射频波导CO<sub>2</sub>激光放大技术

董祝君; 张冉冉; 周益平; 曾文彬; 赵崇霄; 黄盼; 郭劲; 陈飞; 潘其坤

doi:10.37188/CO.2025-0113

射频波导CO₂激光放大技术

doi: 10.37188/CO.2025-0113

cstr: 32171.14.CO.2025-0113

董祝君^{1, 2,},
张冉冉^{1, 2,},
周益平^{1, 2, ,},
曾文彬^{1, 2},
赵崇霄^{1, 2},
黄盼^{1, 2},
郭劲^{1, 2,},
陈飞^{1, 2,},
潘其坤^{1, 2,}

1.
中国科学院长春光学精密机械与物理研究所, 吉林长春 130033
2.
中国科学院大学, 中国北京 100049

基金项目: 国家自然科学基金（No. 62405313，No. 62335016，No. 12305222）；中国科学院战略先导科技专项（No. XDA 0380200）；中国科学院青年创新促进会（No. 2021216）

详细信息

作者简介:
董祝君（1999—），男，河北唐山人，中国科学院长春光学精密机械与物理研究所光学工程学术型硕士在读，主要从事射频波导脉冲CO₂激光放大器方面的研究。E-mail：dongzhujun1234@163.com

张冉冉（1994—），男，山东济宁人，博士，助理研究员，主要从事噪声光隔离系统、脉冲CO₂激光放大、激光诱导等离子体极紫外光源等方面的研究。E-mail：zhangrrciomp@163.com

周益平（1993—），男，黑龙江哈尔滨人，博士，助理研究员，主要从事高功率脉冲激光技术、激光诱导等离子体极紫外光源等方面的研究。E-mail：zhouyiping2020@126.com

曾文彬(1993-)，男，江西抚州人，博士，助理研究员，主要从事系统可靠性、脉冲CO₂激光放大、激光诱导等离子体极紫外光源等方面的研究。E-mail: zengwenbin@ciomp.ac.cn

赵崇霄(1993-)，男，辽宁沈阳人，博士，助理研究员，主要从事等离子体放电、辉光放电技术、激光诱导等离子体极紫外光源等方面的研究。E-mail: zhaochongxiao@ciomp.ac.cn

黄盼(2000-)，男，江西抚州人，硕士，助理研究员，主要从事射频激励轴快流CO₂激光器辉光放电技术等方面的研究。E-mail: 1731876930@qq.com

郭劲(1964-)，男，吉林长春人，博士，研究员，博士生导师，主要从事大型光电装备总体技术等方面的研究。E-mail: guojin@ciomp.ac.cn

陈飞(1982-)，男，河南南阳人，博士，研究员，博士生导师，主要从事激光技术及应用、高功率气体激光、新型激光技术等方面的研究。E-mail: feichenny@126.com

潘其坤(1985-)，男，河南开封人，博士，博士生导师，主要从事新型激光器技术、激光诱导等离子体极紫外光源、固体激光器等方面的研究。E-mail: panqikun2005@163.com

中图分类号: TN248.2
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出版历程
- 收稿日期: 2025-09-01
- 录用日期: 2025-10-14
- 网络出版日期: 2026-02-09

Research on RF waveguide CO₂ laser amplification technology

DONG Zhu-jun^{1, 2
,},
ZHANG Ran-ran^{1, 2
,},
ZHOU Yi-ping^{1, 2
, ,},
ZENG Wen-bin^{1, 2},
ZHAO Chong-xiao^{1, 2},
HUANG Pan^{1, 2},
GUO Jin^{1, 2
,},
CHEN Fei^{1, 2
,},
PAN Qi-kun^{1, 2
,}

1.
Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China
2.
University of Chinese Academy of Sciences, Beijing 100049, China

Funds: Supported by National Natural Science Foundation of China (No. 62405313, No. 62335016, No.12305222); The Strategic Priority Research Program of the Chinese Academy of Sciences (No. XDA 0380200); Youth Innovation Promotion Association, CAS (No. 2021216)

More Information

Corresponding author: zhouyiping2020@126.com

摘要

摘要:
面向极紫外光刻光源对高功率、高光束质量CO₂种子激光的应用需求，本文开展了基于射频波导体制的CO₂激光放大技术研究。一方面，分析了射频波导放大器的静态插入损耗与输出光束质量随入射光参数的变化关系，确定了最佳模式匹配参数。另一方面，建立了多级射频波导放大仿真模型，理论计算了工作气压与放电泵浦功率等参数对放大倍率的影响规律，在实验上，引入增益介质调控技术，实现了激光系统放大性能的优化。实验结果表明：在2.5 m的波导长度下，传输效率达到了91.4%，输出光束在水平方向与竖直方向上的光束质量因子分别为1.03与1.05；二级射频波导放大系统的总放大倍率达到了68倍，最终获得了重复频率50 kHz、脉冲宽度20 ns、平均功率17.1 W、高光束质量的CO₂激光输出。
- CO₂激光 /
- 主振荡功率放大 /
- 模式匹配 /
- 增益介质调控
Abstract:
Toward the application demand for high-power, high-beam-quality CO₂ seed lasers in extreme ultraviolet lithography light sources, the amplification characteristics were investigated based on a RF waveguide architecture. The static insertion loss and output beam quality of the RF waveguide amplifier were measured as function of incident beam parameters. A numerical model was developed to simulate the multi-stage RF waveguide amplification and to evaluate the effects of the gas pressure and the discharge pumping power on gain. The technology of regulating with gain medium was implemented to optimize the amplification performance in the experiment. Experimentally, optimal mode-matching conditions were identified with a waveguide length of 2.5 m, yielding a transmission efficiency of 91.4%. The beam quality factors of the output beam in the horizontal and vertical directions were 1.03 and 1.05, respectively. An overall gain factor of 68× was achieved in a dual-stage RF waveguide amplifier. The system delivered CO₂ laser emission with a repetition rate of 50 kHz, a pulse duration of 20 ns, and an average output power of 17.1 W, satisfying the design criteria and demonstrating its suitability for high-power, high-beam-quality seed laser applications.
- CO₂ laser /
- master oscillator power amplifier /
- mode-matching /
- gain medium regulation

HTML全文

图 1 射频波导放大器结构

Figure 1. Structure of the RF waveguide amplifier

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图 2 二级放大系统实验装置

Figure 2. Secondary amplification system experimental setup

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图 3 传输效率随入射光束直径的变化，插图为输出光束强度分布图

Figure 3. The transmission efficiency varies with the diameter of the incident light beam, the illustration shows the distribution of the output light beam intensity

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图 4 光束质量因子测量结果。（a）光束质量因子随入射光束直径的变化关系；（b）入射直径为2 mm时测量结果，插图为光束强度分布图

Figure 4. Measurement results of the beam quality factor. (a) Relationship between the beam quality factor and the diameter of the incident beam; (b) Measurement results when the incident diameter is 2 mm, with the inset showing the beam intensity distribution

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图 5 不同腔压下放大系统输出功率随泵浦放电功率的变化

Figure 5. Output power of the amplification system varies with the discharge pumping power at different cavity pressures

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图 6 不同腔压下输出功率随放电泵浦功率的变化。（a）第一级；（b）第二级

Figure 6. Variation of output power with discharge pumping power at different cavity pressures. (a) First stage; (b) Second stage

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