Ultrafastlaser processing of glass materials: mechanisms, applications, and prospects
-
摘要:
超快激光凭借高峰值功率和超短脉冲宽度，能够通过非线性吸收在透明玻璃内部实现高精度、局域化能量沉积，从而诱导折射率变化、纳米光栅、微空洞等多种微改性结构，并伴随近焦点区域的应力分布调制与元素迁移。这种独特的加工机制为玻璃材料内部三维微纳制造提供了重要基础。本文从超快激光与玻璃材料相互作用机理出发，系统梳理了不同改性类型及其对应工艺窗口，进一步总结了其在片上光子学器件制备、高精度切割、光波导写入、应力波片构筑、微通道加工以及Burst模式加工等方面的研究进展。最后，文章分析了当前技术在加工一致性、机理认知和产业化落地方面面临的瓶颈，指出反向工程对于优化工艺设计的重要意义，并展望了人工智能技术在复杂参数寻优与加工智能化中的应用潜力。
Abstract:Ultrafast lasers, owing to their high peak power and ultrashort pulse duration, enable highly precise and localized energy deposition inside transparent glass through nonlinear absorption. This process can induce a variety of micro-modifications, including refractive index changes, nanogratings, and microvoids, and is often accompanied by stress-field modulation and elemental migration in the near-focus region. Such a unique processing mechanism provides an important foundation for three-dimensional micro/nanofabrication inside glass materials. Starting from the interaction mechanism between ultrafast lasers and glass, this paper systematically reviews different types of material modification and their corresponding processing windows, and further summarizes recent progress in applications such as on-chip photonic device fabrication, high-precision cutting, optical waveguide writing, stress-based waveplate fabrication, microchannel processing, and burst-mode ultrafast laser machining. Finally, the paper analyzes the current bottlenecks in processing consistency, mechanistic understanding, and industrial implementation, highlights the importance of inverse engineering for process optimization, and discusses the potential of artificial intelligence technique in complex parameter optimization and intelligent laser processing.
-
Key words:
- ultrafast laser processing /
- glass materials /
- optical waveguides /
- nanograting /
- microdevices
-
图 2 超快激光与玻璃材料作用机理 （a）玻璃材料的能带（b，c）飞秒激光脉冲及其改性区（d）改性种类随脉冲数及能量的变化[45]（e）硅酸盐玻璃网络结构示意图（f）超快激光脉冲与玻璃材料作用后时间尺度上的现象 Figure 2. Interaction mechanisms between ultrafast lasers and glass materials: (a) energy-band diagram of glass; (b, c) a femtosecond laser pulse and its modified region; (d) evolution of modification types with pulse number and energy[45]; (e) schematic of the silicate glass network structure; (f) phenomena on different time scales following the interaction of an ultrafast laser pulse with glass.
图 3 波导折射率变化的机理及样式（a）石英玻璃淬火与密度变化[65]（b）色心的种类[66]（c）各种玻璃中制备的光波导及其端面形貌[60, 62]（d）路径样式可调节的波导及其在拓扑光子学上的应用[63]
Figure 3. Mechanisms and profiles of refractive-index modification in waveguides: (a) quenching and density change in silica glass[65]; (b) types of color centers[66]; (c) optical waveguides fabricated in various glasses and their end-face morphologies[60, 62]; (d) waveguides with tunable path geometries and their applications in topological photonic[63].
图 4 纳米光栅的形貌及形成机理 （a）纳米光栅形貌示意图（b）材料表面形成的周期性结构，能够解释纳米光栅的形成[81]（c）利用微爆炸形成种子结构后利用近场增强生长出的纳米片层[80]（d，e）已有结构对后续光强主极大的产生[79]（f）各种玻璃密度变化的能力[78]
Figure 4. Morphology and formation mechanism of nanogratings: (a) schematic illustration of the nanograting morphology; (b) periodic surface structures formed on the material surface, which can account for nanograting formation[81]; (c) nanoscale lamellae grown via near-field–enhanced growth after seed structures are created by micro-explosions[80]; (d, e) influence of pre-existing structures on the generation of subsequent principal light-intensity maxima[79]; (f) capability of various glasses to undergo density change[78].
图 5 Burst模式的低热效应和加工效果 （a，b） Burst模式的低热效应[80, 91]（c） Burst模式下制备近似纳米光栅结构的性能[80]（d，e）Burst模式下，定脉冲频率不同扫速下解释结构相位延迟量的物理模型及其定量关系[92]（f）能量调制后的Burst在高扫速下制备结构的优秀效果[92]
Figure 5. Low thermal effects and processing performance in burst mode: (a, b) low thermal effects in burst mode[80, 91]; (c) performance of fabricating quasi-nanograting structures under burst-mode irradiation[80]; (d, e) physical model explaining the structural retardance and its quantitative relationship as a function of scanning speed at a fixed repetition rate in burst mode[92]; (f) excellent results of structure fabrication at high scanning speeds using burst mode with energy modulation[92].
图 6 应力双折射 （a）纳米光栅阵列的应力产生及其双折射现象[86]（b）不同沉积能量下结构的应力情况[57]（c）纳米光栅的总双折射随激光偏振方向变化的周期性，体现其可控性[89]（d、e）纳米光栅的双折射模型，分为应力层和形状层[89]（f）纳米光栅层波片和应力层波片的热稳定性[89]
Figure 6. Stress-induced birefringence: (a) stress generation and birefringence in nanograting arrays[86]; (b) stress states of the structures at different deposited energies[57]; (c) periodic dependence of the total birefringence of nanogratings on the laser polarization direction, demonstrating its tunability[89]; (d, e) birefringence model of nanogratings, consisting of a stress layer and a form-birefringence layer[89]; (f) thermal stability of waveplates based on the nanograting layer and the stress-layer waveplate[89].
图 7 超快激光改性与湿法刻蚀结合 （a）纳米光栅的辅助刻蚀[83]（b、c）不同激光通量下石英玻璃中的不同改性种类与刻蚀偏振依赖性[88]（d）热退火对改性区刻蚀速率的影响[88]（e）多种改性结构混合区的加工精度展示[103]
Figure 7. Combination of ultrafast laser modification and wet etching: (a) nanograting-assisted etching[83]; (b, c) different modification types in fused silica at different laser fluences and the corresponding selective etching ratios[88]; (d) effect of thermal annealing on the etching rate of the modified regions[88]; (e) demonstration of machining precision in mixed regions containing multiple modified structures[103].
表 1 飞秒激光制备光波导的研究历程
Table 1. Research progress in femtosecond laser fabrication of optical waveguides.
Material Year Refractive index change Propagation loss dB/cm New findings Citation Germanium-doped silica glass 1996 Δn>10−2 — First demonstration of ultrafast laser-written
waveguides in glass[8] Corning HPFS;Corning 7890 2002 All on order of 10−3 — Color center contribution dominates over densification [46] Lead silicate; As2S3 chalcogenide film 2003 — — waveguides in films [67] Fused silica 2006 6*10−3 — Densification dominates the increase in refractive index [31] Eu3+-doped silicate glass 2009 — — Element migration by ultrafast laser enables
waveguide writing[36] BK7 2010 At most 10−2 0.20 dB/cm Fluence as a key parameter for waveguide writing
at high repetition rates[53] BK7 2011 3*10−4 0.50 dB/cm Low-rep-rate pulses write waveguides without thermal accumulation [49] Fused silica 2011 — — SiO2 glass densification dominated by fictive temperature [47] Corning 7980 2013 — — Annealing reveals the origin of index change in waveguides [68] Gorilla 2016 5.7*10−3 — Near-surface waveguides can be fabricated in Gorilla Glass [50] Fused Silica 2016 — — Stress-free waveguides (on a macroscopic scale) [57] BK7 2018 — 0.06 dB/cm Multilayer waveguides fabricated by single scan [58] Herasil I 2019 1.9*10−3 0.40–0.60 dB/cm UV laser writing performance was compared with IR lasers [69] Silver-containing zinc
phosphate glass2019 2*10−3 ≤1.20 dB/cm Near-surface Ag-cluster waveguides were fabricated. [70] Corning EAGLE XG 2020 — 0.27 dB/cm Waveguide insulation via ultrafast laser and wet etching. [71] Custom-designed
borosilicate glass2021 2.5*10−2 a few dB/cm Refractive index controlled by thermophoresis-driven
element migration.[54] Various silicate glasses 2021 10−3 to 10−2 — Aluminum anchors alkaline earth migration for waveguide formation. [55] fused silica, Gorilla Glass,
EXG, etc.2023 — 0.31~0.34 dB/cm HST (Highly See-Through) low-leakage waveguides [60] FS7980,, Gorilla Glass, EXG,etc 2024 Precision:5.6*10−5 0.20 dB/cm Precise control of waveguide structure using
OCMS scanning method.[62] Soda-lime silicate glass 2025 — 0.52 dB/cm Practical applications of sensor fabrication
in construction materials.[72] 
下载: 导出CSV
表 2 研究者对纳米光栅的认知与应用
Table 2. Researchers' understanding and applications of nanograting.
Material Year Refractive index change Birefrigence change Retardance/nm New findings Citation germanium-doped glass 1999 — — — Enhanced anisotropic scattering in the polarization plane. [73] ED-H synthetic silica 2003 — — — plasma wave interference model [74] Fused silica 2005 — — — Polarization-dependent wet etching rate of nanogratings. [83] Fused silica 2006 — — — nanoplasmonic model [75] Suprasil-II 2008 up to −0.45 locally 6.5*10−3 — Increasing pulse number and energy transforms rewritable nanogratings into nanocracks [34] VIOSIL fused silica 2009 — — — KOH shows higher selectivity and lower taper than HF. [84] Fused silica 2012 — — — Strong birefringence originates from gaseous voids [76] Corning 7980 2012 — 4×10−6（stress） — Nanograting configuration tunes stress birefringence [85] Fused silica 2013 −0.2（locally） 10−2 — Oxygen-filled voids are reversible only at ultra-high temperatures [77] Corning 7980 2013 — — — The macroscopic stress of nanogratings depends on their orientation [86] Fused silica 2014 −0.2(locally)(cited) — 102 nm High thermal stability of nanogratings enables permanent optical storage [87] VIOSIL fused silica 2020 Nearly unchanged 6 × 10−4 — Type X nanopores offer high transmittance and birefringence [32] Corning 7980 2021 — 0.8×10−3 — Near-field-induced nanoplatelets with fast writing and high transmittance [80] Corning 7980 0F2021 — — — Etchant-dependent etching of non-nanograting structures [88] Suprasil CG 2023 — 2.1 rad(CB) — Pure stress waveplate with controllable circular birefringence [89] Corning 7980 2024 approximately −0.08(seed structure) — — Backscattering-interference crawling enables high-aspect cutting via near-field enhancement [82]
下载: 导出CSV
-
[1] CRESPI A, RAMPONI R, OSELLAME R, et al. Integrated photonic quantum gates for polarization qubits[J]. Nature Communications, 2011, 2: 566. doi: 10.1038/ncomms1570 [2] WANG L, GONG W, CAO X W, et al. Holographic laser fabrication of 3D artificial compound μ-eyes[J]. Light: Advanced Manufacturing, 2023, 4(4): 26. doi: 10.37188/lam.2023.026 [3] KOTZ F, ARNOLD K, BAUER W, et al. Three-dimensional printing of transparent fused silica glass[J]. Nature, 2017, 544(7650): 337-339. doi: 10.1038/nature22061 [4] BUTKUTĖ A, JURKŠAS T, BARAVYKAS T, et al. Combined femtosecond laser glass microprocessing for liver-on-chip device fabrication[J]. Materials, 2023, 16(6): 2174. doi: 10.3390/ma16062174 [5] WANG H, ZHANG Y L, WANG W, et al. On-chip laser processing for the development of multifunctional microfluidic chips[J]. Laser & Photonics Reviews, 2017, 11(2): 1600116. doi: 10.1002/lpor.201600116 [6] SCHAFFER C B, BRODEUR A, MAZUR E. Laser-induced breakdown and damage in bulk transparent materials induced by tightly focused femtosecond laser pulses[J]. Measurement Science and Technology, 2001, 12(11): 1784-1794. doi: 10.1088/0957-0233/12/11/305 [7] FORK R, SHANK C, YEN R, et al. Femtosecond optical pulses[J]. IEEE Journal of Quantum Electronics, 1983, 19(4): 500-506. doi: 10.1109/JQE.1983.1071898 [8] DAVIS K M, MIURA K, SUGIMOTO N, et al. Writing waveguides in glass with a femtosecond laser[J]. Optics Letters, 1996, 21(21): 1729-1731. doi: 10.1364/OL.21.001729 [9] GLEZER E N, MAZUR E. Ultrafast-laser driven micro-explosions in transparent materials[J]. Applied Physics Letters, 1997, 71(7): 882-884. doi: 10.1063/1.119677 [10] MIURA K, QIU J R, INOUYE H, et al. Photowritten optical waveguides in various glasses with ultrashort pulse laser[J]. Applied Physics Letters, 1997, 71(23): 3329-3331. doi: 10.1063/1.120327 [11] 刘姿廷, 袁一鸣, 李子越, 等. 飞秒激光与透明硬质材料的相互作用: 从相变机理到永久光存储[J]. 中国激光, 2023, 50(18): 1813005. doi: 10.3788/CJL230742LIU Z T, YUAN Y M, LI Z Y, et al. Interaction between ultrafast laser and transparent hard materials: from phase change mechanism to eternal optical data storage[J]. Chinese Journal of Lasers, 2023, 50(18): 1813005. (in Chinese). doi: 10.3788/CJL230742 [12] KTAFI I, KONG J, CAVILLON M, et al. A new approach toward extreme thermal stability of femtosecond laser induced modifications in glasses[J]. Laser & Photonics Reviews, 2025, 19(3): 2401086. doi: 10.1002/lpor.202401086 [13] TAN D ZH, WANG ZH, XU B B, et al. Photonic circuits written by femtosecond laser in glass: improved fabrication and recent progress in photonic devices[J]. Advanced Photonics, 2021, 3(2): 024002. doi: 10.1117/1.ap.3.2.024002 [14] WANG H J, LEI Y H, WANG L, et al. 5D optical data storage with 100% readout accuracy in silica glass[C]. Proceedings of the CLEO: Science and Innovations 2021, Optica Publishing Group, 2021: SW3H. 3. [15] YE M X, LEI Y H, ZHANG X, et al. Parallel writing of 5D optical data via shaped voxels[J]. Science Advances, 2025, 11(29): eadx7335. doi: 10.1126/sciadv.adx7335 [16] WANG H J, LEI Y H, WANG L, et al. 100-Layer error-free 5D optical data storage by ultrafast laser nanostructuring in glass[J]. Laser & Photonics Reviews, 2022, 16(4): 2100563. doi: 10.1002/lpor.202100563 [17] LEI Y H, SHAYEGANRAD G, WANG H J, et al. Efficient ultrafast laser writing with elliptical polarization[J]. Light: Science & Applications, 2023, 12(1): 74. [18] WANG Q, LEI Y H, WANG Y, et al. High-capacity optical data storage by ultraviolet femtosecond laser writing in silica glass[J]. Optics Express, 2024, 32(26): 46140-46149. doi: 10.1364/OE.545248 [19] CHENG Y, SUGIOKA K, MIDORIKAWA K. Microfluidic laser embedded in glass by three-dimensional femtosecond laser microprocessing[J]. Optics Letters, 2004, 29(17): 2007-2009. doi: 10.1364/OL.29.002007 [20] ZHANG T L, NAMOTO M, OKANO K, et al. Hydrodynamic particle focusing enhanced by femtosecond laser deep grooving at low Reynolds numbers[J]. Scientific Reports, 2021, 11(1): 1652. doi: 10.1038/s41598-021-81190-y [21] QI J Y, LIU X Q, LIU Z J, et al. High stability, ultrawide, and extremely high absorption aluminum plane blackbody fabricated by nitrogen-assisted femtosecond laser[J]. Laser & Photonics Reviews, 2025, 19(22): e00166. doi: 10.1002/lpor.202500166 [22] WANG D N, ZHAO Y, GE X, et al. Designing hard, low-refractive-index lossy materials for super wear-resistant absorbers[J]. Materials Research Letters, 2022, 10(7): 472-480. doi: 10.1080/21663831.2022.2055436 [23] PAPADOPOULOS A, SKOULAS E, MIMIDIS A, et al. Biomimetic omnidirectional antireflective glass via direct ultrafast laser nanostructuring[J]. Advanced Materials, 2019, 31(32): 1901123. doi: 10.1002/adma.201901123 [24] LU J F, HASSAN M, COURVOISIER F, et al. 3D structured Bessel beam polarization and its application to imprint chiral optical properties in silica[J]. APL Photonics, 2023, 8(6): 060801. doi: 10.1063/5.0140843 [25] COURSAULT D, BRASSELET E. Nanostructured silica spin-orbit optics for modal vortex beam shaping[J]. Nanophotonics, 2022, 11(4): 805-812. doi: 10.1515/nanoph-2021-0579 [26] LU J F, GARCIA-CAUREL E, OSSIKOVSKI R, et al. Femtosecond laser direct writing multilayer chiral waveplates with minimal linear birefringence[J]. Optics Letters, 2023, 48(2): 271-274. doi: 10.1364/OL.479447 [27] LIU Z T, LEI Y H, ZHAO X H, et al. High-efficiency generation and manipulation of optical vortex by geometric phase fork gratings with high thermal stability and damage threshold[J]. Laser & Photonics Reviews, 2026, 20(7): e02265. doi: 10.1002/lpor.202502265 [28] KELDYSH L V. Ionization in the field of a strong electromagnetic wave[J]. Journal of Experimental and Theoretical Physics, 1965, 20(5): 1307-1314. doi: 10.1016/0042-207x(67)90715-4 [29] BLOEMBERGEN N. Laser-induced electric breakdown in solids[J]. IEEE Journal of Quantum Electronics, 1974, 10(3): 375-386. doi: 10.1109/JQE.1974.1068132 [30] GATTASS R R, MAZUR E. Femtosecond laser micromachining in transparent materials[J]. Nature Photonics, 2008, 2(4): 219-225. doi: 10.1038/nphoton.2008.47 [31] SALIMINIA A, NGUYEN N T, CHIN S L, et al. Densification of silica glass induced by 0.8 and 1.5μm intense femtosecond laser pulses[J]. Journal of Applied Physics, 2006, 99(9): 093104. doi: 10.1063/1.2196237 [32] SAKAKURA M, LEI Y H, WANG L, et al. Ultralow-loss geometric phase and polarization shaping by ultrafast laser writing in silica glass[J]. Light: Science & Applications, 2020, 9: 15. [33] JUODKAZIS S, MISAWA H, HASHIMOTO T, et al. Laser-induced microexplosion confined in a bulk of silica: formation of nanovoids[J]. Applied Physics Letters, 2006, 88(20): 201909. doi: 10.1063/1.2204847 [34] TAYLOR R, HNATOVSKY C, SIMOVA E. Applications of femtosecond laser induced self-organized planar nanocracks inside fused silica glass[J]. Laser & Photonics Reviews, 2008, 2(1-2): 26-46. doi: 10.1002/lpor.200710031 [35] VIPPARTY D, TAN B, VENKATAKRISHNAN K. Nanostructures synthesis by femtosecond laser ablation of glasses[J]. Journal of Applied Physics, 2012, 112(7): 073109. doi: 10.1063/1.4754864 [36] LIU Y, SHIMIZU M, ZHU B, et al. Micromodification of element distribution in glass using femtosecond laser irradiation[J]. Optics Letters, 2009, 34(2): 136-138. doi: 10.1364/OL.34.000136 [37] STUART B C, FEIT M D, RUBENCHIK A M, et al. Laser-induced damage in dielectrics with nanosecond to subpicosecond pulses[J]. Physical Review Letters, 1995, 74(12): 2248-2251. doi: 10.1103/PhysRevLett.74.2248 [38] SAKAKURA M, TERAZIMA M, SHIMOTSUMA Y, et al. Observation of pressure wave generated by focusing a femtosecond laser pulse inside a glass[J]. Optics Express, 2007, 15(9): 5674-5686. doi: 10.1364/oe.15.005674 [39] SAKAKURA M, TERAZIMA M. Initial temporal and spatial changes of the refractive index induced by focused femtosecond pulsed laser irradiation inside a glass[J]. Physical Review B, 2005, 71(2): 024113. doi: 10.1103/PhysRevB.71.024113 [40] WANG Q S, JIANG L, SUN J Y, et al. Enhancing the expansion of a plasma shockwave by crater-induced laser refocusing in femtosecond laser ablation of fused silica[J]. Photonics Research, 2017, 5(5): 488-493. doi: 10.1364/PRJ.5.000488 [41] CHICHKOV B N, MOMMA C, NOLTE S, et al. Femtosecond, picosecond and nanosecond laser ablation of solids[J]. Applied Physics A, 1996, 63(2): 109-115. doi: 10.1007/BF01567637 [42] LIU X, DU D, MOUROU G. Laser ablation and micromachining with ultrashort laser pulses[J]. IEEE Journal of Quantum Electronics, 1997, 33(10): 1706-1716. doi: 10.1109/3.631270 [43] STOIAN R. Volume photoinscription of glasses: three-dimensional micro- and nanostructuring with ultrashort laser pulses[J]. Applied Physics A, 2020, 126(6): 438. doi: 10.1007/s00339-020-03516-3 [44] RÖMER H. Theoretical Optics: An Introduction[M]. Weinheim: John Wiley & Sons, 2006. [45] RICHTER S, HEINRICH M, DÖRING S, et al. Nanogratings in fused silica: formation, control, and applications[J]. Journal of Laser Applications, 2012, 24(4): 042008. doi: 10.2351/1.4718561 [46] STRELTSOV A M, BORRELLI N F. Study of femtosecond-laser-written waveguides in glasses[J]. Journal of the Optical Society of America B, 2002, 19(10): 2496-2504. doi: 10.1364/JOSAB.19.002496 [47] BRESSEL L, DE LIGNY D, SONNEVILLE C, et al. Femtosecond laser induced density changes in GeO2 and SiO2 glasses: fictive temperature effect [invited][J]. Optical Materials Express, 2011, 1(4): 605-613. doi: 10.1364/OME.1.000605 [48] BRÜCKNER R. Properties and structure of vitreous silica. I[J]. Journal of Non-Crystalline Solids, 1970, 5(2): 123-175. doi: 10.1016/0022-3093(70)90190-0 [49] DHARMADHIKARI J A, DHARMADHIKARI A K, BHATNAGAR A, et al. Writing low-loss waveguides in borosilicate (BK7) glass with a low-repetition-rate femtosecond laser[J]. Optics Communications, 2011, 284(2): 630-634. doi: 10.1016/j.optcom.2010.09.055 [50] BÉRUBÉ J P, VALLÉE R. Femtosecond laser direct inscription of surface skimming waveguides in bulk glass[J]. Optics Letters, 2016, 41(13): 3074-3077. doi: 10.1364/OL.41.003074 [51] KANEHIRA S, MIURA K, HIRAO K. Ion exchange in glass using femtosecond laser irradiation[J]. Applied Physics Letters, 2008, 93(2): 023112. doi: 10.1063/1.2959820 [52] SHIMIZU M, SAKAKURA M, KANEHIRA S, et al. Formation mechanism of element distribution in glass under femtosecond laser irradiation[J]. Optics Letters, 2011, 36(11): 2161-2163. doi: 10.1364/OL.36.002161 [53] ALLSOP T, DUBOV M, MEZENTSEV V, et al. Inscription and characterization of waveguides written into borosilicate glass by a high-repetition-rate femtosecond laser at 800 nm[J]. Applied Optics, 2010, 49(10): 1938-1950. doi: 10.1364/AO.49.001938 [54] FERNANDEZ T T, GROSS S, ARRIOLA A, et al. Revisiting ultrafast laser inscribed waveguide formation in commercial alkali-free borosilicate glasses[J]. Optics Express, 2020, 28(7): 10153-10164. doi: 10.1364/OE.387790 [55] FERNANDEZ T T, GROSS S, PRIVAT K, et al. Designer glasses—future of photonic device platforms[J]. Advanced Functional Materials, 2022, 32(3): 2103103. doi: 10.1002/adfm.202103103 [56] FERNANDEZ T T, HWANG Y, MAHMODI H, et al. Ultrafast laser-fabricated fluoride glass waveguides with exceptionally high positive refractive index change for mid-infrared integrated optics[J]. Optics Express, 2024, 32(24): 42938-42950. doi: 10.1364/OE.541446 [57] BELLOUARD Y, CHAMPION A, MCMILLEN B, et al. Stress-state manipulation in fused silica via femtosecond laser irradiation[J]. Optica, 2016, 3(12): 1285-1293. doi: 10.1364/OPTICA.3.001285 [58] CHEN G Y, PIANTEDOSI F, OTTEN D, et al. Femtosecond-laser-written microstructured waveguides in BK7 glass[J]. Scientific Reports, 2018, 8(1): 10377. doi: 10.1038/s41598-018-28631-3 [59] SUN Q, LEE T, BERESNA M, et al. Control of laser induced cumulative stress for efficient processing of fused silica[J]. Scientific Reports, 2020, 10(1): 3819. doi: 10.1038/s41598-020-60828-3 [60] ZHONG L J, WANG Y Y, TAN D ZH, et al. Toward 3D integration of highly see-through photonic circuits in glass[J]. Laser & Photonics Reviews, 2023, 17(6): 2200767. doi: 10.1002/lpor.202200767 [61] HAN X H, WANG Y Y, HU J CH, et al. Laser printing of large-area conformal 3D photonic circuits in glass[J]. Laser & Photonics Reviews, 2024, 18(9): 2400060. doi: 10.1002/lpor.202400060 [62] WANG Y Y, ZHONG L J, LAU K Y, et al. Precise mode control of laser-written waveguides for broadband, low-dispersion 3D integrated optics[J]. Light: Science & Applications, 2024, 13(1): 130. [63] SUN Y K, ZHANG X L, YU F, et al. Non-abelian thouless pumping in photonic waveguides[J]. Nature Physics, 2022, 18(9): 1080-1085. doi: 10.1038/s41567-022-01669-x [64] ZHANG X L, YU F, CHEN Z G, et al. Non-abelian braiding on photonic chips[J]. Nature Photonics, 2022, 16(5): 390-395. doi: 10.1038/s41566-022-00976-2 [65] LANCRY M, RÉGNIER E, POUMELLEC B. Fictive temperature in silica-based glasses and its application to optical fiber manufacturing[J]. Progress in Materials Science, 2012, 57(1): 63-94. doi: 10.1016/j.pmatsci.2011.05.002 [66] BERGHMANS F, BRICHARD B, FERNANDEZ A F, et al. An introduction to radiation effects on optical components and fiber optic sensors[M]//BOCK W J, GANNOT I, TANEV S. Optical Waveguide Sensing and Imaging. Dordrecht: Springer, 2008: 127-165. [67] ZOUBIR A, SHAH L, RICHARDSON K, et al. Practical uses of femtosecond laser micro-materials processing[J]. Applied Physics A, 2003, 77(2): 311-315. doi: 10.1007/s00339-003-2121-9 [68] WITCHER J J, REICHMAN W J, FLETCHER L B, et al. Thermal annealing of femtosecond laser written structures in silica glass[J]. Optical Materials Express, 2013, 3(4): 502-510. doi: 10.1364/OME.3.000502 [69] MICHELE V D, ROYON M, MARIN E, et al. Near-IR- and UV-femtosecond laser waveguide inscription in silica glasses[J]. Optical Materials Express, 2019, 9(12): 4624-4633. doi: 10.1364/OME.9.004624 [70] KHALIL A A, LALANNE P, BÉRUBÉ J P, et al. Femtosecond laser writing of near-surface waveguides for refractive-index sensing[J]. Optics Express, 2019, 27(22): 31130-31143. doi: 10.1364/OE.27.031130 [71] CECCARELLI F, ATZENI S, PENTANGELO C, et al. Low power reconfigurability and reduced crosstalk in integrated photonic circuits fabricated by femtosecond laser micromachining[J]. Laser & Photonics Reviews, 2020, 14(10): 2000024. doi: 10.1002/lpor.202000024 [72] NATEGH S, GEUDENS V, VAN STEENBERGE G, et al. Femtosecond laser-written invisible sensors in architectural glass and their impact on strength[J]. Advanced Materials Technologies, 2025, 10(10): 2401941. doi: 10.1002/admt.202401941 [73] KAZANSKY P G, INOUYE H, MITSUYU T, et al. Anomalous anisotropic light scattering in Ge-doped silica glass[J]. Physical Review Letters, 1999, 82(10): 2199-2202. doi: 10.1103/PhysRevLett.82.2199 [74] SHIMOTSUMA Y, KAZANSKY P G, QIU J R, et al. Self-organized nanogratings in glass irradiated by ultrashort light pulses[J]. Physical Review Letters, 2003, 91(24): 247405. doi: 10.1103/PhysRevLett.91.247405 [75] BHARDWAJ V R, SIMOVA E, RAJEEV P P, et al. Optically produced arrays of planar nanostructures inside fused silica[J]. Physical Review Letters, 2006, 96(5): 057404. doi: 10.1103/PhysRevLett.96.057404 [76] RICHTER S, PLECH A, STEINERT M, et al. On the fundamental structure of femtosecond laser-induced nanogratings[J]. Laser & Photonics Reviews, 2012, 6(6): 787-792. doi: 10.1002/lpor.201200048 [77] LANCRY M, POUMELLEC B, CANNING J, et al. Ultrafast nanoporous silica formation driven by femtosecond laser irradiation[J]. Laser & Photonics Reviews, 2013, 7(6): 953-962. doi: 10.1002/lpor.201300043 [78] MUSGRAVES J D, HU J J, CALVEZ L. Springer Handbook of Glass[M]. Cham: Springer, 2019. [79] LI ZH Z, WANG L, FAN H, et al. O-FIB: far-field-induced near-field breakdown for direct nanowriting in an atmospheric environment[J]. Light: Science & Applications, 2020, 9: 41. [80] LEI Y H, SAKAKURA M, WANG L, et al. High speed ultrafast laser anisotropic nanostructuring by energy deposition control via near-field enhancement[J]. Optica, 2021, 8(11): 1365-1371. doi: 10.1364/OPTICA.433765 [81] XU Y SH, LI ZH Z, FAN H, et al. Optical near fields for ablation of periodic structures[J]. Optics Letters, 2023, 48(11): 2841-2844. doi: 10.1364/OL.487323 [82] LI ZH Z, FAN H, WANG L, et al. Super-stealth dicing of transparent solids with nanometric precision[J]. Nature Photonics, 2024, 18(8): 799-808. doi: 10.1038/s41566-024-01437-8 [83] HNATOVSKY C, TAYLOR R S, SIMOVA E, et al. Polarization-selective etching in femtosecond laser-assisted microfluidic channel fabrication in fused silica[J]. Optics Letters, 2005, 30(14): 1867-1869. doi: 10.1364/OL.30.001867 [84] KIYAMA S, MATSUO S, HASHIMOTO S, et al. Examination of etching agent and etching mechanism on femotosecond laser microfabrication of channels inside vitreous silica substrates[J]. The Journal of Physical Chemistry C, 2009, 113(27): 11560-11566. doi: 10.1021/jp900915r [85] FERNANDES L A, GRENIER J R, HERMAN P R, et al. Stress induced birefringence tuning in femtosecond laser fabricated waveguides in fused silica[J]. Optics Express, 2012, 20(22): 24103-24114. doi: 10.1364/OE.20.024103 [86] CHAMPION A, BERESNA M, KAZANSKY P, et al. Stress distribution around femtosecond laser affected zones: effect of nanogratings orientation[J]. Optics Express, 2013, 21(21): 24942-24951. doi: 10.1364/OE.21.024942 [87] ZHANG J Y, GECEVIČIUS M, BERESNA M, et al. Seemingly unlimited lifetime data storage in nanostructured glass[J]. Physical Review Letters, 2014, 112(3): 033901. doi: 10.1103/PhysRevLett.112.033901 [88] CASAMENTI E, POLLONGHINI S, BELLOUARD Y. Few pulses femtosecond laser exposure for high efficiency 3D glass micromachining[J]. Optics Express, 2021, 29(22): 35054-35066. doi: 10.1364/OE.435163 [89] LU J F, TIAN J, POUMELLEC B, et al. Tailoring chiral optical properties by femtosecond laser direct writing in silica[J]. Light: Science & Applications, 2023, 12(1): 46. [90] HERMAN P R, MARJORIBANKS R, OETTL A. Burst-ultrafast laser machining method: US, 20010009250[P]. 2001-07-26. [91] KERSE C, KALAYCIOĞLU H, ELAHI P, et al. Ablation-cooled material removal with ultrafast bursts of pulses[J]. Nature, 2016, 537(7618): 84-88. doi: 10.1038/nature18619 [92] WANG H J, LEI Y H, SHAYEGANRAD G, et al. Increasing efficiency of ultrafast laser writing via nonlocality of light-matter interaction[J]. Laser & Photonics Reviews, 2024, 18(8): 2301143. doi: 10.1002/lpor.202301143 [93] KOLASINSKI K W, GUPTA M C, ZHIGILEI L V. Plume and nanoparticle formation during laser ablation[M]//WANDELT K. Encyclopedia of Interfacial Chemistry. Amsterdam: Elsevier, 2018: 594-603. [94] SINGH M, AMIN M, R A K, et al. Beyond imaging: optical emission spectroscopy for mechanistic diagnosis of plasma plume and spatter dynamics in laser DED[J]. Journal of Materials Processing Technology, 2026, 349: 119199. doi: 10.1016/j.jmatprotec.2026.119199 [95] LOPEZ J, NIANE S, BONAMIS G, et al. Percussion drilling in glasses and process dynamics with femtosecond laser GHz-bursts[J]. Optics Express, 2022, 30(8): 12533-12544. doi: 10.1364/OE.455553 [96] BALAGE P, BONAMIS G, LAFARGUE M, et al. Advances in femtosecond laser GHz-burst drilling of glasses: influence of burst shape and duration[J]. Micromachines, 2023, 14(6): 1158. doi: 10.3390/mi14061158 [97] BALAGE P, GUILBERTEAU T, LAFARGUE M, et al. Pump-probe imaging of ultrafast laser percussion drilling of glass in single pulse, MHz- and GHz-burst regimes[J]. Advanced Materials Interfaces, 2025, 12(10): 2400853. doi: 10.1002/admi.202400853 [98] BHARDWAJ V R, CORKUM P B, RAYNER D M, et al. Stress in femtosecond-laser-written waveguides in fused silica[J]. Optics Letters, 2004, 29(12): 1312-1314. doi: 10.1364/OL.29.001312 [99] MCMILLEN B, ATHANASIOU C, BELLOUARD Y. Femtosecond laser direct-write waveplates based on stress-induced birefringence[J]. Optics Express, 2016, 24(24): 27239-27252. doi: 10.1364/OE.24.027239 [100] MARCINKEVIČIUS A, JUODKAZIS S, WATANABE M, et al. Femtosecond laser-assisted three-dimensional microfabrication in silica[J]. Optics Letters, 2001, 26(5): 277-279. doi: 10.1364/OL.26.000277 [101] BELLOUARD Y, SAID A, DUGAN M, et al. Fabrication of high-aspect ratio, micro-fluidic channels and tunnels using femtosecond laser pulses and chemical etching[J]. Optics Express, 2004, 12(10): 2120-2129. doi: 10.1364/opex.12.002120 [102] OCHOA M, ROLDÁN-VARONA P, ALGORRI J F, et al. Polarisation-independent ultrafast laser selective etching processing in fused silica[J]. Lab on a Chip, 2023, 23(7): 1752-1757. doi: 10.1039/D3LC00052D [103] BARBATO P, OSELLAME R, MARTÍNEZ VÁZQUEZ R. Nanochannels in fused silica through NaOH etching assisted by femtosecond laser irradiation[J]. Materials, 2024, 17(19): 4906. doi: 10.3390/ma17194906 [104] HUANG X J, GUO Q Y, YANG D D, et al. Reversible 3D laser printing of perovskite quantum dots inside a transparent medium[J]. Nature Photonics, 2020, 14(2): 82-88. doi: 10.1038/s41566-019-0538-8 [105] HUANG X J, GUO Q Y, KANG SH L, et al. Three-dimensional laser-assisted patterning of blue-emissive metal halide perovskite nanocrystals inside a glass with switchable photoluminescence[J]. ACS Nano, 2020, 14(3): 3150-3158. doi: 10.1021/acsnano.9b08314 [106] SUN K, TAN D ZH, FANG X Y, et al. Three-dimensional direct lithography of stable perovskite nanocrystals in glass[J]. Science, 2022, 375(6578): 307-310. doi: 10.1126/science.abj2691 [107] SU Z H, SUN SH ZH, DAI Y, et al. Femtosecond laser direct-writing of perovskite nanocrystals in glasses[J]. Journal of Non-Crystalline Solids: X, 2023, 18: 100182. doi: 10.1016/j.nocx.2023.100182 [108] ZHENG W Y, WANG ZH, CHEN W L, et al. Unlocking high photosensitivity direct laser writing and observing atomic clustering in glass[J]. Nature Communications, 2024, 15(1): 8366. doi: 10.1038/s41467-024-52628-4 [109] TORUN G, KISHI T, PUGLIESE D, et al. Formation mechanism of elemental Te produced in tellurite glass systems by femtosecond laser irradiation[J]. Advanced Materials, 2023, 35(20): 2210446. doi: 10.1002/adma.202210446 [110] ZHANG B, TAN D ZH, WANG ZH, et al. Self-organized phase-transition lithography for all-inorganic photonic textures[J]. Light: Science & Applications, 2021, 10(1): 93. [111] ZHANG B, WANG ZH, TAN D ZH, et al. Ultrafast laser inducing continuous periodic crystallization in the glass activated via laser-prepared crystallite-seeds[J]. Advanced Optical Materials, 2021, 9(8): 2001962. doi: 10.1002/adom.202001962 [112] ZHANG B, TAN D ZH, LIU X F, et al. Self-organized periodic crystallization in unconventional glass created by an ultrafast laser for optical attenuation in the broadband near-infrared region[J]. Advanced Optical Materials, 2019, 7(20): 1900593. doi: 10.1002/adom.201900593 -
下载:
图(8) / 表(2)
计量
- 文章访问数: 13
- HTML全文浏览量: 7
- PDF下载量: 1
- 被引次数: 0
