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摘要:
针对高温环境下振动监测面临的传感器失效与信号失真问题，本文提出了一种全石英光纤法布里-珀罗高温振动传感器。设计了基于石英球透镜的准直耦合结构，实现了光纤与高温区振动敏感结构的一体化集成。利用微机电系统(MEMS)加工技术与热压键合技术实现传感器敏感单元批量化制备。采用三波长动态解调与光谱互相关解调相结合的方法，实现了对高温环境下振动信号的提取和温度补偿，消除了温度波动对振动灵敏度的干扰。实验结果表明，从室温（23 °C）至800 °C，传感器的灵敏度由1.051 nm/g降低到
0.8915 nm/g；经温度补偿后，传感器的残差平方和最大为0.168，全量程误非线性误差不大于1.033%；在动态响应测试中，该传感器的特征频率远高于6000 Hz，在100−2000 Hz的频率响应范围内表现出较高的平坦度，其灵敏度在2000 −6000 Hz之间逐渐增加，最大增量仅为0.177 nm/g。此外，传感器具有高一致性、全无胶化集成、抗电磁干扰等优点，为高温环境下的振动测量提供了一种新的解决思路，在高温振动领域具有广泛的应用前景。Abstract:To An all-silica fiber-optic Fabry-Perot (F-P) high-temperature vibration sensor is proposed to address sensor failure and signal distortion in extreme environments. A collimated coupling structure based on a silica ball lens enables integrated, non-contact signal transmission between the fiber and the sensitive structure. The sensitive units are batch-fabricated using MEMS and thermal pressure bonding technologies. By combining three-wavelength dynamic demodulation with spectral cross-correlation, precise vibration signal extraction and temperature compensation are achieved, effectively eliminating thermal cross-sensitivity. Experimental results indicate that as the temperature increases from room temperature (23 °C) to 800 °C, the sensitivity of the sensor decreases from 1.051 nm/g to
0.8915 nm/g. After temperature compensation, the maximum residual sum of squares (RSS) of the sensor is 0.168, and the full-scale nonlinearity error does not exceed 1.033%. In dynamic response tests, the characteristic frequency of the sensor is considerably higher than6000 Hz. The sensor exhibits high flatness within the frequency response range of 100−2000 Hz, and its sensitivity gradually increases between 2000 Hz and6000 Hz, with a maximum increment of only 0.177 nm/g. Featuring high consistency, adhesive-free integration, and electromagnetic immunity, this sensor provides a robust solution for vibration measurement in high-temperature environments.-
Key words:
- fiber optic sensor /
- fabry-perot /
- MEMS /
- vibration /
- high-temperature
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图 1 (a)振动传感器的结构示意图；(b)“梁-质量块”的结构模型图；(c)双FP腔的干涉模型
Figure 1. (a) Schematic diagram of the vibration sensor; (b) "Structural model of beam-mass block"; (c) Interference model of the dual FP cavities
图 2 (a)干法刻蚀制备振动法珀腔；(b)飞秒激光粗糙化处理及芯片直接键合流程；(c)传感器芯片制备及实物图
Figure 2. (a) Fabrication of vibrating FP cavity by dry etching; (b) Process of femtosecond laser roughening and direct chip bonding; (c) Preparation of sensor chip and its physical image
图 4 (a) 23 °C下的时域响应；(b) 800 °C下的时域响应；(c) 23 °C下的频率响应；(d) 800 °C下的频率响应
Figure 4. (a) Time-domain response at 23 °C; (b) Time-domain response at 800 °C; (c)Frequency response at 23 °C; (d)Frequency response at 800 °C
图 7 振动腔初始腔长和温度腔腔长随温度变化曲线
Figure 7. Variation of Initial Vibration-Cavity Length and Temperature-Cavity Length with Temperature
图 8 振动腔初始腔长和温度腔腔长拟合残差分析图
Figure 8. Vibration initial cavity length and cavity temperature chamber cavity length fitting residual analysis diagram
图 9 温度补偿后加速度的测量值与实际值的线性拟合
Figure 9. Linear Fit of Measured versus Actual Acceleration after Temperature Compensation
表 1 敏感单元的结构参数
Table 1. Structural Parameters of the Sensitive Unit
Parameters Symbol Value Length of the beam $ {l}_{1} $ 0.9 mm Length of the beam $ {l}_{2} $ 3.3 mm Width of the beam $ b $ 0.3 mm Thickness of the beam $ h $ 0.3 mm Density of $ {\mathrm{SiO}}_{2} $ $ \rho $ 2650 kg·m−3Young's modulus of $ {\mathrm{SiO}}_{2} $ $ E $ 73.1 GPa Sensitivity $ S $ 1.374 nm/g Frequence $ f $ 16100 Hz
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表 2 不同的高温F-P振动传感器的特性
Table 2. Characteristics of several high-temperature F-P vibration sensors.
Signal Transmission Method
(in High-Temperature Area)Packaging
MethodThe Highest Working
Temperature ( °C)Sensitivity [13] Reflector and sphere lens Mechanical coupling 500 7.69 nm/g [15] Sapphire optical fiber Heat-resistant inorganic adhesives 1200 17.86 mV/g [17] Quartz optical fiber Ceramic glue 1000 0.0073 rad/g[20] Gold-plated FBG Laser welding 800 0.0093 rad/gthis work Gold-plated optical fiber and Silicon ball lens Mechanical coupling 800 1.051 nm/g
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