| Citation: | LI Ai-wu, SHAN Tian-qi, GUO Qi, PAN Xue-peng, LIU Shan-ren, CHEN Chao, YU Yong-sen. Research progress of optical fiber Fabry-Perot interferometer high temperature sensors[J]. Chinese Optics, 2022, 15(4): 609-624. doi: 10.37188/CO.2021-0219
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The high temperature sensor of the optical fiber Fabry-Perot interferometer has the advantages of small size, a simple manufacturing process, high sensitivity, high temperature resistance and anti-electromagnetic interference, which make it widely used in the aerospace energy industry, environmental monitoring and other fields. Firstly, this paper introduces the sensing principle, sensing performance, sensing characteristics and fabrication method of optical fiber Fabry-Perot interferometer high temperature sensors. Secondly, the temperature, pressure and strain sensitivity and measurement range are summarized and the domestic and foreign research progress and the performance parameters of optical fiber Fabry-Perot interferometer high temperature sensors are summarized. Thirdly, the cross-sensitivity problems of temperature and pressure of optical fiber Fabry-Perot interferometer sensors and it’s solutions, and the high-temperature sensing characteristics of Fabry-Perot interferometers based on different kinds of optical fibers are introduced. Fourthly, according to the recent research progress of fiber Fabry-Perot interferometer high temperature sensors, several fiber Fabry-Perot interferometer high temperature sensors for two-parameter measurement are introduced. Finally, the future development trend and prospect of optical fiber Fabry-Perot interferometer high temperature sensors are prospected.
| [1] |
王俊尧, 宋延嵩, 佟首峰, 等. 空间激光通信组网反射镜联动跟踪控制技术[J]. 中国光学,2020,13(3):537-546.
WANG J Y, SONG Y S, TONG SH F, et al. Linkage tracking control technology of space laser communication network mirror[J]. Chinese Optics, 2020, 13(3): 537-546. (in Chinese)
|
| [2] |
刘野, 刘宇, 肖辉东, 等. 638 nm光栅外腔窄线宽半导体激光器[J]. 中国光学,2020,13(6):1249-1256. doi: 10.37188/CO.2020-0249
LIU Y, LIU Y, XIAO H D, et al. 638 nm narrow linewidth diode laser with a grating external cavity[J]. Chinese Optics, 2020, 13(6): 1249-1256. (in Chinese) doi: 10.37188/CO.2020-0249
|
| [3] |
庞拂飞, 马章微, 刘奂奂, 等. 蓝宝石衍生光纤及传感器研究进展[J]. 应用科学学报,2018,36(1):59-74.
PANG F F, MA ZH W, Liu H H, et al. Research progress of sapphire-derived fibers and sensors[J]. Journal of Applied Sciences, 2018, 36(1): 59-74. (in Chinese)
|
| [4] |
DENG J, WANG D N. Construction of cascaded Fabry–Perot interferometers by four in-fiber mirrors for high-temperature sensing[J]. Optics Letters, 2019, 44(5): 1289-1292. doi: 10.1364/OL.44.001289
|
| [5] |
LI W W, LIANG T, JIA P G, et al. Fiber-optic Fabry–Perot pressure sensor based on sapphire direct bonding for high-temperature applications[J]. Applied Optics, 2019, 58(7): 1662-1666. doi: 10.1364/AO.58.001662
|
| [6] |
MA W Y, JIANG Y, GAO H CH. Miniature all-fiber extrinsic Fabry–Pérot interferometric sensor for high-pressure sensing under high-temperature conditions[J]. Measurement Science and Technology, 2019, 30(2): 025104. doi: 10.1088/1361-6501/aaf905
|
| [7] |
敬世美, 张轩宇, 梁居发, 等. 飞秒激光刻写的超短光纤布拉格光栅及其传感特性[J]. 中国光学,2017,10(4):449-454. doi: 10.3788/co.20171004.0449
JING SH M, ZHANG X Y, LIANG J F, et al. Ultrashort fiber Bragg grating written by femtosecond laser and its sensing characteristics[J]. Chinese Optics, 2017, 10(4): 449-454. (in Chinese) doi: 10.3788/co.20171004.0449
|
| [8] |
梁居发, 敬世美, 孟爱华, 等. 基于光纤布拉格光栅与长周期光栅并联的集成光学传感器[J]. 中国光学,2016,9(3):329-334. doi: 10.3788/co.20160903.0329
LIANG J F, JING SH M, MENG A H, et al. Integrated optical sensor based on a FBG in parallel with a LPG[J]. Chinese Optics, 2016, 9(3): 329-334. (in Chinese) doi: 10.3788/co.20160903.0329
|
| [9] |
明昕宇, 国旗, 薛兆康, 等. 飞秒激光刻写低温度灵敏度的细芯长周期光栅[J]. 中国光学,2020,13(4):737-744. doi: 10.37188/CO.2020-0015
MING X Y, GUO Q, XUE ZH K, et al. A femtosecond laser-inscribed fine-core long-period grating with low temperature sensitivity[J]. Chinese Optics, 2020, 13(4): 737-744. (in Chinese) doi: 10.37188/CO.2020-0015
|
| [10] |
WANG Z, CHEN J, WEI H, et al. Sapphire Fabry-Perot interferometer for high-temperature pressure sensing[J]. Applied Optics, 2020, 59(17): 5189-5196. doi: 10.1364/AO.393353
|
| [11] |
YANG SH, FENG Z A, JIA X T, et al. All-sapphire miniature optical fiber tip sensor for high temperature measurement[J]. Journal of Lightwave Technology, 2020, 38(7): 1988-1997. doi: 10.1109/JLT.2019.2953156
|
| [12] |
YU X, WANG SH, JIANG J F, et al. Self-filtering high-resolution dual-sapphire-fiber-based high-temperature sensor[J]. Journal of Lightwave Technology, 2019, 37(4): 1408-1414. doi: 10.1109/JLT.2019.2894377
|
| [13] |
ZHANG X Y, YU Y S, ZHU C C, et al. Miniature end-capped fiber sensor for refractive index and temperature measurement[J]. IEEE Photonics Technology Letters, 2014, 26(1): 7-10. doi: 10.1109/LPT.2013.2286260
|
| [14] |
CUI X L, ZHANG H, WANG D N. Parallel structured optical fiber in-line Fabry-Perot interferometers for high temperature sensing[J]. Optics Letters, 2020, 45(3): 726-729. doi: 10.1364/OL.384594
|
| [15] |
GAO H CH, JIANG Y, CUI Y, et al. Dual-cavity fabry–perot interferometric sensors for the simultaneous measurement of high temperature and high pressure[J]. IEEE Sensors Journal, 2018, 18(24): 10028-10033. doi: 10.1109/JSEN.2018.2875435
|
| [16] |
DONG B, WEI L, ZHOU D P. Miniature high-sensitivity high-temperature fiber sensor with a dispersion compensation fiber-based interferometer[J]. Applied Optics, 2009, 48(33): 6466-6469. doi: 10.1364/AO.48.006466
|
| [17] |
ZHU T, KE T, RAO Y J, et al. Fabry–Perot optical fiber tip sensor for high temperature measurement[J]. Optics Communications, 2010, 283(19): 3683-3685. doi: 10.1016/j.optcom.2010.05.037
|
| [18] |
WANG J J, LALLY E M, DONG B, et al. Fabrication of a miniaturized thin-film temperature sensor on a sapphire fiber tip[J]. IEEE Sensors Journal, 2011, 11(12): 3406-3408. doi: 10.1109/JSEN.2011.2160340
|
| [19] |
XU L C, DENG M, DUAN D W, et al. High-temperature measurement by using a PCF-based Fabry-Perot interferometer[J]. Optics and Lasers in Engineering, 2012, 50(10): 1391-1396. doi: 10.1016/j.optlaseng.2012.05.012
|
| [20] |
TAN X L, GENG Y F, LI X J, et al. High temperature microstructured fiber sensor based on a partial-reflection-enabled intrinsic Fabry-Perot interferometer[J]. Applied Optics, 2013, 52(34): 8195-8198. doi: 10.1364/AO.52.008195
|
| [21] |
DU Y Y, QIAO X G, RONG Q ZH, et al. A miniature Fabry-Pérot interferometer for high temperature measurement using a double-core photonic crystal fiber[J]. IEEE Sensors Journal, 2014, 14(4): 1069-1073. doi: 10.1109/JSEN.2013.2286699
|
| [22] |
LEE D, TIAN ZH P, DAI J X, et al. Sapphire fiber high-temperature tip sensor with multilayer coating[J]. IEEE Photonics Technology Letters, 2015, 27(7): 741-743. doi: 10.1109/LPT.2015.2390916
|
| [23] |
DING W H, JIANG Y, GAO R, et al. High-temperature fiber-optic Fabry-Perot interferometric sensors[J]. Review of Scientific Instruments, 2015, 86(5): 055001. doi: 10.1063/1.4919409
|
| [24] |
CHEN ZH SH, XIONG S S, GAO SH CH, et al. High-temperature sensor based on fabry-perot interferometer in microfiber tip[J]. Sensors, 2018, 18(1): 202.
|
| [25] |
CHEN P CH, SHU X W. Refractive-index-modified-dot Fabry-Perot fiber probe fabricated by femtosecond laser for high-temperature sensing[J]. Optics Express, 2018, 26(5): 5292-5299. doi: 10.1364/OE.26.005292
|
| [26] |
ZHANG P H, ZHANG L, MOURELATOS Z P, et al. Crystallization-sapphire-derived-fiber-based Fabry-Perot interferometer for refractive index and high-temperature measurement[J]. Applied Optics, 2018, 57(30): 9016-9021. doi: 10.1364/AO.57.009016
|
| [27] |
YU H H, WANG Y, MA J, et al. Fabry-Perot interferometric high-temperature sensing up to 1200 °C based on a silica glass photonic crystal fiber[J]. Sensors, 2018, 18(1): 273. doi: 10.3390/s18010273
|
| [28] |
DENG J, WANG D N, ZHANG H. Femtosecond laser inscribed multiple in-fiber reflection mirrors for high-temperature sensing[J]. Journal of Lightwave Technology, 2019, 37(21): 5537-5541. doi: 10.1109/JLT.2019.2935460
|
| [29] |
WANG Q H, ZHANG H, WANG D N. Cascaded multiple Fabry-Perot interferometers fabricated in no-core fiber with a waveguide for high-temperature sensing[J]. Optics Letters, 2019, 44(21): 5145-5148. doi: 10.1364/OL.44.005145
|
| [30] |
LEI X Q, DONG X P, Sensitivity-enhanced fiber interferometric high temperature sensor based on vernier effect[J]. Proceedings of SPIE, 2019, 11144: 1114405
|
| [31] |
LIU H, PANG F, HONG L, et al. Crystallization-induced refractive index modulation on sapphire-derived fiber for ultrahigh temperature sensing[J]. Optics Express, 2019, 27(5): 6201-6209. doi: 10.1364/OE.27.006201
|
| [32] |
WANG Z, LIU H, MA Z, et al. High temperature strain sensing with alumina ceramic derived fiber based Fabry-Perot interferometer[J]. Optics Express, 2019, 27(20): 27691-27701. doi: 10.1364/OE.27.027691
|
| [33] |
ZHANG G, WU X Q, LI SH L, et al. Miniaturized Fabry-Perot probe utilizing PMPCF for high temperature measurement[J]. Applied Optics, 2020, 59(3): 873-877. doi: 10.1364/AO.379092
|
| [34] |
WANG B T, NIU Y X, ZHENG SH W, et al. A high temperature sensor based on sapphire fiber Fabry-Perot interferometer[J]. IEEE Photonics Technology Letters, 2020, 32(2): 89-92. doi: 10.1109/LPT.2019.2957917
|
| [35] |
LEI J CH, ZHANG Q, SONG Y, et al. Laser-assisted embedding of all-glass optical fiber sensors into bulk ceramics for high-temperature applications[J]. Optics &Laser Technology, 2020, 128: 106223.
|
| [36] |
SU H Y, ZHANG Y D, MA K, et al. Tip packaged high-temperature miniature sensor based on suspended core optical fiber[J]. Journal of Lightwave Technology, 2020, 38(15): 4160-4165.
|
| [37] |
LEI X Q, DONG X P. High-sensitivity Fabry–Perot interferometer high-temperature fiber sensor based on vernier effect[J]. IEEE Sensors Journal, 2020, 20(10): 5292-5297. doi: 10.1109/JSEN.2020.2970579
|
| [38] |
WANG M H, YANG Y, HUANG S, et al. Multiplexable high-temperature stable and low-loss intrinsic Fabry-Perot in-fiber sensors through nanograting engineering[J]. Optics Express, 2020, 28(14): 20225-20235. doi: 10.1364/OE.395382
|
| [39] |
NIU Y D, WANG D N, WANG Q H, et al. Cascaded multiple Fabry–Perot interferometers fabricated in multimode fiber with a waveguide[J]. Optical Fiber Technology, 2020, 58: 102306. doi: 10.1016/j.yofte.2020.102306
|
| [40] |
ZHU Y ZH, HUANG ZH Y, SHEN F B, et al. Sapphire-fiber-based white-light interferometric sensor for high-temperature measurements[J]. Optics Letters, 2005, 30(7): 711-713. doi: 10.1364/OL.30.000711
|
| [41] |
KOU J L, FENG J, YE L, et al. Miniaturized fiber taper reflective interferometer for high temperature measurement[J]. Optics Express, 2010, 18(13): 14245-14250. doi: 10.1364/OE.18.014245
|
| [42] |
TAFULO P A R, JORGE P A S, SANTOS J L, et al. Fabry–Pérot cavities based on chemical etching for high temperature and strain measurement[J]. Optics Communications, 2012, 285(6): 1159-1162. doi: 10.1016/j.optcom.2011.11.097
|
| [43] |
ZHANG Y N, YUAN L, LAN X W, et al. High-temperature fiber-optic Fabry-Perot interferometric pressure sensor fabricated by femtosecond laser[J]. Optics Letters, 2013, 38(22): 4609-4612. doi: 10.1364/OL.38.004609
|
| [44] |
KAUR A, WATKINS S E, HUANG J, et al. Microcavity strain sensor for high temperature applications[J]. Optical Engineering, 2014, 53(1): 017105. doi: 10.1117/1.OE.53.1.017105
|
| [45] |
JIANG Y J, YANG D X, YUAN Y, et al. Strain and high-temperature discrimination using a type II fiber Bragg grating and a miniature fiber Fabry-Perot interferometer[J]. Applied Optics, 2016, 55(23): 6341-6345. doi: 10.1364/AO.55.006341
|
| [46] |
WANG Y C, BAO H H, RAN Z L, et al. Integrated FP/RFBG sensor with a micro-channel for dual-parameter measurement under high temperature[J]. Applied Optics, 2017, 56(15): 4250-4254. doi: 10.1364/AO.56.004250
|
| [47] |
LIU SH H, TIAN J, WANG SH, et al. Anti-resonant reflecting guidance in silica tube for high temperature sensing[J]. IEEE Photonics Technology Letters, 2017, 29(23): 2135-2138. doi: 10.1109/LPT.2017.2768433
|
| [48] |
LIU ZH W, QIAO X G, WANG R H. Miniaturized fiber-taper-based Fabry-Perot interferometer for high-temperature sensing[J]. Applied Optics, 2017, 56(2): 256-259. doi: 10.1364/AO.56.000256
|
| [49] |
JIA P G, FANG G CH, LIANG T, et al. Temperature-compensated fiber-optic Fabry–Perot interferometric gas refractive-index sensor based on hollow silica tube for high-temperature application[J]. Sensors and Actuators B:Chemical, 2017, 244: 226-232. doi: 10.1016/j.snb.2016.12.123
|
| [50] |
LI Z, JIA P G, FANG G CH, et al. Microbubble-based fiber-optic Fabry-Perot pressure sensor for high-temperature application[J]. Applied Optics, 2018, 57(8): 1738-1743. doi: 10.1364/AO.57.001738
|
| [51] |
LIANG H, JIA P G, LIU J, et al. Diaphragm-free Fiber-Optic fabry-perot interferometric gas pressure sensor for high temperature application[J]. Sensors, 2018, 18(4): 1011. doi: 10.3390/s18041011
|
| [52] |
ZHAO L, ZHANG Y D, CHEN Y H, et al. Composite cavity fiber tip Fabry-Perot interferometer for high temperature sensing[J]. Optical Fiber Technology, 2019, 50: 31-35. doi: 10.1016/j.yofte.2019.01.027
|
| [53] |
ZHU CH, ZHUANG Y Y, ZHANG B H, et al. A miniaturized optical fiber tip high-temperature sensor based on concave-shaped Fabry-Perot cavity[J]. IEEE Photonics Technology Letters, 2019, 31(1): 35-38. doi: 10.1109/LPT.2018.2881721
|
| [54] |
ZHANG Q, LEI J CH, CHEN Y ZH, et al. 3D printing of all-glass fiber-optic pressure sensor for high temperature applications[J]. IEEE Sensors Journal, 2019, 19(23): 11242-11246. doi: 10.1109/JSEN.2019.2935689
|
| [55] |
ZHANG P H, ZHANG L, WANG ZH Y, et al. Sapphire derived fiber based Fabry-Perot interferometer with an etched micro air cavity for strain measurement at high temperatures[J]. Optics Express, 2019, 27(19): 27112-27123. doi: 10.1364/OE.27.027112
|
| [56] |
ZHANG F ZH, ZHAO N, LIN Q J, et al. The influence of key characteristic parameters on performance of optical fiber Fabry-Perot temperature sensor[J]. AIP Advances, 2020, 10(8): 085118. doi: 10.1063/5.0005151
|
| [57] |
NAN J, ZHANG D SH, WEN X Y, et al. Elimination of thermal strain interference in mechanical strain measurement at high temperature using an EFPI-RFBG hybrid sensor with unlimited cavity length[J]. IEEE Sensors Journal, 2020, 20(10): 5270-5276. doi: 10.1109/JSEN.2020.2969431
|
| [58] |
TIAN Q, XIN G G, LIM K S, et al. Cascaded Fabry-Perot interferometer-regenerated fiber Bragg grating structure for temperature-strain measurement under extreme temperature conditions[J]. Optics Express, 2020, 28(21): 30478-30488. doi: 10.1364/OE.403716
|
| [59] |
LYU D J, PENG J K, HUANG Q, et al. Radiation-resistant optical fiber Fabry-Perot interferometer used for high-temperature sensing[J]. IEEE Sensors Journal, 2021, 21(1): 57-61. doi: 10.1109/JSEN.2020.2972702
|
| [60] |
RAO Y J, DENG M, ZHU T, et al. In-line Fabry–Perot etalons based on hollow-corephotonic bandgap fibers for high-temperature applications[J]. Journal of Lightwave Technology, 2009, 27(19): 4360-4365. doi: 10.1109/JLT.2009.2023924
|
| [61] |
DENG M, TANG CH P, ZHU T, et al. PCF-based Fabry–Pérot interferometric sensor for strain measurement at high temperatures[J]. IEEE Photonics Technology Letters, 2011, 23(11): 700-702. doi: 10.1109/LPT.2011.2124452
|
| [62] |
WU CH, FU H Y, QURESHI K K, et al. High-pressure and high-temperature characteristics of a Fabry–Perot interferometer based on photonic crystal fiber[J]. Optics Letters, 2011, 36(3): 412-414. doi: 10.1364/OL.36.000412
|
| [63] |
RAN Z L, LIU SH, LIU Q, et al. Novel high-temperature fiber-optic pressure sensor based on etched PCF F-P interferometer micromachined by a 157-nm laser[J]. IEEE Sensors Journal, 2015, 15(7): 3955-3958. doi: 10.1109/JSEN.2014.2371243
|
| [64] |
ZHANG P, TANG M, GAO F, et al. Simplified hollow-core fiber-based Fabry–Perot interferometer with modified vernier effect for highly sensitive high-temperature measurement[J]. IEEE Photonics Journal, 2015, 7(1): 7100210.
|
| [65] |
FERREIRA M S, RORIZ P, BIERLICH J, et al. Fabry-Perot cavity based on silica tube for strain sensing at high temperatures[J]. Optics Express, 2015, 23(12): 16063-16070. doi: 10.1364/OE.23.016063
|
| [66] |
LIU H, YANG H ZH, QIAO X G, et al. Strain measurement at high temperature environment based on Fabry-Perot interferometer cascaded fiber regeneration grating[J]. Sensors and Actuators A:Physical, 2016, 248: 199-205. doi: 10.1016/j.sna.2016.07.028
|
| [67] |
ZHANG ZH, HE J, DU B, et al. Measurement of high pressure and high temperature using a dual-cavity Fabry-Perot interferometer created in cascade hollow-core fibers[J]. Optics Letters, 2018, 43(24): 6009-6012. doi: 10.1364/OL.43.006009
|
| [68] |
LIU D J, WU Q, MEI CH, et al. Hollow core fiber based interferometer for high-temperature (1000 °C) measurement[J]. Journal of Lightwave Technology, 2018, 36(9): 1583-1590. doi: 10.1109/JLT.2017.2784544
|
| [69] |
HE H Y, LIU Y, LIAO Y Y, et al. Simple fiber-optic sensor for simultaneous and sensitive measurement of high pressure and high temperature based on the silica capillary tube[J]. Optics Express, 2019, 27(18): 25777-25788. doi: 10.1364/OE.27.025777
|
| [70] |
ZHANG G, WU X Q, ZHANG W J, et al. High temperature Vernier probe utilizing photonic crystal fiber-based Fabry-Perot interferometers[J]. Optics Express, 2019, 27(26): 37308-37317. doi: 10.1364/OE.27.037308
|
| [71] |
TIAN Q, YANG H ZH, LIM K S, et al. Temperature and strain response of in-fiber air-cavity Fabry-Perot interferometer under extreme temperature condition[J]. Optik, 2020, 220: 165034. doi: 10.1016/j.ijleo.2020.165034
|
| [72] |
ZHANG H, WANG D N, RAHMAN B M A. Parallel structured fiber in-line multiple Fabry-Perot cavities for high temperature sensing[J]. Sensors and Actuators A:Physical, 2020, 313: 112214. doi: 10.1016/j.sna.2020.112214
|
| [73] |
CUI Y, JIANG Y, LIU T M, et al. A dual-cavity Fabry–Perot interferometric fiber-optic sensor for the simultaneous measurement of high-temperature and high-gas-pressure[J]. IEEE Access, 2020, 8: 80582-80587. doi: 10.1109/ACCESS.2020.2991551
|
| [74] |
YI J, LALLY E, WANG A B, et al. Demonstration of an all-sapphire Fabry–Pérot cavity for pressure sensing[J]. IEEE Photonics Technology Letters, 2010, 23(1): 9-11.
|
| [75] |
TIAN ZH P, YU ZH H, LIU B, et al. Sourceless optical fiber high temperature sensor[J]. Optics Letters, 2016, 41(2): 195-198. doi: 10.1364/OL.41.000195
|
| [76] |
DRAGIC P, HAWKINS T, FOY P, et al. Sapphire-derived all-glass optical fibres[J]. Nature Photonics, 2012, 6(9): 627-633. doi: 10.1038/nphoton.2012.182
|
| [77] |
李自亮, 廖常锐, 刘申, 等. 光纤法布里-珀罗干涉温度压力传感技术研究进展[J]. 物理学报,2017,66(7):070708. doi: 10.7498/aps.66.070708
LI Z L, LIAO CH R, LIU SH, et al. Research progress of in-fiber Fabry-Perot interferometric temperature and pressure sensors[J]. Acta Physica Sinica, 2017, 66(7): 070708. (in Chinese) doi: 10.7498/aps.66.070708
|
| [78] |
陈伟民, 雷小华, 张伟, 等. 光纤法布里-珀罗传感器研究进展[J]. 光学学报,2018,38(3):132-145.
CHEN W M, LEI X H, ZHANG W, et al. Recent progress of optical fiber Fabry-Perot sensors[J]. Acta Optica Sinica, 2018, 38(3): 132-145. (in Chinese)
|
| [79] |
朱永, 符欲梅, 陈伟民, 等. 大佛寺长江大桥健康监测系统[J]. 土木工程学报,2005,38(10):66-71.
ZHU Y, FU Y M, CHEN W M, et al. A health monitoring system for the Dafosi Yangtze River bridge[J]. China Civil Engineering Journal, 2005, 38(10): 66-71. (in Chinese)
|
| [80] |
梁大开, 李东升, 潘晓文, 等. 基于法珀腔光纤传感器的光纤智能夹层的研究[J]. 仪器仪表学报,2005,26(S1):226-228.
LIANG D K, LI D SH, PAN X W, et al. Study of fiber-optic smart layer system based on Fabry-Perot strain sensor[J]. Chinese Journal of Scientific Instrument, 2005, 26(S1): 226-228. (in Chinese)
|
| [81] |
单宁, 史仪凯, 刘霞. 光纤法-珀传感器在飞机发动机叶片裂纹检测中的应用[J]. 无损检测,2009,31(3):206-207,216.
SHAN N, SHI Y K, LIU X. Detecting crack of aircraft engine blade based on optical fiber F-P sensor[J]. Nondestructive Testing, 2009, 31(3): 206-207,216. (in Chinese)
|
| [82] |
FUSIEK G, NIEWCZAS P, BURT G M. Preliminary evaluation of a high-pressure hightemperature downhole optical sensor[C]. Proceedings of the SENSORS, 2011 IEEE, IEEE, 2011: 409-412.
|
| [83] |
YANG T T, HE X, RAN Z L, et al. Highly integrated all-fiber FP/FBG sensor for accurate measurement of strain under high temperature[J]. Materials, 2018, 11(10): 1867. doi: 10.3390/ma11101867
|
| [84] |
ZHOU CH R, TONG X L, MAO Y, et al. Study on a high-temperature optical fiber F–P acceleration sensing system based on MEMS[J]. Optics and Lasers in Engineering, 2019, 120: 95-100. doi: 10.1016/j.optlaseng.2019.03.002
|
| [85] |
MA W Y, JIANG Y, ZHANG H, et al. Miniature on-fiber extrinsic Fabry-Perot interferometric vibration sensors based on micro-cantilever beam[J]. Nanotechnology Reviews, 2019, 8(1): 293-298. doi: 10.1515/ntrev-2019-0028
|
| [86] |
HUANG Y G, TANG F, MA D W, et al. Design, fabrication, characterization, and application of an ultra-high temperature 6H-SiC sapphire fiber optic vibration sensor[J]. IEEE Photonics Journal, 2019, 11(5): 6802512.
|
| [87] |
FENG R, CHU Y, LIU ZH J, et al. Study on high temperature resistant packaging of ultra high temperature Fabry–Perot optical fibre vibration sensor[J]. IEEE Sensors Journal, 2021, 21(23): 27045-27050. doi: 10.1109/JSEN.2021.3117960
|
| [88] |
梁海来. 全光纤FPI型低频振动传感器的设计与实验[D]. 重庆: 重庆大学, 2017.
LIANG H L. Design and experiment of all-fiber low-frequency vibration sensor based on FPI[D]. Chongqing: Chongqing University, 2017.
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