Volume 6 Issue 1
Feb.  2013
Turn off MathJax
Article Contents
WANG Xiao-kun. Compensation of misalignment error on testing aspheric surface by subaperture stitching interferometry[J]. Chinese Optics, 2013, 6(1): 88-95. doi: 10.3788/CO.20130601.0088
Citation: WANG Xiao-kun. Compensation of misalignment error on testing aspheric surface by subaperture stitching interferometry[J]. Chinese Optics, 2013, 6(1): 88-95. doi: 10.3788/CO.20130601.0088

Compensation of misalignment error on testing aspheric surface by subaperture stitching interferometry

  • Received Date: 14 Sep 2012
  • Rev Recd Date: 13 Nov 2012
  • Publish Date: 10 Feb 2013
  • For the purpose to decrease the misalignment error from a testing aspheric surface by Subaperture Stitching Interferometry(SSI), a translated error compensation method is proposed to subtract the misalignment error from each phase detum and to stitch multi-subapertures precisely. The basic principle and process of the method are researched, and a compensation mode is established based on the mode search algorithm. The experiment is carried on for an off-axis SiC aspheric mirror with a clear aperture of 230 mm?141 mm, the phase data of the whole aperture are stitched precisely and the figure error is compensated by eliminating the misalignment error. For the comparison and validation, the asphere mirror is also tested by null compensation method, and the relative errors of PV and RMS are 0.57% and 2.74%, respectively.

     

  • loading
  • [1] HNSEL T,NICKEL A,SCHINDLER A. Stitching interferometry of aspherical surfaces[J]. SPIE,2001,4449:265-275. [2] CATANZARO B,CONNELL S. Cryogenic(70K) measurement of an all-composite 2-meter diameter mirror[J]. SPIE,2001,4444:238-255. [3] JON F,PAUL D,PAUL E M,et al.. An automated subaperture stitching interferometer workstation for spherical and aspherical surfaces[J]. SPIE,2007,5188:296-307. [4] TRICARD M,SHOREY A,HALLOCK B,et al.. Cost-effective, subaperture approaches to finishing and testing astronomical optics[J]. SPIE,2006,6273:62730L. [5] MURPHY P,FLEIG J,FORBES G. Subaperture stitching interferometry for testing mild aspheres[J]. SPIE,2006,6293:62930J. [6] 巩岩,赵磊. 单点金刚石机床及其在光学工程领域的应用[J]. 中国光学,2011,4(6):537-545. GONG Y,ZHAO L. Single point diamond machines and their applications to optical engineering[J]. Chinese Optics,2011,4(6):537-545.(in Chinese) [7] ZHAO CH Y,BURGE J H. Stitching of off-axis sub-aperture null measurements of an aspheric surface[J]. SPIE,2008,7063:706316. [8] MARC T,PAUL D,GREG F. Sub-aperture approaches for asphere polishing and metrology[J]. SPIE,2005,5638:284-299. [9] 王孝坤,王丽辉,张学军,等. 子孔径拼接法检测非球面[J]. 光学 精密工程,2007,15(2):527-532. WANG X K,WANG L H,ZHANG X J. Testing asphere by subaperture stitching interferometric method[J]. Opt. Precision Eng.,2007,15(2):192-198.(in Chinese) [10] 潘君骅.光学非球面的设计、加工和检验[M]. 北京:科学出版社,1994. PAN J H. Design, Fabrication and Testing of Optical Aspheres[M]. Beijing:Science Press,1994.(in Chinese) [11] MALACARA D. Optical Shop Testing[M]. New York:John Wiley & Sons,Inc.1992. [12] 侯溪,伍凡. 大型双曲面次镜面形检测技术现状及发展趋势[J]. 中国光学与应用光学,2010,3(4):310-317. HOU X,WU F. Status and trends of surface measurement technologies for large hyperboloidal secondary mirrors[J]. Chinese J. Opt. Appl. Opt.,2010,3(4):310-317.(in Chinese) [13] 韩昌元. 近代高分辨地球成像商业卫星[J]. 中国光学与应用光学,2010,3(3):201-208. HAN CH Y. Recent earth imaging commercial satellites with high resolutions[J]. Chinese J. Opt. Appl. Opt.,2010,3(3):201-208.(in Chinese) [14] WANG X K,WANG L H. Measurement of large aspheric surfaces byannular subaperture stitching interferometry[J]. Chinese Optics Letters,2007,11(5):645-647. [15] WANG X K,ZHENG L G,ZHANG B Z,et al.. Subaperture stitching interferometry for testing of a large hyperboloid[J]. Infrared and Laser Eng.,2009,38(1):88-93. [16] WANG X K,ZHENG L G,ZHANG B ZH,et al.. Test of an off-axis asphere by subaperture stitching interferometry[J]. SPIE,2009,7283:72832J.
  • 加载中

Catalog

    通讯作者: 陈斌, bchen63@163.com
    • 1. 

      沈阳化工大学材料科学与工程学院 沈阳 110142

    1. 本站搜索
    2. 百度学术搜索
    3. 万方数据库搜索
    4. CNKI搜索
    Article views(3707) PDF downloads(1117) Cited by()
    Proportional views
    Related

    /

    DownLoad:  Full-Size Img  PowerPoint
    Return
    Return