氮化硅光子器件与应用研究进展

范智斌; 陈泽茗; 周鑫; 何辛涛; 江绍基; 董建文

doi:10.37188/CO.2021-0093

Volume 14 Issue 4

Jul. 2021

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Chinese Optics > 2021 > 14(4): 998-1018.

FAN Zhi-bin, CHEN Ze-ming, ZHOU Xin, HE Xin-tao, JIANG Shao-ji, DONG Jian-wen. Recent advances in silicon nitride-based photonic devices and applications[J]. Chinese Optics, 2021, 14(4): 998-1018. doi: 10.37188/CO.2021-0093

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FAN Zhi-bin, CHEN Ze-ming, ZHOU Xin, HE Xin-tao, JIANG Shao-ji, DONG Jian-wen. Recent advances in silicon nitride-based photonic devices and applications[J]. Chinese Optics, 2021, 14(4): 998-1018. doi: 10.37188/CO.2021-0093

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Recent advances in silicon nitride-based photonic devices and applications

doi: 10.37188/CO.2021-0093

FAN Zhi-bin^{1, 2},
CHEN Ze-ming^{1, 2},
ZHOU Xin^{1, 2},
HE Xin-tao^{1, 2},
JIANG Shao-ji^{1, 2},
DONG Jian-wen^{1, 2
,
,}

1.
School of Physics, Sun Yat-sen University, Guangzhou 510275, China
2.
State Key Laboratory of Optoelectronic Materials and Technologies, Sun Yat-sen University, Guangzhou 510275, China

Funds: Supported by National Natural Science Foundation of China (No. 62035016, No. 61805288, No. 11904421); Guangdong Basic and Applied Basic Research Foundation (No. 2020A1515110661)

More Information

Corresponding author: dongjwen@mail.sysu.edu.cn
Received Date: 25 Apr 2021
Rev Recd Date: 08 Jun 2021

Available Online: 25 Jun 2021

Publish Date: 01 Jul 2021

Abstract

Abstract

Silicon nitride provides a CMOS-compatible integrated photonic platform with rich optical properties. By adjusting the relevant fabrication parameters, silicon nitride with specific refractive index between 1.9~3.2 can be achieved, and its extinction and nonlinear coefficient can have a large adjustable range. Silicon nitride has wide potential applications in many fields such as thin film optics, micro-nano planar optics and nonlinear integrated photonics. In this paper, we review the optical properties of silicon nitride and its recent advances in optical film, micro-nano metamaterial and silicon photonics, and also review the research progresses on the applications of solar thin films, visible metasurfaces, grating couplers and nonlinear optical waveguides.
- silicon nitride,
- metasurface,
- optical film,
- grating coupler,
- nonlinear optical waveguide

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References(107)

References

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Recent advances in silicon nitride-based photonic devices and applications

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Recent advances in silicon nitride-based photonic devices and applications

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