Citation: | ZHANG Hai-Tao. Modeling for phase shifting point diffraction interferometer based on lens design software[J]. Chinese Optics, 2010, 3(6): 616-622. |
[1] SMARTT R N,STRONG J. Point-diffraction interferometer[J]. J. Opt. Soc. Amer,1972,62:734-737.
[2] KADONO H,TAKAI N,ASAKURA T. New common-path phase shifting interferometer using a polarization technique[J]. Appl. Opt.,1987,26(5):898-904.
[3] NEAL M J. Polarization phase-shifting point-diffraction interferometry for measure extreme ultraviolet optics[J]. OSA Trends Opt. Photonics,1999,4:108-112.
[4] 刘国淦,张学军,王权陡,等. 光纤点衍射干涉仪的技术研究[J]. 光学 精密工程 , 2001,9(2):142-145. LIU G G,ZHANG X J,WANG Q D,et al.. Fiber point diffraction interferometer[J]. Opt. Precision Eng.,2001,9(2):142-145.(in Chinese)
[5] CHEN L F,NIE L,ZHOU T G,et al.. Research on the fiber point diffraction interferometer for spherical figure measurement[J]. SPIE,2008,6357:63574J.
[6] 李艳秋,刘克. 相移点衍射干涉仪的关键技术研究[J]. 激光与光电子学进展 ,2010,47(1):011201. LI Y Q,LIU K. Core techniques of phase-shifting point diffraction interferometer[J]. Laser Optoelectronics Progress,2010,47(1):011201.(in Chinese)
[7] STONE B D. Modeling interferometers with lens design software[J]. Opt. Eng.,2000,39(7):1748-1759.
[8] STONE B,THOMPSON K P. Modeling interferometers with lens design software:beyond ray-based approaches[J]. SPIE,2009,7427:74270A.
[9] GONG Q,GEARY J M. Modeling point diffraction interferometers[J]. Opt. Eng.,1996,35(2) 351-356.
[10] OTAKI K,ZHU Y,ISHIJ M,et al.. Rigorous wavefront analysis of the visible-light point diffraction interferometer for EUVL[J]. SPIE,2004,5193:182-190.
[11] OTAKI K,BONNEAU F,ICHIHARA Y. Absolute measurement of spherical surface by point diffraction interferometer[J]. SPIE,1999,3740:602-605.
[12] JOHNSON M A,PHILLION D W,SOMMARGREN G E,et.al.. Construction and testing of wavefront reference sources for interferometry of ultra-precise imaging systems[J]. SPIE,2005,5869:58690P.
|