Volume 3 Issue 6
Dec.  2010
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CAO Yanbo, AI Hua. Calculation of vectorial diffraction efficiency of subwavelength blazed gratings[J]. Chinese Optics, 2010, 3(6): 679-683.
Citation: CAO Yanbo, AI Hua. Calculation of vectorial diffraction efficiency of subwavelength blazed gratings[J]. Chinese Optics, 2010, 3(6): 679-683.

Calculation of vectorial diffraction efficiency of subwavelength blazed gratings

  • Received Date: 21 Jul 2010
  • Rev Recd Date: 23 Sep 2010
  • Publish Date: 20 Dec 2010
  • The vectorial diffraction numeric algorithm, Rigorous Coupled Wave Analysis(RCWA), was introduced, and it was used to calculate the diffraction efficiency of a subwavelength blazed grating precisely and to investigate the diffraction characteristics. Firstly, the electromagnetic medium model was created, and the irregular structure was simplified into a multi-layer rectangle grating. The rigorous coupled wave equation among the electromagnetic field was built, and the electromagnetic distribution based on the boundary conditions was solved. After that, enhanced transmittance matrix approach was employed to iterate the results between layers, and finally the diffraction efficiency of the whole structure was solved. Calculated results show that the diffraction efficiency of aluminium film grating with the blazed angle of 11.3 and a period of 500 nm is higher than 90% and can also offer a relative blazed order. This numerical vectorial diffraction algorithm has a good precision and wider applications in the calculation of the high and compact complicated grating.

     

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