等截面反射镜椭圆压弯机构变像距压弯

周博文; 王楠; 祝万钱; 薛松; 田应仲

doi:10.37188/CO.2019-0250

Volume 13 Issue 4

Aug. 2020

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Chinese Optics > 2020 > 13(4): 778-786.

ZHOU Bo-wen, WANG Nan, ZHU Wan-qian, XUE Song, TIAN Ying-zhong. Variable image distance bending using an elliptical bending mechanism with a constant cross-section mirror[J]. Chinese Optics, 2020, 13(4): 778-786. doi: 10.37188/CO.2019-0250

Citation:

ZHOU Bo-wen, WANG Nan, ZHU Wan-qian, XUE Song, TIAN Ying-zhong. Variable image distance bending using an elliptical bending mechanism with a constant cross-section mirror[J]. Chinese Optics, 2020, 13(4): 778-786. doi: 10.37188/CO.2019-0250

Citation:

ZHOU Bo-wen, WANG Nan, ZHU Wan-qian, XUE Song, TIAN Ying-zhong. Variable image distance bending using an elliptical bending mechanism with a constant cross-section mirror[J]. Chinese Optics, 2020, 13(4): 778-786. doi: 10.37188/CO.2019-0250

PDF( 10078 KB)

Variable image distance bending using an elliptical bending mechanism with a constant cross-section mirror

doi: 10.37188/CO.2019-0250

ZHOU Bo-wen^{1, 2
,},
WANG Nan^{2, 3},
ZHU Wan-qian^{2, 3},
XUE Song^{2, 3
,
,},
TIAN Ying-zhong^{1
,
,}

1.
School of Mechatronic Engineering and Automation, Shanghai University, Shanghai 201900, China
2.
Shanghai Institute of Applied Physics, Chinese Academy of Sciences, Shanghai 201204, China
3.
Shanghai Advanced Research Institute, Chinese Academy of Sciences, Shanghai 201204, China

Funds: Supported by National Natural Science Foundation of China (No.11675253)

More Information

Corresponding author: xuesong@zjlab.org.cn; troytian@shu.edu.cn
Received Date: 29 Dec 2019
Rev Recd Date: 22 Feb 2020
Publish Date: 01 Aug 2020

Abstract

Abstract

In this paper, the surface shape error of latest elliptical bending mechanism with a constant cross-section mirror is studied when the object distance is fixed (when the position of the mirror in the light path is invariable) and the image distance is adjusted drastically (when the position of the sample is changed). Based on theoretical analysis and the finite element analysis, theoretical slope error is calculated when it is caused by bending a mirror with a width equal to an elliptical cylinder with a different shape (different image distances at the reflection point). Then, a bending experiment of a prototype of the elliptical bending mechanism is conducted. Experimental results and analysis indicate that the slope error between the bending mirror and an ideal elliptic cylinder will increase with a decrease in image distance, and the slope error of the mirror will increase more quickly as the image distance is shortened. When the initial slope error of the reflecting mirror is 0.397 μrad, the slope error of the bent mirror in the whole range of image distance (21.5~3.8 m) is 0.402~0.560 μrad and the repeatable accuracy is 0.051 urad, which meets the design requirements of the beamline of the Shanghai Synchrotron Radiation Facility (SSRF). It is proven that in elliptically bending mirrors, continuous adjustment of the image distance from the focusing mirror can be achieved by using a bending mechanism with constant cross-section mirror.
- synchrotron radiation,
- bending mechanism,
- elliptical cylindrical mirror,
- slope error

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References(18)

References

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