Weighted least square phase extraction algorithm for phase-shifting point diffraction interferometer

[1] BRUNING J H,SCHREIBER H. Optical Shop Testing[M]. 3rd edition. Hoboken:A John Wiley & Sons,2007. [2] BRUNING J H,HERRIOTT D J,BALLAGHER J E,et al.. Digital wavefront measuring interferometer for testing optical surface and lenss[J]. Appl. Opt.,1974,13(11):2693-2703. [3] SOMMARGREN G E. Phase shifting diffraction interferometry for measure extreme ultraviolet optics[J]. OSA Trends Opt. Photonics,1999,4:108-112. [4] NOVAK J. Five-step phase-shifting algorithms with unknown values of phase shift[J]. Optik,2003,2(114):63-68. [5] NOVAK J,NOVAK P,MIKS A. Multi-step phase-shifting algorithms insensitive to linear phase shift errors[J]. Opt. Communications,2008,281:5302-5309. [6] TANG SH H. Generalized algorithm for phase shifting interferometry[J]. SPIE,1996,2860:34-44. [7] CAI L Z,LIU Q,YANG X L. Phase-shift extraction and wave-front reconstruction in phase-shifting interferometry with arbitrary phase steps[J]. Opt. Lett.,2003,28(19):1808-1810. [8] CAI L Z,LIU Q,YANG X L. Generalized phase-shifting interferometry with arbitrary unknown phase steps for diffraction objects[J]. Opt. Lett.,2004,29(2):183-185. [9] CREATH K. Error sources in phase-measuring interferometry[J]. SPIE, 1992,1720:428-435. [10] HARIHARAN P,OREB B F,EIJU T. Digital phase-shifting interferometry:a simple error-compensating phase calculation algorithm[J]. Appl. Opt.,1987,26(13):2504-2506. [11] SCHWIDER J,BUROW R,ELSSNER K-E,et al.. Digital wave-front measuring interferometry:some systematic error sources[J]. Appl. Opt.,1983,22(21):3421-3432. [12] 程万杰,赵杰,蔡鹤皋. CCD像素响应非均匀的校正方法[J]. 光学 精密工程 ,2008,16(2):314-318. CHENG W J,ZHAO J,CAI H G. Correction method for pixel response nonuniformity of CCD [J]. Opt. Precision Eng.,2008,16(2):314-318.(in Chinese) [13] PHILLION D W. General methods for generating phase-shifting interferometry algorithms[J]. Appl. Opt.,1997,36(31):8098-8115. [14] BROPHY P. Effect of intensity error correlation on the computed phase of phase-shifting interferometry[J]. Opt. Soc. Am. A,1990,7(4):537-541.