He obtained his degrees for Bachelor and Master from Jilin University, and then undertook his Ph.D. studies at Peking University from 2016 to 2020. Currently, he serves as an associate professor at Shenzhen MSU-BIT University. His research interests are in optoelectronics materials and devices for display applications. E-mail: yinyongming@smbu.edu.cn

MENG Hong (1966—), male, born in Huayin city, Shanxi province. Chair Professor, School of Advanced Materials, Shenzhen Graduate School, Peking University. He received his Ph. D. from the University of California, Los Angeles in 2002. His research interests are in organic optoelectronics materials and devices. E-mail: menghong@pku.edu.cn
Corresponding author: yinyongming@smbu.edu.cn; menghong@pku.edu.cn
Received Date: 15 Nov 2023
Accepted Date: 14 Dec 2023

Available Online: 31 Jan 2024

Abstract

Abstract

The TFT-LCD industry is moving towards the direction of high efficiency and low costs. During the manufacturing process, it has been found that various photoresists require different vacuum drying time. To reduce manufacturing time and increase panel yields, it is necessary to clarify the factors that can influence and reduce the vacuum time. This paper explored the relationship between pumping time and the properties of photoresist materials. It was found that the thermal stability of the photoresist had a negligible relationship with the pumping time. The compactness and hydrophobicity of the photoresist are highly correlated with the vacuum drying time. High compactness and high hydrophobicity can effectively avoid water vapor intrusion and storage in the photoresist during fabrication and consequently reduce pumping times. Overall, this work could guide the future development of new photoresists for the TFT-LCD industry.
- TFT-LCD,
- color filter,
- gas release,
- compactness,
- hydrophobicity

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References(23)

References

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