Citation: | DONG Jia-ning, FAN Jie, WANG Hai-zhu, ZOU Yong-gang, ZHANG Jia-bin, HOU Chun-ge. Research progress in laser damage of high reflective optical thin films[J]. Chinese Optics, 2018, 11(6): 931-948. doi: 10.3788/CO.20181106.0931 |
[1] |
SOULARD R, QUINN M N, TAJIMA T, et al.. ICAN:a novel laser architecture for space debris removal[J]. Acta Astronautica, 2014, 105(1):192-200. doi: 10.1016/j.actaastro.2014.09.004
|
[2] |
GAO Y K. Improvement of fatigue property in 7050-T7451 aluminum alloy by laser peening and shot peening[J]. Materials Science & Engineering A, 2011, 528(10-11):3823-3828. http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=db1e22c436b409b4989ade6b29d56948
|
[3] |
TOSHIKI T, DIETRICH H, YAN X Q. Laser acceleration of ions for radiation therapy[J]. Reviews of Accelerator Science & Technology, 2009, 2(1):201-228. http://d.old.wanfangdata.com.cn/OAPaper/oai_pubmedcentral.nih.gov_2597229
|
[4] |
ALVAREZ J, MIMA K, TANAKA K A, et al.. Ultraintense lasers as a promising research tool for fusion material testing:production of ions, X-rays and neutrons[J]. Plasma & Fusion Research, 2013, 3404055:1-8. http://adsabs.harvard.edu/abs/2013PFR.....804055A
|
[5] |
杨道奇, 付秀华, 耿似玉, 等.0.6~1.55μm可见/近红外超宽带增透膜的研制[J].中国光学, 2012, 5(3):270-276. doi: 10.3969/j.issn.2095-1531.2012.03.012
YANG D Q, FU X H, GENG S Y, et al.. Design and fabrication of 0.6-1.55μm visible/near infrared ultra-broad band antireflection coatings[J]. Chinese Optics, 2012, 5(3):270-276.(in Chinese) doi: 10.3969/j.issn.2095-1531.2012.03.012
|
[6] |
孙梦至, 王彤彤, 王延超, 等.大口径反射镜高反射膜研究进展[J].中国光学, 2016, 9(2):203-212. http://www.chineseoptics.net.cn/CN/abstract/abstract9405.shtml
SUN M ZH, WANG T T, WANG Y CH, et al.. Research development of high reflecting coating for large-diameter mirror[J]. Chinese Optics, 2016, 9(2):203-212.(in Chinese) http://www.chineseoptics.net.cn/CN/abstract/abstract9405.shtml
|
[7] |
董小燕, 龚斌, 李雅丽.光学薄膜及其应用方面的研究[J].物理与工程, 2012, 22(5):14-18. doi: 10.3969/j.issn.1009-7104.2012.05.005
DONG X Y, GONG B, LI Y L. Study on optical film and relevant applications[J]. Physics and Engineering, 2012, 22(5):14-18.(in Chinese) doi: 10.3969/j.issn.1009-7104.2012.05.005
|
[8] |
DANSON C, HILLIER D, HOPPS N, et al.. Petawatt class lasers worldwide[J]. High Power Laser Science and Engineering, 2015, 3(1):5-18. http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=HPL3HPLHPL3S2095471914000528h.xml
|
[9] |
International Organization for Standardization. Lasers and laser-related equipment-determination of laser-induced damage threshold of optical surfaces-Part 1: 1-On-1 Test[R]. ISO 11254-1, 2000.
|
[10] |
International Organization for Standardization. Lasers and laser-related equipment-determination of laser-induced damage threshold of optical surfaces-part 2: S-On-1 Test[R]. ISO 11254-2, 2001.
|
[11] |
WOLFE, JUSTIN. Small optics laser damage test procedure[R]. United States. Lawrence Livermore National Lab.(LLNL), Livermore, CA(United States), 2017.
|
[12] |
DANILE Y K. The mechanism of laser-induced damage in transparent materials, caused by thermal explosion of absorbing inhomogeneities[J]. Soviet Journal of Quantum Electronics, 1978, 8(8):116-118. http://www.mathnet.ru/eng/qe8443
|
[13] |
GARNOV S V, EPIFANOV A S, KLIMENTOV S M, et al.. Pulse-width dependence of laser damage in optical materials: critical analysis of available data and recent results for nanopicosecond region[C]. 24th annual Boulder Damage Symp on optical Materials for High Power Lasers, 1993, 1848(9): 403-414.
|
[14] |
YAO J, MA J, XIU C, et al.. Laser-induced damage of TiO2/SiO2 high reflector at 1064 nm[J]. Journal of Applied Physics, 2008, 103(8):1-5. http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=5144546668390609f35abefe24593f8e
|
[15] |
KAISER A, RETHFELD B, VICANEK M, et al.. Microscopic processes in dielectrics under irradiation by subpicosecond laser pulses[J]. Physical Review B, 2000, 61(17):11437-11450. doi: 10.1103/PhysRevB.61.11437
|
[16] |
SANNER N. Damage and ablation thresholds of fused-silica in femtosecond regime[J]. Physical Review B Condensed Matter & Materials Physics, 2011, 84(9):2669-2674. http://adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=2011PhRvB..84i4104C&db_key=PHY&link_type=EJOURNAL
|
[17] |
代福, 熊胜明.光斑尺寸对光学薄膜元件温升的影响[J].强激光与粒子束, 2007, 19(12):1983-1986. http://d.old.wanfangdata.com.cn/Periodical/qjgylzs200712011
DAI F, XIONG SH M. Laser beam diameter effect on temperature rise of films[J]. High Power Laser and Particle Beams, 2007, 19(12):1983-1986.(in Chinese) http://d.old.wanfangdata.com.cn/Periodical/qjgylzs200712011
|
[18] |
陈为兰, 顾培夫, 王颖, 等.红外薄膜中热应力的研究[J].物理学报, 2008, 57(7):4316-4321. http://d.old.wanfangdata.com.cn/Periodical/wlxb200807056
CHEN W L, GU P F, WANG Y, et al.. Analysis of the thermal stress in infrared films[J]. Acta Physica Sinica, 2008, 57(7):4316-4321.(in Chinese) http://d.old.wanfangdata.com.cn/Periodical/wlxb200807056
|
[19] |
WANG ZH SH, MA H P, CHENG X B, et al.. Nanosecond laser-induced damage of high-reflection coatings: NUV through NIR[C]. 48th SPIE Annual Laser Damage Symposium on Optical Materials for High-Power Lasers, 2016, 10014: 1001409-1-10.
|
[20] |
李大伟, 陶春先, 李笑, 等.1064 nm与532 nm激光对电子束蒸发制备的HfO2/SiO2高反膜损伤比较[J].强激光与粒子束, 2008, 20(9):1457-1460. http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=qjgylzs200809011
LI D W, TAO CH X, LI X, et al.. Comparison of laser induced damage at 1064 nm and 532 nm to high-reflective film HfO2/SiO2 fabricated by electron beam evaporation[J]. High Power Laser and Particle Beams, 2008, 20(9):1457-1460.(in Chinese) http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=qjgylzs200809011
|
[21] |
JUPÉ M, JENSEN L, STARKE K, et al.. Analysis in wavelength dependence of electronic damage[J]. Proc Spie, 2009, 7504:75040N-1-12. doi: 10.1117/12.856139
|
[22] |
徐均琪, 王建, 李绵, 等.钛酸镧薄膜在1064 nm/532 nm波长激光辐照下的光学特性[J].光子学报, 2018, 47(2):1-7. http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=gzxb201802002
XU J Q, WANG J, LI M, et al.. Optical properties of lanthanum titanate films irradiated by lasers with the wavelengths of 1064 nm and 532 nm[J]. Acta Photonica Sinica, 2018, 47(2):1-7.(in Chinese) http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=gzxb201802002
|
[23] |
王涛, 赵元安, 黄建兵, 等.多脉冲激光作用下光学薄膜损伤的累积效应[J].光子学报, 2006, 35(6):859-862. http://d.old.wanfangdata.com.cn/Periodical/gzxb200606015
WANG T, ZHAO Y A, HUANG J B, et al.. Accumulation effect of multi-shot laser induced damage to optical coatings[J]. Acta Photonica Sinica, 2006, 35(6):859-862.(in Chinese) http://d.old.wanfangdata.com.cn/Periodical/gzxb200606015
|
[24] |
袁磊, 赵元安, 贺洪波, 等.单脉冲和多脉冲飞秒激光对单层光学薄膜的损伤[J].强激光与粒子束, 2006, 18(4):595-598. http://d.old.wanfangdata.com.cn/Periodical/qjgylzs200604017
YUAN L, ZHAO Y A, HE H B, et al.. Single-pulse and multi-pulse femtosecond laser damage of optical single films[J]. High Power Laser and Particle Beams, 2006, 18(4):595-598.(in Chinese) http://d.old.wanfangdata.com.cn/Periodical/qjgylzs200604017
|
[25] |
刘志超, 陈松林, 罗晋, 等.1064 nm激光多脉冲下HfO2/SiO2高反膜损伤规律[J].红外与激光工程, 2012, 41(5):1191-1194. doi: 10.3969/j.issn.1007-2276.2012.05.014
LIU ZH CH, CHEN S L, LUO J, et al.. Studies of multipulse laser induced damage of HfO2/SiO2 multilayer at 1064 nm[J]. Infrared and Laser Engineering, 2012, 41(5):1191-1194.(in Chinese) doi: 10.3969/j.issn.1007-2276.2012.05.014
|
[26] |
李玉瑶, 张婉怡, 刘喆, 等.S-on-1测量方式下薄膜激光损伤的累积效应[J].激光技术, 2018, 42(1):39-42. http://d.old.wanfangdata.com.cn/Periodical/jgjs201801008
LI Y Y, ZHANG W Y, LIU ZH, et al.. Cumulative effect of thin film laser damage under S-on-1 measurement mode[J]. Laser Technology, 2018, 42(1):39-42.(in Chinese) http://d.old.wanfangdata.com.cn/Periodical/jgjs201801008
|
[27] |
CSAJB K V, BED H Z Z, NAGY B J, et al.. Ultrafast multipulse damage threshold of femtosecond high reflectors[J]. Appl. Opt., 2018, 57(2):340-343. http://europepmc.org/abstract/MED/29328183
|
[28] |
MERO M, CLAPP B, JASAPARA J C, et al.. On the damage behavior of dielectric films when illuminated with multiple femtosecond laser pulses[J]. Optical Engineering, 2005, 44(5):051107-1-6. http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=a66dc24211c58a8ede98c1cd1df152ca
|
[29] |
NGUYEN D N, EMMERT L A, RUDOLPH W, et al.. The effect of nitrogen doping on the multiple-pulse subpicosecond dielectric breakdown of hafnia films[J]. International Society for Optics and Photonics, 2009, 7504:750402-1-6 doi: 10.1117/12.836504
|
[30] |
代福, 熊胜明, 王文梁, 等.重复频率脉冲激光作用下膜内包裹物对损伤阈值的影响[J].强激光与粒子束, 2007, 19(7):1149-1152. http://d.old.wanfangdata.com.cn/Periodical/qjgylzs200707021
DAI F, XIONG SH M, WANG W L, et al.. Damage induced by inclusions in coatings under repetition frequency pulse laser[J]. High Power Laser and Particle Beams, 2007, 19(7):1149-1152(in Chinese) http://d.old.wanfangdata.com.cn/Periodical/qjgylzs200707021
|
[31] |
代福, 熊胜明.高重复频率DPL激光对光学薄膜元件损伤实验研究[J].红外与激光工程, 2014, 43(7):2074-2080. doi: 10.3969/j.issn.1007-2276.2014.07.006
DAI F, XIONG SH M. Experimental study on damage of optical coating irradiated by high repetition rate DPL laser[J]. Infrared and Laser Engineering, 2014, 43(7):2074-2080.(in Chinese) doi: 10.3969/j.issn.1007-2276.2014.07.006
|
[32] |
VÁMOS L, OSZETZKY D, DOMBI P. Femtosecond damage threshold at kHz and MHz pulse repetition rates[C]. SPIE Laser Damage, 2015, 9237: 11-16.
|
[33] |
WU B, BARTCH U, JUP M, et al.. Morphology investigations of laser induced damage[J]. Proceedings of SPIE The International Society for Optical Engineering, 2006, 6403:640319-1-10. http://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=1295070
|
[34] |
MELNIKAS S, TOLENIS T, SMALAKYS L, et al.. Enhancement of laser-induced damage threshold in chirped mirrors by electric field reallocation[J]. Optics Express, 2017, 25(22):26537-26545. doi: 10.1364/OE.25.026537
|
[35] |
张金胜, 宁永强, 张金龙, 等.大功率半导体激光器腔面膜的场强分布优化[J].中国激光, 2014, 41(1):145-149. http://www.cnki.com.cn/Article/CJFDTotal-JJZZ201401027.htm
ZHANG J SH, NING Y Q, ZHANG J L, et al.. Optimization of electric field intensity distribution on high power semiconductor laser facet film[J]. Chinese Journal of Lasers, 2014, 41(1):145-149.(in Chinese) http://www.cnki.com.cn/Article/CJFDTotal-JJZZ201401027.htm
|
[36] |
MECHOLD L. Characterization of HfO2-SiO2 rugate multilayers deposited by ion beam sputtering[J]. Proc. SPIE International Society for Optics and Photonics, 2014, 9237:92370O-1-6. http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=CC0214804559
|
[37] |
JUP M, JENSEN L, RISTAU D. Laser-induced damage and nonlinear absorption of ultrashort laser pulses in the bulk of fused silica[J]. Proc SPIE, 2009, 7504:75040H-1-8. doi: 10.1117/12.856139
|
[38] |
MANGOTE B, GALLAIS L, MELNINKAITIS A, et al.. Investigation of laser damage in single layer coatings with pulse durations from 45fs to 24 ps[J]. Proceedings of SPIE-The International Society for Optical Engineering, 2010, 7842:78420K-1-7. http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=CC0212424381
|
[39] |
GALLAIS L, MANGOTE B, COMMANDRE M, et al.. Transient interference implications on the subpicosecond laser damage of multidielectrics[J]. Applied Physics Letters, 2010, 97(5):051112-1-3. http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=e38d4345bf8ca7e5173436caa1134f5c
|
[40] |
FIELD E S, BELLUM J C, KLETECKA D E. Laser damage comparisons of broad-bandwidth, high-reflection optical coatings containing TiO2, Nb2O5, or Ta2O5 high index layers[J]. Optical Engineering, 2013, 8885:88851X-1-8. http://d.old.wanfangdata.com.cn/NSTLQK/NSTL_QKJJ022223153/
|
[41] |
BELLUM J, FIELD E, KLETECKA D, et al.. Reactive ion-assisted deposition of e-beam evaporated titanium for high refractive index TiO2 layers and laser damage resistant, broad bandwidth, high-reflection coatings[J]. Applied Optics, 2014, 53(4):A205-A211. doi: 10.1364/AO.53.00A205
|
[42] |
BELLUM J C, WINSTONE T B, FIELD E S, et al.. Broad bandwidth high reflection coatings for petawatt class lasers:femtosecond pulse laser damage tests, and measurement of group delay dispersion[J]. SPIE LASE, 2017, 10084:100840J-1-10. doi: 10.1117/12.2267809
|
[43] |
ZHANG J, BU X, JIAO H, et al.. Laser damage properties of broadband low-dispersion mirrors in sub-nanosecond laser pulse[J]. Optics Express, 2017, 25(1):305-312. doi: 10.1364/OE.25.000305
|
[44] |
刘晓凤, 李大伟, 李笑, 等.电子束蒸发制备HfO2/SiO2高反膜的1064 nm激光预处理效应[J].中国激光, 2009, 36(6):1545-1549. http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=zgjg200906044
LIU X F, LI D W, LI X, et al.. 1064 nm Laser conditioning effect of HfO2/SiO2 high reflector deposited by E-beam[J]. Chinese Journal of Lasers, 2009, 36(6):1545-1549.(in Chinese) http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=zgjg200906044
|
[45] |
刘杰, 张伟丽, 朱美萍.532 nm HfO2/SiO2高反膜的激光预处理效应[J].强激光与粒子束, 2015, 27(3):254-259. http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=qjgylzs201503034
LIU J, ZHANG W L, ZHU M P. Laser conditioning effect of HfO2/SiO2 high reflectors on 532 nm[J]. High Power Laser and Particle Beams, 2015, 27(3):254-259.(in Chinese) http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=qjgylzs201503034
|
[46] |
吴倩, 罗晋, 潘峰.后处理对HfO2薄膜光学特性及抗激光损伤阈值的影响[J].光学精密工程, 2016, 24(12):3000-3004. http://d.old.wanfangdata.com.cn/Periodical/gxjmgc201612017
WU Q, LUO J, PAN F. Effects of posttreatments on optical properties and laser induced damage threshold of HfO2 thin films[J]. Opt. Precision Eng., 2016, 24(12):3000-3004.(in Chinese) http://d.old.wanfangdata.com.cn/Periodical/gxjmgc201612017
|
[47] |
刘志超, 郑轶, 潘峰, 等.1064 nm激光预处理对HfO2/SiO2反射膜损伤形态转化影响研究[J].红外与激光工程, 2017, 46(6):56-62. http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=hwyjggc201706011
LIU ZH CH, ZHENG Y, PAN F, et al.. Effect of 1064 nm laser conditioning on damage morphology change process on HfO2/SiO2 reflective film[J]. Infrared and Laser Engineering, 2017, 46(6):56-62.(in Chinese) http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=hwyjggc201706011
|
[48] |
占美琼.提高光学薄膜激光损伤阈值的途径[J].上海第二工业大学学报, 2010, 27(4):304-308. doi: 10.3969/j.issn.1001-4543.2010.04.008
ZHAN M Q. Enhancement of the LIDT of optical coatings[J]. Journal of Shanghai Second Polytechnic University, 2010, 27(4):304-308.(in Chinese) doi: 10.3969/j.issn.1001-4543.2010.04.008
|
[49] |
王永忠, 张云洞, 熊胜明.提高强激光反射镜镀膜损伤阈值的激光后处理技术及机理探讨[J].强激光与粒子束, 1994, 6(2):297-302. http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=QK199400370496
WANG Y ZH, ZHANG Y D, XIONG SH M. A new approach to enhance damage threshold of laser mirror for high power applications and its mechanism studies[J]. High Power Laser and Particle Beams, 1994, 6(2):297-302.(in Chinese) http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=QK199400370496
|
[50] |
JENA S, TOKAS R B, RAO K D, et al.. Annealing effects on microstructure and laser-induced damage threshold of HfO2/SiO2 multilayer mirrors[J]. Applied Optics, 2016, 55(22):6108-6114. doi: 10.1364/AO.55.006108
|
[51] |
TAN T T, LIU B J, WU Z H, et al.. Annealing effects on structural, optical properties and laser-induced damage threshold of MgF2, thin films[J]. Acta Metallurgica Sinica(English Letters), 2017, 30(1):73-78. doi: 10.1007/s40195-016-0479-x
|
[52] |
JENA S, TOKAS R B, THAKUR S, et al.. Influence of annealing on optical, microstructural and laser induced damage properties of TiO2/SiO2 multilayer high reflection mirror[C]. 61st Dae Solid State Physics Symposium, 2017, 1832(1): 4356-4364.
|
[53] |
FEIT A M D, RUBENCHIK A M. Influence of subsurface cracks on laser-induced surface damage[J]. Proceedings of SPIE-The International Society for Optical Engineering, 2003, 5273:264-272. http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=CC026380097
|
[54] |
刘晓凤, 李笑, 赵元安, 等.SiO2保护膜对高反膜激光损伤特性的改善[J].强激光与粒子束, 2010, 22(12):2860-2864. http://d.old.wanfangdata.com.cn/Periodical/qjgylzs201012016
LIU X F, LI X, ZHAO Y A, et al.. Damage characteristic improvement of high reflectors by SiO2 overlayer[J]. High Power Laser and Particle Beams, 2010, 22(12):2860-2864.(in Chinese) http://d.old.wanfangdata.com.cn/Periodical/qjgylzs201012016
|
[55] |
刘凤娟, 周曙, 秦娟娟, 等.248 nm高反膜抗激光损伤性能[J].强激光与粒子束, 2014, 26(8):77-80. http://d.old.wanfangdata.com.cn/Periodical/qjgylzs201408015
LIU F J, ZHOU SH, QIN J J, et al.. Laser damage resistance of 248 nm HR films[J]. High Power Laser and Particle Beams, 2014, 26(8):77-80.(in Chinese) http://d.old.wanfangdata.com.cn/Periodical/qjgylzs201408015
|
[56] |
TATENO R, OKADA H, OTOBE T, et al.. Negative effect of crystallization on the mechanism of laser damage in HfO2/SiO2 multilayer[C]. Microopics Conference. IEEE, 2011, 112(12): 123103-1-3.
|
[57] |
MIKAMI K, MOTOKOSHI S, JITSUNO T, et al.. A theoretical analysis for temperature dependences of laser-induced damage threshold[J]. SPIE Laser Damage, 2013, 8885:88851T-1-9. http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=CC0214296171
|
[58] |
XU C, JIA J, YANG D, et al.. Nanosecond laser-induced damage at different initial temperatures of Ta2O5 films prepared by dual ion beam sputtering[J]. Journal of Applied Physics, 2014, 116(5):854-863. http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=7227fe42f9778879f45d2fcb7247cd50
|
[59] |
李石周.MgF2/TiO2双层减反射薄膜的研究[D].云南: 云南师范大学, 2014.
LI SH ZH. Study on MgF2/TiO2 double-layer antireflection film[D]. Yunnan: Yunnan Normal University, 2014.(in Chinese)
|
[60] |
FIELD E S, BELLUM J C, KLETECKA D E. How reduced vacuum pumping capability in a coating chamber affects the laser damage resistance of HfO2/SiO2 antireflection and high-reflection coatings[J]. Optical Engineering, 2015, 456(1):963219-1-10. http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=be795391e6c39066d5ac1e9a174e8dec
|
[61] |
程勇, 陆益敏, 唐璜, 等.光学薄膜抗激光损伤研究发展[J].强激光与粒子束, 2016, 28(7):1-9. http://d.old.wanfangdata.com.cn/Periodical/qjgylzs201607001
CHENG Y, LU Y M, TANG H, et al.. Researches on laser damage resistance of optical films[J]. High Power Laser and Particle Beams, 2016, 28(7):1-9.(in Chinese) http://d.old.wanfangdata.com.cn/Periodical/qjgylzs201607001
|
[62] |
朱美萍, 孙建, 张伟丽, 等.高性能偏振膜的研制[J].光学精密工程, 2016, 24(12):2908-2915. http://d.old.wanfangdata.com.cn/Periodical/gxjmgc201612004
ZHU M P, SUN J, ZHANG W L, et al..Development of high performance polarizer coatings[J]. Opt. Precision Eng., 2016, 24(12):2908-2915.(in Chinese) http://d.old.wanfangdata.com.cn/Periodical/gxjmgc201612004
|
[63] |
JIAO H, CHENG X, SHEN Z, et al.. Study of laser induced damage of high reflector at 1064 nm[J]. Proceedings of SPIE-The International Society for Optical Engineering, 2010, 7842:784205-1-10. http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=CC0212424342
|
[64] |
MENDE M, JENSEN L O, EHLERS H, et al.. Laser-induced damage of pure and mixture material high reflectors for 355nm and 1064nm wavelength[C]. Conference on Advances in Optical Thin Films IV, 2011, 8168: 816821-1-11
|
[65] |
詹光达, 马彬, 张艳云, 等.预处理效应对1064 nm反射膜本征损伤性能的影响[J].红外与激光工程, 2014, 43(6):1715-1721. doi: 10.3969/j.issn.1007-2276.2014.06.004
ZHAN G D, MA B, ZHANG Y Y, et al.. Influence of laser conditioning effects on intrinsic damage property of high reflection film at 1064 nm[J]. Infrared and Laser Engineering, 2014, 43(6):1715-1721.(in Chinese) doi: 10.3969/j.issn.1007-2276.2014.06.004
|
[66] |
BOTHA R, THONY S S, GROSS L M, et al.. Comparative study of the laser damage threshold and optical characteristics of Ta2O5-SiO2 multilayers deposited using various methods[C]. Laser-Induced Damage in Optical Materials, 2015, 9632: 963203-1-10.
|
[67] |
SCHILTZ D, PATEL D, BAUMGARTEN C, et al.. Strategies to increase laser damage performance of Ta2O5/SiO2 mirrors by modifications of the top layer design[J]. Appl. Opt., 2016, 56(4):C136-C139. http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=c9a09fdaf6cbe262feaa2a424d594e3a
|