Development of a large-aperture wide-angle reflector for triple-band infrared applications
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摘要:
多波段红外探测器可同步获取多波段辐射信息，在目标识别、分类、测温及信息提取等方面显著优于单波段红外探测器，因而成为红外探测器核心研究方向之一。三波段大口径宽角度红外反射镜作为多波段红外探测器的关键光学元件，其性能优劣直接决定探测精度。在设计阶段，本文选用Ge、ZnS和YbF3三种材料，基于高反射膜的设计理论，通过光谱叠加法结合TFCalc软件优化获得结构合理的红外反射镜膜系。在制备阶段，采用离子源辅助沉积，通过优化沉积工艺解决了膜层脱落的问题。在光谱测试阶段，通过膜厚误差实验和YbF3工艺实验解决了样品光谱漂移的现象。测试结果表明，该红外反射镜在45°入射时，3~5 µm波段平均反射率为96.93%；8~12 µm波段平均反射率为96.54%；1.064 µm反射率为94.64%，在270 mm×270 mm口径内3~5 µm、8~12 µm波段的光谱非均匀性为4.83%。参照国标GJB 2485A-2019作为环境测标准，所制备样品成功通过附着力测试和高低温测试，满足多波段红外探测器的使用要求。
Abstract:Multi-band infrared detectors can simultaneously capture radiation information across multiple wavelengths, offering significant advantages over single-band infrared detectors in target recognition, classification, temperature measurement, and information extraction. Consequently, they have become a central focus of infrared detector technology research. As a key optical component of multi-band infrared detectors, the performance of the three-band large-aperture wide-angle infrared mirror directly determines detection accuracy. In the design phase, this study selected three materials: Ge, ZnS, and YbF3, based on high-reflectivity coating design principles, and optimized a structurally robust infrared reflector coating system through spectral superposition combined with TFCalc software. During the preparation stage, ion-source-assisted deposition was employed, and the issue of film delamination was resolved by optimizing the deposition process. During spectral testing, problems related to spectral drift in the samples were addressed through film thickness error experiments and optimization of the YbF3 process. Test results indicate that, at an incident angle of 45°, the infrared mirror achieves an average reflectance of 96.93% in the 3−5 µm spectral band, 96.54% in the 8−12 µm spectral band, and 94.64% in the 1.064 µm spectral band, the spectral non-uniformity within the 270 mm×270 mm aperture for the 3−5 µm and 8−12 µm spectral bands is 4.83%. In accordance with the national standard GJB 2485A-2019 (Environmental Test Standard), the prepared samples successfully passed adhesion and high and low temperature tests, meeting the application requirements for multi-band infrared detectors.
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图 4 基板镀膜前和脱膜后光谱对比图
Figure 4. Spectral comparison plot before and after substrate coating removal
图 5 拉膜后各样品光谱与第一层设计光谱对比图
Figure 5. Spectra of each sample after pulling film were compared with the first layer design spectra
图 6 拉膜后样品光谱与前32层设计光谱对比图
Figure 6. Spectra of sample after pulling film were compared with the first 32 layers design spectrum
图 8 水煮实验前后1.064 μm光谱对比图
Figure 8. Comparison plot of 1.064 μm spectra before and after boiling treatment
图 9 Ge-ZnS膜层设计与测试光谱对比图
Figure 9. Comparison plot of Ge-ZnS film design and test spectrum
图 10 ZnS-YbF3膜层设计与测试对比图
Figure 10. Comparison plot of ZnS-YbF3 film design and test spectrum
图 11 Ge-ZnS水煮实验前后光谱对比图
Figure 11. Comparison plot of Ge-ZnS film spectra before and after boiling experiment
图 12 ZnS-YbF3水煮实验前后光谱对比图
Figure 12. Comparison plot of ZnS-YbF3 film spectra before and after boiling experiment
图 13 YbF3膜层水煮实验前后光谱图
Figure 13. Comparison plot of YbF3 film spectra before and after boiling experiment
图 15 1.064 μm水煮实验前后光谱对比图
Figure 15. Comparison plot of the 1.064 μm spectrum before and after boiling experiment
图 14 红外反射镜样品测试与设计对比图
Figure 14. Comparison plot of infrared mirror sample testing and design
表 1 红外反射镜的技术指标
Table 1. Technical specifications of infrared mirror
参数 规格 入射角 30°~60° 30°~60° 30°~60° 波长范围 1.064 μm 3~5 μm 8~12 μm 反射率 >93% >93% >93% 非均匀性 - 5% 5% 
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表 2 Ge、ZnS和YbF3沉积工艺参数
Table 2. Deposition process parameters of Ge, ZnS and YbF3
材料 沉积速率
/(nm∙s−1)本底真空
/(×10−4Pa)转速
/(rad∙min−1)沉积温度
/°CGe 0.4 5 25 150 ZnS 1.5 5 25 150 YbF3 0.5 5 25 150
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表 3 第一层离子源工艺参数表
Table 3. Process parameters table of first-layer ion source
样品编号 膜层 阳极电压/V 离子束电流/A 1# Ge 80 0.4 2# 100 0.5 3# 120 0.4 4# 150 0.5
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表 4 YbF3材料离子源工艺参数
Table 4. Process parameters of YbF3 material ion source
样品编号 材料 阳极电压/V 离子束电流/A 1# YbF3 100 1 2# 150 2 3# 200 3
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