Volume 6 Issue 6
Dec.  2013
Turn off MathJax
Article Contents
ZHANG Chun-lei, XIANG Yang, YU Chang-song. Development of pinhole filter in high precision interferometer[J]. Chinese Optics, 2013, 6(6): 952-957. doi: 10.3788/CO.20130606.952
Citation: ZHANG Chun-lei, XIANG Yang, YU Chang-song. Development of pinhole filter in high precision interferometer[J]. Chinese Optics, 2013, 6(6): 952-957. doi: 10.3788/CO.20130606.952

Development of pinhole filter in high precision interferometer

doi: 10.3788/CO.20130606.952
  • Received Date: 15 Sep 2013
  • Rev Recd Date: 12 Nov 2013
  • Publish Date: 10 Dec 2013
  • When the pinhole filter is applied in the converging illuminating optics of a 193 nm excimer laser with high repetition rate and high power, the laser-induced damage threshold of the pinhole filter should also be considered besides the fabrication feasibility, thickness and the pinhole size. In this paper, one dimensional conduction mathematic model based on laser-induced damage theory is used to analyse the laser-induced damage threshold for different thickness metals illuminated by the high power 193 nm excimer laser. The results indicate that Al has a higher laser-induced damage threshold of 1.161010 W/cm2 at 1.2 m thickness. Furthermore, the Al also has the advantage of easy fabrication. Ion beam machining method is used to fabricate the pinhole filters with diameters of 1.2 m and 1.5 m and the obtained sample are observed by a scanning microscope. It shows that the pinhole filters have good roundnesses and inner roughnesses, which almost satisfies the need of a shearing interferometer.

     

  • loading
  • [1] TEJNIL M E,GOLDBERG K A. Phase-shifting point diffraction interferometer[J]. Opt. Lett.,1996,20(19):1526-1528. [2] LAI K F,GALLATIN G,DE KERKHOF M,et al.. New paradigm in lens metrology for lithographic scanner:evaluation and exploration[J]. SPIE,2004,5377:160-170. [3] TORN F J,JUN K G,YASUSHI M,et al.. Portable phase measuring interferometer using Shack-Hartmann method[J]. SPIE,2003,5038:726-732. [4] 刘友强,曹银花,潘飞,等. 激光加工用半导体激光器的光束变换[J]. 光学 精密工程,2012,20(3):455-461. LIU Y Q,CAO Y H,PAN F,et al.. Beam transformation of diode lasers used in laser processing[J]. Opt. Precision Eng.,2012,20(3):455-461.(in Chinese) [5] 李世文,张秋慧,牛瑞华. 激光对金属铜微孔加工的热力学过程研究[J]. 光谱学与光谱分析,2013,33(4):899-902. LI SH W,ZHANG Q H,ZHU R H. Thermodynamics process of laser drilling on copper surface[J]. Spectroscopy and Spectral Analysis,2013,33(4):899-902.(in Chinese) [6] 朱洪波,李艳华,郝明明,等. 基于偏振复用技术的新型半导体激光加工光纤耦合模块[J]. 光学 精密工程,2013,21(5):1137-1143. ZHU H B,LI Y H,HAO M M,et al.. Fiber coupled diode laser module for laser processing by polarization multiplexing[J]. Opt. Precision Eng.,2013,21(5):1137-1143.(in Chinese) [7] 刘峰,彭国良,杜太焦,等. 切向气流对激光加热金属板非熔化穿孔效应的影响[J]. 中国光学,2013,6(3):332-342. LIU F,PENG G L,DU T J,et al.. Influence of tangential airflows on burn-through effect with no-melting of metal heated by laser[J]. Chinese Optics,2013,6(3):332-342.(in Chinese) [8] ZHANG J,PENG H Y,LIU Y,et al.. Fiber-coupled diode laser flexible processing source for metal sheet welding[J]. Chinese J. Luminescence,2012,33(8):895-900. [9] 于华杰,崔益民,王荣明. 聚焦离子束系统原理、应用及进展[J]. 电子显微学报,2008,27(3):243-248. YU H J,CUI Y M,WANG R M. Principle, application and development of focused ion beam system[J]. J. Chinese Electron Microscope Society,2008,27(3):243-248.(in Chinese) [10] 张继成,唐永建,吴卫东. 聚焦离子束系统在微米/纳米加工技术中的应用[J]. 材料导报,2006,20(增2):40-46. ZHANG J CH,TANG Y J,WU W D. Application of focused ion beam in micro/nanometer micromachining technology[J]. J. Materials,2006,20(supp 2):40-46.(in Chinese) [11] 张琨,林罡,刘刚,等. 电子束光刻技术的原理及其在微纳加工与纳米器件制备中的应用[J]. 电子显微学报,2006,25(2):97-103. ZHANG K,LIN G,LIU G,et al.. Principle of electron beam lithography and its application on the nanofabrication and nanodevice[J]. J. Chinese Electron Microscope Society,2006,25(2):97-103. [12] 齐克奇. 光刻物镜波像差检测平台针孔对准装置的研制[J]. 长春理工大学学报 (自然科学版),2012,35(4):46-48. QI K Q. Development of pinhole positioning device of wavefront aberration detecting stage for lithographic projection objective[J]. J. Changchun University of Science and Technology(Natural Science Edition),2012,35(4):46-48.(in Chinese) [13] 周孑民,朱再兴,谢东江,等. 常功率平面热源法测试耐火材料热物性的研究[J]. 中南大学学报,2011,42(5):467-1472. ZHOU J M,ZHU Z X,XIE D J,et al.. Thermal physical property of refractory material measured by plane heat source method with constant heat rate[J]. J. Central South University(Science and Technology),2011,42(5):467-1472.(in Chinese) [14] 伍德.光学材料的激光诱导损伤[M].崔旭东, 译.成都:西南交通大学出版社,2011:59. WOOD R M. Laser-induced Damage of Optical Materials[M]. CUI X D,Trans. Chengdu:Southwest Jiaotong University Press,2011:59. [15] 于长淞.点衍射干涉仪小孔掩模制备与检测技术研究[J]. 长春理工大学学报 (自然科学版),2012,35(4):24-26. YU C S. Research of preparation and detection technology of PDI pinhole mask[J]. J. Changchun University of Science and Technology(Natural Science Edition),2012,35(4):24-26.(in Chinese)
  • 加载中

Catalog

    通讯作者: 陈斌, bchen63@163.com
    • 1. 

      沈阳化工大学材料科学与工程学院 沈阳 110142

    1. 本站搜索
    2. 百度学术搜索
    3. 万方数据库搜索
    4. CNKI搜索
    Article views(2114) PDF downloads(712) Cited by()
    Proportional views

    /

    DownLoad:  Full-Size Img  PowerPoint
    Return
    Return