Volume 14 Issue 5
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Chinese Optics  > 2021  >  14(5): 1089-1103.
LI Jia-hui, HOU Xi, ZHANG Yun, WANG Jia, ZHONG Xian-yun. Research progress of elastic emission machining in optical manufacturing[J]. Chinese Optics, 2021, 14(5): 1089-1103. doi: 10.37188/CO.2021-0022
Citation: LI Jia-hui, HOU Xi, ZHANG Yun, WANG Jia, ZHONG Xian-yun. Research progress of elastic emission machining in optical manufacturing[J]. Chinese Optics, 2021, 14(5): 1089-1103. doi: 10.37188/CO.2021-0022
shu

Research progress of elastic emission machining in optical manufacturing

  • 1.

    Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China

  • 2.

    University of Chinese Academy of Sciences, Beijing 100049, China

Funds:  Supported by the “Young Scholars of Western China” of the Chinese Academy of Sciences
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  • Corresponding author: hxxh6776@163.com
  • Received Date: 22 Jan 2021
  • Rev Recd Date: 22 Feb 2021
    • Available Online: 02 Jul 2021
  • Publish Date: 18 Sep 2021
    Abstract
  • The requirements of modern optical engineering in fields such as deep ultraviolet lithography, extreme ultraviolet lithography and advanced light sources drive the continuous development of advanced optical manufacturing technology. Modern optical engineering requires the surface roughness of ultra-smooth optical components to reach the atomic level and the surface shape profile error in the full spatial frequency to reach RMS(Root Mean Square) sub-nanometer or even a few dozen picometers. This drives the manufacturing requirements of ultra-smooth optical components to approach the processing limits. At present, there are still technical challenges to achieve the ultra-smooth polishing technology and equipment required for the above ultra-high precision needs. Atomic level ultra-smooth polishing of complex surfaces such as cylinders, ellipsoids and toroids is still a primary direction of research at both domestically and abroad. Elastic emission machining is an atomic-level ultra-smooth processing method with stable removal functionality and ultra-low subsurface defect creation, which can be used for manufacturing optical components with the above-mentioned accuracy requirements. We summarize the research progress of elastic emission machining and equipment at both domestically and abroad, the principles of elastic emission machining which contains fluid characteristics, the movement characteristics of polishing particles and chemical characteristics, the equipment of elastic emission machining, and the factors affecting the improvement of surface roughness and material removal rate of elastic emission machining. Then we analyze the problems faced by elastic emission machining and equipment and look forward to their prospects. It is expected that this paper will provide a reference for the further development and application of elastic emission machining.

     

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