| Citation: | HUANG Pan, ZHAO Chong-xiao, DONG Zhu-jun, PAN Qi-kun, FENG Yu-ze, ZHANG Lai-ming, GUO Jin. Design of dynamic L-type impedance matching network in RF excited fast axial flow CO2 lasers[J]. Chinese Optics. doi: 10.37188/CO.2024-0096
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In order to solve the problem of RF discharge impedance matching of high-power fast axial flow CO2 lasers, an impedance matching network with low reflectivity and high dynamic matching range was designed to realize the efficient utilization of RF excited fast axial flow CO2 lasers under different discharge structures. Based on the impedance matching theory of RF circuits, a multi-electrode equivalent circuit model was constructed, a method of introducing tunable high-voltage ceramic capacitors into the matching network was proposed, and a dynamic L-type matching network suitable for high-power RF excited fast axial flow CO2 lasers was designed. The simulated dynamic L-type matching network can inject 60 kW RF power into 16 discharge tubes and achieve a reflectivity of less than 1% in the range of total load impedance of 12.81 Ω~49.94 Ω. A single-tube RF discharge experimental device was built, and the reflectivity of the dynamic L-type matching network was measured as less than 1% at 4 kW injection power, which was consistent with the simulation results. It is proved that the dynamic L-type matching network with adjustable high-voltage ceramic capacitors can achieve impedance matching in the high dynamic range, which meets the design requirements of high-power RF excited fast axial flow CO2 laser matching circuits.
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