Volume 6 Issue 1
Feb.  2013
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LI Ming-yu, XUE Yi, LUO Gen, ZHANG Chao. Irreversible adherence of micro-fluidic channel of bio-sensor on slab optical waveguide[J]. Chinese Optics, 2013, 6(1): 103-110. doi: 10.3788/CO.20130601.0103
Citation: LI Ming-yu, XUE Yi, LUO Gen, ZHANG Chao. Irreversible adherence of micro-fluidic channel of bio-sensor on slab optical waveguide[J]. Chinese Optics, 2013, 6(1): 103-110. doi: 10.3788/CO.20130601.0103

Irreversible adherence of micro-fluidic channel of bio-sensor on slab optical waveguide

  • Received Date: 12 Sep 2012
  • Rev Recd Date: 15 Nov 2012
  • Publish Date: 10 Feb 2013
  • An irreversible adherence method is proposed to bond the microfluidic channel of a waveguide biosensor to orercome the liquid leaks from the traditional reversible adherence. Several methods on irreversible adherence between Polydimethylsiloxane(PDMS) and Silicon-on-Insulator(SOI) waveguide in the micro-fluidic channel of bio-sensor are illustrated, that is, irradiation with ultraviolet light, activation surface by oxygen plasma, oxidizing surfaces into SiO2 and ultraviolet glue. Firstly, the PDMS and SOI waveguide surfaces are treated with the four methods. Secondly, the bonding capacities are tested and the adherence effect is analysed in quantity. Finally, the activation surface by oxygen plasma is selected as the most effective method for irreversible adherence and other factors probably affecting the adherent effect in the experiment are also discussed.

     

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