4通道交叉型二氧化硅光波导延迟线阵列的设计与制备

李浩; 宋玲玲; 张立钧; 王焕然; 李亮; 王菲; 衣云骥; 张大明

doi:10.3788/CO.20140703.0435

Volume 7 Issue 3

Jun. 2014

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Article Contents

Chinese Optics > 2014 > 7(3): 435-441.

LI Hao, SONG Ling-ling, ZHANG Li-jun, WANG Huan-ran, LI Liang, WANG Fei, YI Yun-ji, ZHANG Da-ming. Design and fabrication of 4 channels silica cross optical waveguide delay line array[J]. Chinese Optics, 2014, 7(3): 435-441. doi: 10.3788/CO.20140703.0435

Citation:

LI Hao, SONG Ling-ling, ZHANG Li-jun, WANG Huan-ran, LI Liang, WANG Fei, YI Yun-ji, ZHANG Da-ming. Design and fabrication of 4 channels silica cross optical waveguide delay line array[J]. Chinese Optics, 2014, 7(3): 435-441. doi: 10.3788/CO.20140703.0435

Citation:

LI Hao, SONG Ling-ling, ZHANG Li-jun, WANG Huan-ran, LI Liang, WANG Fei, YI Yun-ji, ZHANG Da-ming. Design and fabrication of 4 channels silica cross optical waveguide delay line array[J]. Chinese Optics, 2014, 7(3): 435-441. doi: 10.3788/CO.20140703.0435

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Design and fabrication of 4 channels silica cross optical waveguide delay line array

doi: 10.3788/CO.20140703.0435

LI Hao^1,2,
SONG Ling-ling³,
ZHANG Li-jun^1,2,
WANG Huan-ran^1,2,
LI Liang^1,2,
WANG Fei^1,2,
YI Yun-ji^{1,2
,
,},
ZHANG Da-ming^1,2

1.
State Key Laboratory on Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, Changchun 130012, China;
2.
Jilin Provincial Engineering Laboratory on Polymer Planar Lightwave Circuits, Changchun 130012, China;
3.
The 47th Research Institute of China Electronics Technology Group Corporation, Shenyang 110032, China

Received Date: 21 Jan 2014
Rev Recd Date: 23 Mar 2014
Publish Date: 25 May 2014

Abstract

Abstract

In this paper, an integrated 4-channels silica optical waveguide delay line array with low cost and low propagation loss was designed and manufactured. BPM software was selected to simulate the associated parameters, including Y splitter and bend loss. In order to reduce the device size and insertion loss, the smallest bending radius of the delay line was selected to be 1 500 m. And the structure of optimizing gradient Y splitter and right angle intersecting waveguide were optimized. The cross waveguide delay line device was manufactured by standard semiconductor manufacturing processes. The output infrared pattern was obtained. The delay time of each channel was 0 ps, 113 ps, 226 ps and 339 ps, respectively. The 4-channels silica waveguide delay line device can achieve an equal interval of delay time between the adjacent channels. It can be integrated with itself for several times to increase delay time. The output waveguide of the device can be integrated with the optical fiber array at the same time.
- optical waveguide delay line,
- silica,
- Y splitter

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References(1)

References

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