| Citation: | YIN Jian-xiong, WANG Jun, WANG Hao-xing, WAN Shun, LIU Jia, JIA Ping-gang. Silicon MEMS fiber-optic Fabry Perot pressure sensor for shock wave measurements[J]. Chinese Optics. doi: 10.37188/CO.2025-0010
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A fiber-optic Fabry-Perot pressure sensor based on microelectromechanical systems (MEMS) technology is proposed for transient pressure measurements such as shock waves. The sensitive unit is made of etched silicon wafers and BF33 glass wafers through anodic bonding, and the adhesive-free integration of the optical fiber and the sensitive unit is realized by laser fusion bonding technology. A signal demodulation experiment platform was built to comprehensively evaluate the pressure sensing characteristics of sensors in static and dynamic pressure environments. The test results show that the sensor has a good linear response over the pressure range of 0-10 MPa, with a full-scale nonlinear error of 0.41% and a hysteresis of 0.37%. In dynamic pressure measurement, the sensor has a rise time of 8.5μs. The sensor has the advantages of anti-electromagnetic interference, high consistency, low cost, and has a theoretical resonant frequency of 1.39 MHz, demonstrating the prospect of its wide application for dynamic pressure measurements in harsh environments such as explosion fields.
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