Key technology of ultra-thin optical element precision manufacture

Because of the difficulty to fabricate the ultra-thin optical element, this paper presents an efficient, advanced ultra-thin optical components integrated processing method to resolve the deformation problem. This method integrates precision grinding, precision polishing, ion beam figuring and other advanced technologies to acquire high-precision surface accuracy. In the grinding stage, the experiment uses force analysis and error compensate to reduce surface error caused by deformation. In the polishing stage, the experiment utilizes multiple iterative process to achieve surface error fast weaken .In the ion beam figuring stage, the experiment takes advantage of unstressed and non-contact of this processing method to achieve high-precision surface machining. Coring square material is chosen for the processing experiments. The result shows that the surface error has reached the level of ultra-precision optical components, and the final surface accuracy is PV=25 nm, RMS=1.5 nm. This method can be widely used for high-precision machining of ultra-thin optical components.