微区域角分辨光谱测量系统

吴祖伟; 高云; 朱鹏飞; 章文卓; 王磊

doi:10.37188/CO.2025-0148

微区域角分辨光谱测量系统

doi: 10.37188/CO.2025-0148

cstr: 32171.14.CO.2025-0148

吴祖伟^{1, 2,},
高云^{2, 3},
朱鹏飞²,
章文卓^{1, 2, ,},
王磊^2, ,

1.
泉州工艺美术职业学院陶瓷工程学院, 福建泉州 362500
2.
厦门大学萨本栋微米纳米科学技术研究院, 福建厦门 361102
3.
安庆师范大学智能感知与计算高等学校重点实验室, 安徽安庆 246133

基金项目: 福建省中青年教师教育科研项目（科技类）（No. JAT241360）；安徽省教育厅青年科学项目（No. 2025AHGXZK40354）；厦门市产学研项目（No. 2024CXY0110）

详细信息

作者简介:
吴祖伟（1997—），男，福建泉州人，助教，2024年于厦门大学获得硕士学位，主要从事机器视觉与光学测量方面的研究。E-mail：wuzuwei97@126.com

章文卓（2000—），女，福建三明人，助教，2024年于厦门大学获得硕士学位，主要从事机器视觉与数字电路方面的研究。E-mail：zhangwzxmu@163.com

王　磊（1977—），男，安徽合肥人，教授，博士生导师，2007年于合肥工业大学获得博士学位，主要从事机器视觉、智能制造、图像处理和光谱仪器方面的研究。E-mail：wanglei33@xmu.edu.cn

中图分类号: O433.1
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出版历程
- 收稿日期: 2025-11-28
- 录用日期: 2026-01-15
- 网络出版日期: 2026-02-10

Micro-Area Angle-Resolved Spectroscopy Measurement System

WU Zu-wei^{1, 2
,},
GAO Yun^{2, 3},
ZHU Peng-fei²,
ZHANG Wen-zhuo^{1, 2
, ,},
WANG Lei^{2
, ,}

1.
School of Ceramic Engineering, Quanzhou Arts and Crafts Vocational College, Quanzhou 362500, China
2.
Pen-Tung Sah Institute of Micro-Nano Science and Technology, Xiamen University, Xiamen 361102, China
3.
University Key Laboratory of Intelligent Perception and Computing, Anqing Normal University, Anqing 246133, China

Funds: Supported by Fujian Province Young and Middle-Aged Teachers Education Research Project (Science and Technology) (No. JAT241360); Youth Scientific Research Project (Natural Science) of the Education Department of Anhui Province (No. 2025AHGXZK40354); Xiamen Industry-University-Research Project (No. 2024CXY0110)

More Information

Corresponding author: zhangwzxmu@163.com; wanglei33@xmu.edu.cn

摘要

摘要:
为满足表面等离激元纳米结构的微区域光学响应研究需求，本文研制了一套基于同轴转臂的微区域角分辨光谱测量系统。该系统设计了一种基于有限共轭构型的微区域远程激发与收集光路模型，实现了以32 μm直径的微区域光斑入射；搭建了基于同轴转臂的角分辨机械系统，实现了6.9° 至90° 的大范围定向角度激发。性能测试表明，系统稳定性高，最小角度分辨率达0.12°。通过对一维光栅和二维周期纳米结构的反射光谱采集实验，进一步验证了系统的可靠性，证明了微区域光斑所带来的优势，为微纳结构的角分辨光谱表征提供了有效的技术手段。
- 微区域光斑 /
- 角分辨光谱测量 /
- 谱学仪器 /
- 表面等离激元
Abstract:
To meet the research requirements of the optical response of micro-area in surface plasmon nanostructures, this paper has develops a micro-area angle-resolved spectroscopy measurement system based on a coaxial rotating arm. The system adopts a micro-area remote excitation and collection optical path model based on a finite conjugate configuration, enabling an incident micro-area spot with a diameter of 32 μm. In addition, an angle-resolved mechanical system based on a coaxial rotating arm is constructed, realizing large-range directional angular excitation from 6.9° to 90°. Performance tests show that the system exhibits high stability, with a minimum angular resolution of 0.12°. Through the reflection spectrum collection experiments on one-dimensional gratings and two-dimensional periodic nanostructures, the reliability of the system is further verified. The results demonstrate the advantages of the micro-area spot and provide an effective technical means for the angle-resolved spectroscopy characterization of micro and nanostructures.
- micro-area light spot /
- angle-resolved spectroscopy measurement /
- spectroscopic instrument /
- surface plasmons

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图 1 微区域有限共轭光路模型示意图

Figure 1. Schematic of a finite-conjugate optical path model for a micro-area

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图 2 系统的光路模型

Figure 2. Optical path model of the proposed system

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图 3 光斑测量：(a)光学系统实物；(b)图像采集模块；(c)数字图像处理过程

Figure 3. Experimental spot measurement: (a) Optical system; (b) Image acquisition module; (c) Digital image processing workflow

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图 4 机械系统：(a)转臂、旋转与传动模块；(b)调节模块；(c)样品台模块；(d)校准模块；(e)系统实物图

Figure 4. Mechanical system: (a) Rotating arm, rotation and transmission module; (b) Adjustment module; (c) Sample stage module; (d) Calibration module; (e) System photograph

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图 5 系统框架：(a)各模块功能框架；(b)人机操作界面

Figure 5. System Framework: (a) Functional framework of each module; (b) Human-machine interface

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图 6 光功率测试模块：(a)光源稳定性测试模块；(b)信号收集稳定性测试模块

Figure 6. Optical power testing module: (a) Light source stability testing module; (b) Signal collection stability testing module

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图 7 系统的稳定性测试结果：(a)光源稳定性；(b)信号收集稳定性

Figure 7. Stability test results of the system: (a) Light source stability; (b) Signal collection stability

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图 8 角分辨率测试：(a)理论模型；(b)测试模块；(c)CV曲线

Figure 8. Angular resolution testing: (a) Theoretical model; (b) Testing module; (c) CV curve

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图 9 一维光栅实验：(a)银表面一维光栅角分辨光谱图；(b)银表面一维光栅角分辨强度图；(c)银表面一维光栅理论数值模拟结果；(d)金表面一维光栅角分辨光谱图；(e)金表面一维光栅角分辨强度图；(f)金表面一维光栅理论数值模拟结果

Figure 9. One-dimensional grating experiments: (a) Angle-resolved spectra on silver; (b) Angle-resolved intensity on silver; (c) Theoretical numerical simulation results on silver; (d) Angle-resolved spectra on gold; (e) Angle-resolved intensity on gold; (f) Theoretical numerical simulation results on gold

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图 10 反射光谱测量结果：(a)本系统测量结果；(b)椭偏仪测量结果；(c) FWHM的变化曲线

Figure 10. Reflectance spectrum measurement results: (a) Measurement results of the proposed system; (b) Measurement results of the ellipsometer; (c) FWHM variation curve

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表 1 光学系统型号表

Table 1. Optical system specifications

Items	Designation
Light source	HDL-II
Fiber for excitation	50 μm silica fiber
Fiber for collection	1000 μm silica fiber
Collimator	F239SMA-A
Polarizer	HC12N
Achromatic doublet lens	63-718
Objective lens	InfiniStix
Spectrometer	Andor Shamrock 303i

下载: 导出CSV

表 2 点列图数据

Table 2. Spot diagram data

视场	RMS Radius/μm	GEO Radius/μm
0°	13.556	29.153
0.707°	13.566	30.743
1°	13.578	31.582

下载: 导出CSV

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