Laser mask micromachining system based on beam-scanning widening technique

Based on a Nd∶KGW laser, a beam-scanning widening technique and a mask micro-imaging method, a laser mask micromachining system is developed to applied to the micro-marking, carving and forming of miniature workpieces. The plastic film printed by a computer or the liquid crystal are used as masks in the system, and the beam-scanning area(effective mask area) is determined as 30 mm30 mm. The focal lengths of micro-imaging system are selected as 100 mm and 50 mm, which scale down 8~10 and 15~20 times, respectively. The processing size and precision of the system are analyzed, and results indicate that both the minimum marking width and graphic precision of the micromachining system are 10 m, which is consistent with the analysis results. The processing depth of a single laser pulse is 0.07~0.1 m, and the maximum processing depth is 200 m. The micromachining system satisfies the basic requirements of industrial micromachining technology.