一种自适应安装的高精度图像式角位移测量装置

于海; 万秋华; 孙莹; 卢新然; 贾兴丹

doi:10.3788/CO.2019-0107

Volume 13 Issue 3

Jun. 2020

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Chinese Optics > 2020 > 13(3): 510-516.

YU Hai, WAN Qiu-hua, SUN Ying, LU Xin-ran, JIA Xing-dan. A high precision image angular displacement measurement device with self-adaptive installation[J]. Chinese Optics, 2020, 13(3): 510-516. doi: 10.3788/CO.2019-0107

Citation:

YU Hai, WAN Qiu-hua, SUN Ying, LU Xin-ran, JIA Xing-dan. A high precision image angular displacement measurement device with self-adaptive installation[J]. Chinese Optics, 2020, 13(3): 510-516. doi: 10.3788/CO.2019-0107

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A high precision image angular displacement measurement device with self-adaptive installation

doi: 10.3788/CO.2019-0107

YU Hai^{1
,
,},
WAN Qiu-hua¹,
SUN Ying¹,
LU Xin-ran¹,
JIA Xing-dan^{1, 2}

1.
Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China
2.
University of Chinese Academy of Sciences, Beijing 100049, China

Funds: Supported by National Natural Science Foundation of China (No. 51605465); Science and Technology Development Programme of Jilin Province (No. 20180520184JH)

More Information

Corresponding author: yuhai@ciomp.ac.cn
Received Date: 17 May 2019
Rev Recd Date: 16 Jul 2019
Publish Date: 01 Jun 2020

Abstract

Abstract

The angular displacement measurement technology based on image detector is a hot research to realize high-precision and high-resolution angular displacement measurement. In order to improve the robustness of the angular displacement measuring devices, a high precision image displacement measurement device with self-adaptive installation techniques is designed in this paper. The installation and adjustment processes are very simple, and high resolution and high precision measurement output can be guaranteed in the presence of eccentricity in the calibration grating. Firstly, the angle measurement device using dual linear imaging sensors is proposed and a single-ring absolute grating is designed. Then, a high-resolution subdivision algorithm based on a centroid algorithm is used to subdivide the image, and dual linear image sensors are used to compensate for the angle measurement error. Finally, an experimental device is designed to test the performance of the adaptive installation. Experiments show that when the eccentricity of the grating is within ±1 mm, the designed device can achieve highly precise angular displacement measurements with high resolution. The device designed in this paper guarantee the output accuracy when the grating has an installation eccentricity of ±1 mm, which lays a foundation for improving the adaptability of small angular displacement measuring devices.
- angular displacement measurement,
- error compensation,
- dual image sensors,
- self-adaptive installation

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References(16)

References

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