| Citation: | WANG Shen, LIU Quan, GUO Cheng-li, YAN Lisong. Research on CGH null compensation testing of high-order coaxial aspherical surface[J]. Chinese Optics. doi: 10.37188/CO.2024-0152
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In order to solve the problem of high-precision surface map testing of coaxial high-order aspherical surface, a null compensation testing method based on CGH is proposed in this paper. Based on the above method, we can effectively realize the separation of the diffraction order in the coaxial aspherical compensation design, and realize the null compensation design of the mirror to be measured. Combined with engineering examples, we have realized null compensation testing design for a coaxial high-order aspherical mirror with 260mm aperture. From the CGH design results, it can be seen that the theoretical design testing residual can reach 0nm RMS value based on our design method described in this paper. At the same time, we also completed the practical testing of the coaxial high order aspherical mirror. In order to further analyze the testing results, we carried out error analysis on the error source in the testing process, so as to verify the reliability and accuracy of the method.
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