| Citation: | REN Yi-jie, ZHANG Zheng-tao. Study of the scattering model of micro-defects on cavity mirrors in cavity ring-down spectroscopy instruments[J]. Chinese Optics. doi: 10.37188/CO.2024-0094
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Microdefects in cavity mirrors utilized in cavity ring-down spectroscopy (CRDS) adversely affect measurement accuracy. This paper establishes a microdefect scattering model grounded in Bobbert and Vlieger's Bidirectional Reflectance Distribution Function (BRDF) theory to analyze the characteristics of scattered light from microdefects under varying wavelengths, incident angles, defect sizes, types, densities, and substrate coatings. Studying the cavity mirror microdefect scattering model shows that defects in the micrometer to submicron range (100 um to 0.1 um) affect the ring-down absorption accuracy. Aiming at detecting microdefects of this order, this paper’s authors constructed analytical models of microdefect scattering and dark field detection of microdefects in cavity mirrors. Establishing and analyzing the scattering light model of CRDS mirror microdefects is critical to realizing the high-precision detection of CRDS mirror microdefects and recovering CRDS measurement accuracy.
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