Volume 17 Issue 4
Jul.  2024
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Chinese Optics  > 2024  >  17(4): 852-861.
XUE Yi-meng, LIU Bing-cai, PAN Yong-qiang, FANG Xin-meng, TIAN Ai-ling, ZHANG Rui-xuan. Vortex phase-shifting digital holography for micro-optical element surface topography measurment[J]. Chinese Optics, 2024, 17(4): 852-861. doi: 10.37188/CO.2023-0180
Citation: XUE Yi-meng, LIU Bing-cai, PAN Yong-qiang, FANG Xin-meng, TIAN Ai-ling, ZHANG Rui-xuan. Vortex phase-shifting digital holography for micro-optical element surface topography measurment[J]. Chinese Optics, 2024, 17(4): 852-861. doi: 10.37188/CO.2023-0180
shu

Vortex phase-shifting digital holography for micro-optical element surface topography measurment

cstr: 32171.14.CO.2023-0180
  • 1.

    School of Opto-Electronic Engineering, Xi’an Technological University, Xi’an 710021, China

  • 2.

    Shaanxi Province Key Laboratory of Thin Film Technology and Optical Testing, Xi’an Technological University, Xi’an 710021, China

Funds:  Supported by Shaanxi Provincial Science and Technology Department Project (No. 2023KXJ-066); Shaanxi Province Education Department Project (No. 23JY034); Shaanxi Provincial Natural Science Basic Research Program Project (NO.2024JC-YBMS-523)
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  • Corresponding author: pyq_867@163.com
  • Received Date: 11 Oct 2023
  • Rev Recd Date: 30 Oct 2023
    • Available Online: 20 Feb 2024
    Abstract

  • Non-destructive, non-contact phase-shifting digital holography technology has distinct advantages in identifying micro-optical components. As traditional phase-shifting digital holography technology requires fine control and cumbersome calibration of the phase shifter, furthermore, its optical path is susceptible to mechanical vibration interference, which reduces the quality of the holographically reproduced image. To solve the above problems, we propose a vortex phase-shifting digital holography for the micro-optical element surface measurement with the help of the special phase distribution of vortex light. The method utilizes a helical phase plate to modulate the vortex phase and introduce a high-precision phase shift. Based on the constructed vortex phase-shifting digital holographic microscopy experimental setup, the actual phase shifts between phase-shift interferograms were determined using the interferometric polarity method, the relationship between the rotation angle of the helical phase plate and the phase shift was calibrated, and the feasibility of the vortex phase shift was experimentally verified. Repeated measurement experiments were carried out on the micro-lens arrays, and the measurement results were compared with those of the ZYGO white light interferometer. The results indicate that a single micro-lens's average longitudinal vector height is 12.897 μm with an average relative error of 0.155%. The proposed method enables highly precise measurement of the surface topography of micro-optical elements. It offers the advantages of easy operation, high stability, and high accuracy.

     

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