二维光栅位移测量技术综述

尹云飞; 刘兆武; 吉日嘎兰图; 于宏柱; 王玮; 李晓天; 鲍赫; 李文昊; 郝群

doi:10.37188/CO.2020-0237

Volume 13 Issue 6

Dec. 2020

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Article Contents

Chinese Optics > 2020 > 13(6): 1224-1238.

YIN Yun-Fei, LIU Zhao-Wu, JIRIGALANTU, YU Hong-Zhu, WANG Wei, LI Xiao-Tian, BAO He, LI Wen-Hao, HAO Qun. Overview of 2D grating displacement measurement technology[J]. Chinese Optics, 2020, 13(6): 1224-1238. doi: 10.37188/CO.2020-0237

Citation:

YIN Yun-Fei, LIU Zhao-Wu, JIRIGALANTU, YU Hong-Zhu, WANG Wei, LI Xiao-Tian, BAO He, LI Wen-Hao, HAO Qun. Overview of 2D grating displacement measurement technology[J]. Chinese Optics, 2020, 13(6): 1224-1238. doi: 10.37188/CO.2020-0237

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PDF( 6952 KB)

Overview of 2D grating displacement measurement technology

doi: 10.37188/CO.2020-0237

YIN Yun-Fei^{1, 2
,},
LIU Zhao-Wu^1
,,
JIRIGALANTU¹,
YU Hong-Zhu¹,
WANG Wei¹,
LI Xiao-Tian¹,
BAO He¹,
LI Wen-Hao^{1
,
,},
HAO Qun^{3
,
,}

1.
Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China
2.
University of Chinese Academy of Sciences, Beijing 100049, China
3.
School of Optoelectronics, Beijing Institute of Technology, Beijing 100081, China

Funds: Supported by the National Key R & D Plan (No. 2016YFB0500100); Jinlin Province Science and Technology Development Plan (No. 20190201021JC, No. 20190103158JH, No. 20190103157JH, No. 20190302047GX), R & D Projects in Key Areas of Guangdong Province (No. 2019B010144001), National Natural Science Foundation of China (No. 61975255), Civil Aerospace Pre-research Project (No. D040101)

More Information

Corresponding author: leewenho@163.com; qhao@bit.edu.cn
Received Date: 09 Dec 2019
Rev Recd Date: 21 Jan 2020

Available Online: 10 Nov 2020

Publish Date: 01 Dec 2020

Abstract

Abstract

Ultra-precision displacement measurement technology is not only the basis of precision machining, but also plays a decisive role in the chip manufacturing industry that is rapidly developing in Moore's Law. The grating displacement measurement system based on the grating pitch is widely used in multidimensional measurement system. Compared with the laser displacement measurement system, grating displacement measurement system greatly reduces the environmental requirements for humidity, temperature and pressure. In this paper, the development status of the optical structure of displacement sensing system based on two-dimensional grating in recent years is introduced. The principles of zero-difference and heterodyne grating interferometrys are introduced. The optical structure based on single-block two-dimensional grating is reviewed. The development history of the optical structure in single-block two-dimensional grating to coupling designs of multi-block two-dimensional gratings is summarized, the advantages and disadvantages of several two-dimensional grating displacement measurement systems are compared and analyzed, and the development trend of two-dimensional grating displacement measurement system is prospected. The engineering process of two-dimensional grating displacement measurement system is summarized.
- two-dimensional grating,
- grating interference technique,
- precision displacement measurement

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References(72)

References

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Overview of 2D grating displacement measurement technology

doi: 10.37188/CO.2020-0237

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通讯作者: 陈斌, bchen63@163.com

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Overview of 2D grating displacement measurement technology

doi: 10.37188/CO.2020-0237

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通讯作者: 陈斌, bchen63@163.com

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