The research on key techniques of wide field extreme ultraviolet(EUV) spherical micro-channel plate(MCP) photon-counting imaging detector which will be used in space probe in China have been done. Firstly, the secondary electron yield model of photocathode material was built, and the secondary yield of alkali halide and MCP in soft X-ray and EUV band were calculated using the model. The measurement equipment of MCP's quantum detection efficiency also was set up. The calculated fomula of MCP's quantum efficiency was introduced, and MCP's quantum efficiency vs. wavelength and incidence angle in soft X-ray and EUV region were measured. secondly, the instrument of solid core spherical MCP fabrication was established, a set of spherical MCP with 150 mm radius were made using the instrument. The 48 mm induced charge wedge and strip anode in effective diameter was made by the use of traditional UV lithography, and the photon-counting imaging detector was integrated based on the anode and spherical MCP stack in Z configuration. Thirdly, the position readout electronics including analog frent-end and digital processing circuit and the software with image distortion rectification and real-time collection were developed. Finally, the measurement instrument of spherical MCP detector's spatial resolution and image linearity was built, and the specifications of the detector were measured using the instrument, showing that all technical specificaions of the detector satisfy the design requirements.
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