Influence of mounting stress on wavefront distortion of lithographic object lens

[1] NICHOLAS F B,CHARLENE S,DOUGLAS C A,et al.. Densification of fused silica under 193-nm excitation[J]. J. Opt. Soc. Am. B,1997,14(7):1606-1615. [2] CHARLENE M S,NICHOLAS F B. Behavior of 157 nm excimer-laser-induced refractive index changes in silica[J]. J. Opt. Soc. Am. B,2006,23(9):1815-1821. [3] YASUYUKI U. Distorted wave front produced by a high-resolution projection optical system having rotationally symmetric birefringence[J]. Appl. Opt.,1998,37(31):7241-7247. [4] LIJUAN S,YANG C,ALLEN Y Y,et al... Refractive index variation in compression molding of precision glass optical components[J]. Appl. Opt.,2008,47(10):1662-1667. [5] 杨光华,李艳秋. 22 nm极紫外光刻物镜热和结构变形及其对成像性能影响[J]. 光学学报,2012,32(3):0322005. YANG G H,LI Y Q. Thermal and structural deformation of projection optics and its influence on optical imaging performance for 22 nm extreme ultraviolet lithography[J]. Acta Optica Sinica,2012,32(3):0322005.(in Chinese) [6] 王平,王汝冬,田伟,等. Fizeau干涉仪主机的热稳定性设计与分析[J]. 光学 精密工程,2011,19(9):2100-2107. WANG P,WANG R D,TIAN W,et al.. Design and analysis of thermal stability for main frame in Fizeau interferometer[J]. Opt. Precision Eng.,2011,19(9):2100-2107.(in Chinese) [7] 齐文宗,黄伟,张彬,等. DF强激光反射镜热畸变的检测及热吸收的有限元分析[J]. 中国激光,2005,32(3):379-383. QI W Z,HUANG W,ZHANG B,et al.. Thermal distortion measurements and absorption analysis by finite element method of high power DF laser reflectors[J]. Chinese J Lasers,2005,32(3):379-383.(in Chinese) [8] 冯志庆,白兰,张增宝,等. 高能激光反射镜热变形补偿[J]. 光学 精密工程,2010,18(8):1781-1787. FENG ZH Q,BAI L,ZHANG Z B,et al.. Thermal deformation compensation of high-energy laser mirrors[J]. Opt. Precision Eng.,2010,18(8):1781-1787. (in Chinese) [9] 章亚男,沈丽丽,沈卫星,等. 大口径透镜姿态调整机构的支撑分布设计[J]. 光学 精密工程,2010,18(12):2624-2632. ZHANG Y N,SHEN L L,SHEN W X,et al.. Design of support distribution for attitude-adjusting mechanism of large lens[J]. Opt. Precision Eng.,2010,18(12):2624-2632.(in Chinese) [10] 杜少军,陆启生,舒柏宏. 激光窗口热效应和应力双折射的分析[J]. 强激光与粒子束,2004,16(5):575-581. DU SH J,LU Q SH,SHU B H. Analysis on thermal effect and stress-birefringence of laser window[J]. High Power Laser And Particle Beams,2004,16(5):575-581.(in Chinese) [11] 徐新华,王青,宋波,等. 基于子孔径拼接技术的大尺寸光学材料均匀性检测系统[J]. 光学学报,2012,32(4):0412002. XU X H,WANG Q,SONG B,et al.. Measurement system of optical homogeneity of large-size optical material based on subaperture stitching technique[J]. Acta Optica Sinica,2012,32(4):0412002.(in Chinese) [12] 李熙斌,王海军,袁晓东,等. CO₂激光辐照对融石英表面形貌与应力分布的影响 [J]. 中国激光,2011,38(9):0903002. LI X B,WANG H J,YUAN X D,et al.. Effects of CO₂ laser irradiation on surface morphology and stress distribution of fused silica[J]. Chinese J. Lasers,2011,38(9):0903002.(in Chinese) [13] 袁文泉,巩岩. 光刻物镜中主动液体透镜的像差特性研究[J]. 光学学报,2011,31(12):1222003. YUAN W Q,GONG Y. Study on characteristics of Aberrations for an Active liquid lens in lithographic objective lens[J]. Acta Optica Sinica,2011,31(12):1222003.(in Chinese) [14] 王辉. 极紫外光刻系统物镜光学元件的支撑与分析[J]. 中国光学与应用光学,2010,3(6):598-604. WANG H. Objective optical mounts and analysis for EUVL[J]. Chinese J. Optics and Appl. Optics,2010,3(6):598-604.(in Chinese) [15] 玻恩,沃尔夫.光学原理[M].杨葭孙,译. 北京:科学出版社,1978:182-190. BORN M,WOLF E. Principles of Optics[M]. YANG J S,Transl. Beijing:Science Press,1978:182-190.(in Chinese) [16] GRENINGER C E,NEEDHAM G A,JR J R. Optical distortions and birefringence in high power laser windows:model and computer code[J]. Appl. Opt.,1985,24(17):2797-2803.