弹性发射光学制造技术研究进展

李佳慧; 侯溪; 张云; 王佳; 钟显云

doi:10.37188/CO.2021-0022

Volume 14 Issue 5

Sep. 2021

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Chinese Optics > 2021 > 14(5): 1089-1103.

LI Jia-hui, HOU Xi, ZHANG Yun, WANG Jia, ZHONG Xian-yun. Research progress of elastic emission machining in optical manufacturing[J]. Chinese Optics, 2021, 14(5): 1089-1103. doi: 10.37188/CO.2021-0022

Citation:

LI Jia-hui, HOU Xi, ZHANG Yun, WANG Jia, ZHONG Xian-yun. Research progress of elastic emission machining in optical manufacturing[J]. Chinese Optics, 2021, 14(5): 1089-1103. doi: 10.37188/CO.2021-0022

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Research progress of elastic emission machining in optical manufacturing

doi: 10.37188/CO.2021-0022

LI Jia-hui^{1, 2
,},
HOU Xi^{1
,
,},
ZHANG Yun^1
,,
WANG Jia^1
,,
ZHONG Xian-yun^1
,

1.
Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China
2.
University of Chinese Academy of Sciences, Beijing 100049, China

Funds: Supported by the “Young Scholars of Western China” of the Chinese Academy of Sciences

More Information

Corresponding author: hxxh6776@163.com
Received Date: 22 Jan 2021
Rev Recd Date: 22 Feb 2021

Available Online: 02 Jul 2021

Publish Date: 18 Sep 2021

Abstract

Abstract

The requirements of modern optical engineering in fields such as deep ultraviolet lithography, extreme ultraviolet lithography and advanced light sources drive the continuous development of advanced optical manufacturing technology. Modern optical engineering requires the surface roughness of ultra-smooth optical components to reach the atomic level and the surface shape profile error in the full spatial frequency to reach RMS(Root Mean Square) sub-nanometer or even a few dozen picometers. This drives the manufacturing requirements of ultra-smooth optical components to approach the processing limits. At present, there are still technical challenges to achieve the ultra-smooth polishing technology and equipment required for the above ultra-high precision needs. Atomic level ultra-smooth polishing of complex surfaces such as cylinders, ellipsoids and toroids is still a primary direction of research at both domestically and abroad. Elastic emission machining is an atomic-level ultra-smooth processing method with stable removal functionality and ultra-low subsurface defect creation, which can be used for manufacturing optical components with the above-mentioned accuracy requirements. We summarize the research progress of elastic emission machining and equipment at both domestically and abroad, the principles of elastic emission machining which contains fluid characteristics, the movement characteristics of polishing particles and chemical characteristics, the equipment of elastic emission machining, and the factors affecting the improvement of surface roughness and material removal rate of elastic emission machining. Then we analyze the problems faced by elastic emission machining and equipment and look forward to their prospects. It is expected that this paper will provide a reference for the further development and application of elastic emission machining.
- advanced optical manufacturing,
- ultra-precision optics,
- ultra-smooth polishing technology,
- elastic emission machining

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References(69)

References

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