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GAO Hong-hu, MA Jun-jie, ZHU Lin-wei, SHI Qiang. Laser compensation of waveguide shape defects on vertical end face[J]. Chinese Optics. doi: 10.37188/CO.2024-0220
Citation: GAO Hong-hu, MA Jun-jie, ZHU Lin-wei, SHI Qiang. Laser compensation of waveguide shape defects on vertical end face[J]. Chinese Optics. doi: 10.37188/CO.2024-0220

Laser compensation of waveguide shape defects on vertical end face

cstr: 32171.14.CO.2024-0220
Funds:  Supported by National Natural Science Foundation of China (No. 62174073); Yantai Science and Technology Development Plan (No. 2020XDRH095); Shandong Province Taishan Industry Leading Talent Project (No. tscx202211051)
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  • The purpose of this study is to solve the problem of optical waveguide shape defects. These defects occur during the process of vertical end face waveguide bridging in photonic chips. The obstruction of the laser beam by the surface of the chip is the root cause of these defects. The present study investigates the light intensity distribution based on the focusing light field of high numerical aperture (NA) lenses. The study focuses on the laser focus at different x-direction offsets on the vertical end-face of the chip. First, we give the analytical expressions of the light field near the focus. These are in the focusing system of high NA lenses. In addition, we give the expressions for the focused light field components. This analysis is conducted under the assumption of linearly polarized light incident. We then conduct numerical simulations with the given expressions. We study the focal light intensity distribution at different offsets in the x-direction. These offsets are measured from the vertical end face of the photonic chip. The intensity changes resulting from the disturbance of the focal light field are presented. The focal light field intensity changes are drawn. These curves are then compared with the trend of the waveguide shape changes in the experiments. Finally, based on the focal light intensity distribution curves, the reverse curves of the laser power compensation coefficients are derived. These are then applied to the optical waveguide compensation processing experiments. After power compensation processing, the parts with waveguide width less than 4 μm. Following this compensation, these components are successfully adjusted to a width of 4 μm, resulting in a straighter shape. The defects are effectively repaired. This finding is corroborated by both numerical simulations and experimental results. This method has been demonstrated to be an effective means of compensating for defects in waveguide shape. These defects are attributed to insufficient laser power. This method provides an effective solution for waveguide processing in photonic chip integration.

     

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