| Citation: | BAO Ming-di, SHI Guo-hua, XING Li-na, HE Yi. High-precision spherical wavefront calibration method for shack-hartmann wavefront sensor[J]. Chinese Optics, 2024, 17(3): 521-527. doi: 10.37188/CO.2023-0148
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To address the issues of low measurement accuracy and insufficient stability in traditional calibration methods for Shack-Hartmann wavefront sensors (SHWFS), we propose a high-precision absolute calibration method using spherical waves generated by sensor. A high-precision calibration method for spherical waves was obtained through theoretical derivation. Combined with the constructed spherical wave calibration experimental device, high-precision calibration was performed on the SHWFS with sub apertures of 128×128. The structural parameters of the SHWFS (
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