Study on the transmission characteristics of Silicon-Based grating-type fabry-perot-microring coupled resonators
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摘要:
本文针对一种由微环谐振腔与法布里-珀罗腔耦合构成的集成结构，开展了传输光谱特性的理论与实验研究。该结构通过在单边耦合型微环的直波导中引入光栅反射镜形成法布里-珀罗腔，在双谐振结构中实现了新颖的多腔耦合传输谱形。成功建立系统理论模型后，分析了多腔耦合传输谱形出现的条件并进行了器件参数优化。在硅基芯片上成功制备了光栅型法布里珀罗-微环耦合谐振腔器件，首次观测到与理论预测一致的多腔耦合传输谱形，包括嵌套类电磁感应透明和双法诺共振线形。实验结果表明，在3.43 dB/cm的波导损耗条件下，电磁感应透明的中心峰可实现1.40×104的品质因子,双法诺共振的斜率最高可达到37.70 dB/nm。研究结果为集成光子耦合谐振系统的机理理解提供了新视角，并为实现高集成度、高性能的光子器件平台提供了可行技术路径，在高灵敏光学传感、窄带滤波及高速调制等领域具有重要的应用潜力。
Abstract:This paper presents comprehensive theoretical and experimental investigations on the transmission spectral characteristics of an integrated photonic structure consisting of a microring resonator coupled with a Fabry–Perot (FP) cavity. The FP cavity is realized by introducing a grating reflector into the straight waveguide of a single-side-coupled microring. Within this dual-resonator configuration, novel multi-cavity coupled transmission spectra are achieved. A systematic theoretical model is established to analyze the conditions under which these multi-cavity coupled spectral profiles appear, and the structural parameters are subsequently optimized. A grating-type Fabry–Perot–microring coupled resonator device was successfully fabricated on a silicon-on-insulator (SOI) platform. For the first time, multi-cavity coupled transmission spectra consistent with theoretical predictions were experimentally observed, including nested electromagnetically induced transparency (EIT)-like and double Fano resonance line shapes. Experimental measurements indicate that, under a waveguide loss of 3.43 dB/cm, the EIT central peak exhibits a quality factor of 1.40×104, while the slope of the double Fano resonance reaches 37.70 dB/nm. These results provide new insight into the underlying mechanisms of integrated photonic coupled resonator systems and demonstrate a viable approach toward highly integrated, high-performance photonic device platforms. The proposed structure shows strong potential for applications in high-sensitivity optical sensing, narrowband filtering, and high-speed modulation.
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图 2 微环处于不同耦合状态的FP-MR结构的透射谱。（a） 微环处于前耦合状态（tMR=0.03、tMR=0.06）与临界耦合状态（tMR=0.10）；（b） 微环处于过耦合状态
Figure 2. Transmission spectra of the FP-MR structure for different microring coupling regimes. (a) Under-coupled (tMR = 0.03, 0.06) and critically coupled (tMR = 0.10); (b) Over-coupled
图 3 波导损耗3 dB/cm时，不同FP腔反射系数下中心透射峰性能随微环耦合系数的变化。（a） Q值；（b） 消光比
Figure 3. Performance of the central transmission peak versus the microring coupling coefficient at a waveguide loss of 3 dB/cm for different FP cavity reflection coefficients. (a) Q factor; (b) extinction ratio (ER)
图 4 微环耦合系数为0.6时，不同波导损耗下中心透射峰性能随微环耦合系数的变化。（a） Q值；（b） 消光比
Figure 4. Performance of the central transmission peak under different waveguide losses, as a function of the microring coupling coefficient, with tMR=0.6. (a) Q factor; (b) extinction ratio. (ER)
图 5 光栅FP-MR几何参数。（a） 截面图；（b） 俯视图
Figure 5. Geometrical parameters of the grating-type MR–FP. (a) cross-sectional view; (b) top view
图 6 锥形波导示意图与端面模场图
Figure 6. Schematic of the tapered waveguide and the end-facet mode field distribution.
图 9 曝光后不同温度烘烤的侧壁表征
Figure 9. Sidewall characterization after post-exposure baking at different temperatures.
图 10 FP-MR器件电镜图。（a） 微环侧壁；（b） 光栅反射结构
Figure 10. Scanning electron microscope images of the MR–FP device. (a) microring sidewall; (b) grating reflector structure
图 12 使用透镜光纤耦合得到的透射谱
Figure 12. Transmission spectra of the FP cavity measured with Lensed-fiber coupling
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