| Citation: | SHEN Ji, VIACHESLAV V. Zabudsky, CHANG Wei-jing, NA Qi-yue, JIAN Yun-fei, OLEG V. Rikhalsky, OLEKSANDR G. Golenkov, VOLODYMYR P. Reva. Design and application of CCD/EMCCD photoelectronic parameter test system[J]. Chinese Optics, 2024, 17(3): 693-703. doi: 10.37188/CO.EN-2023-0016
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A photoelectrical parameters test system for testing CCD and electron-multiplying charge-coupled device (EMCCD) chips is designed. The test system has automatic and manual modes, and it can test the dark currents, the output amplifier’s responsivity, charge transfer efficiency, charge capacity and other parameters. According to different specifications and structures of CCD/EMCCD devices, we complete the parameter test of wafer or packaged product. The developed system can be used for the testing and sorting for 576 × 288, 640 × 512, 768 × 576, 1024 × 1024, 1280 × 1024 CCD and EMCCD chips.
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