Three-dimensional displacement measurement via fusion of holographic speckle interferometry and event-based vision
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摘要:
传统三维数字散斑干涉通常依赖多光束、多波长或多相机同步结构获取三维位移矢量，存在光路复杂、维度耦合、动态过程同步困难等问题。针对上述限制，本文提出一种数字全息散斑干涉与事件视觉融合的三维动态位移场测量方法。首先利用工业相机结合空间相移技术记录全息干涉图样，实现物体表面法向微变形的高精度相位重建。然后引入事件相机异步感知表面散斑亮度变化获取面内位移场，结合事件流进行时序累积与块匹配算法进行位移求解。最后将高灵敏度离面相位信息与面内位移数据融合，实现完整三维位移场的重构。本文构建的数字全息散斑干涉-事件视觉融合系统能够稳定实现圆形薄板三维位移场测量；其中离面位移测量RMSE最低达到0.47 μm，面内位移测量RMSE最低达到0.18 μm，三维融合位移场RMSE3D最低达到0.13 μm。该方法基本满足三维微小变形测量中高精度、稳定性好及抗干扰能力较强等要求。
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关键词:
- 数字全息散斑干涉术 /
- 事件相机 /
- 块匹配 /
- Kirchhoff-Love薄板理论
Abstract:Traditional three-dimensional digital speckle interferometry generally relies on synchronized multi-beam, multi-wavelength, or multi-camera configurations to obtain three-dimensional displacement vectors, which often leads to complex optical setups, dimensional coupling, and difficulties in synchronizing dynamic processes. To overcome these limitations, this paper proposes a three-dimensional dynamic displacement-field measurement method that integrates digital holographic speckle interferometry with event vision. First, holographic interference patterns are recorded by an industrial camera combined with a spatial phase-shifting technique, enabling high-precision phase reconstruction of out-of-plane micro-deformation on the object surface. Then, an event camera is introduced to asynchronously capture speckle-intensity variations on the surface for in-plane displacement measurement. The event stream is temporally accumulated, and a block-matching algorithm is used for displacement estimation. Finally, the highly sensitive out-of-plane phase information is fused with the in-plane displacement data to reconstruct the complete three-dimensional displacement field. Experimental results show that the proposed digital holographic speckle interferometry–event vision fusion system can stably measure the three-dimensional displacement field of circular thin plates. The minimum RMSE values reach 0.47 μm for out-of-plane displacement, 0.18 μm for in-plane displacement, and 0.13 μm for the fused three-dimensional displacement field. The proposed method generally satisfies the requirements of high precision, good stability, and strong anti-interference capability in three-dimensional micro-deformation measurement.
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图 1 数字全息散斑干涉离面位移测量原理图
Figure 1. Principle diagram of digital holographic speckle interferometry for out-of-plane displacement measurement
图 2 事件相机动态散斑采集与事件切片生成示意图
Figure 2. Schematic illustration of dynamic speckle acquisition and event-slice generation using an event camera
图 3 数字全息散斑干涉与事件视觉融合测量系统原理图
Figure 3. Schematic diagram of the digital holographic speckle interferometry and event vision fusion measurement system
图 4 数字全息散斑干涉与事件视觉融合测量系统实物光路图
Figure 4. Photograph of the optical setup for the digital holographic speckle interferometry and event vision fusion measurement system
图 5 PZT中心加载与圆板夹具结构图
Figure 5. Structural diagram of the PZT central loading configuration and circular plate fixture
图 6 PZT中心连续加载实验结果示意图
Figure 6. Schematic diagram of continuous loading experimental results at the PZT center.
图 7 全息频谱分离与相位差恢复结果
Figure 7. Holographic spectrum separation and phase-difference reconstruction results
图 8 不同PZT加载量下的离面位移场
Figure 8. Out-of-plane displacement fields under different PZT loading levels
图 9 离面位移径向平均结果与理论值对比
Figure 9. Comparison between the radially averaged out-of-plane displacement results and theoretical values
图 10 不同PZT加载量下的累计事件切片对比
Figure 10. Cumulative event slices under different PZT loading levels
图 11 不同PZT加载量下的面内位移向量对比
Figure 11. In-plane displacement vectors under different PZT loading levels
图 12 不同PZT加载量下的面内位移幅值场
Figure 12. In-plane displacement magnitude fields under different PZT loading levels
图 13 面内位移径向平均结果与理论值对比
Figure 13. Comparison between the radially averaged in-plane displacement results and theoretical values
图 14 不同PZT加载量下的三维位移幅值曲面
Figure 14. Three-dimensional displacement magnitude surfaces under different PZT loading levels
图 15 不同PZT加载量下的三维位移误差分布
Figure 15. Three-dimensional displacement errors distributions under different PZT loading levels
表 1 离面位移测量误差统计
Table 1. Statistical results of out-of-plane displacement measurement errors
PZT加载量/μm 最大面内位移/μm RMSE/μm 相对误差/% 50 49.62 0.47 2.46 100 99.86 1.01 2.62 150 150.16 1.30 2.25 
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表 2 面内位移测量误差统计
Table 2. Statistical results of in-plane displacement measurement errors
PZT加载量/μm 最大面内位
移幅值/μm有效匹配
比例值/%RMSE/μm 相对误差/% 50 3.25 95.58 0.18 8.18 100 6.76 94.48 0.32 7.12 150 9.20 92.71 0.51 7.64
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表 3 三维位移场融合精度统计
Table 3. Accuracy statistics of three-dimensional displacement field fusion
PZT加载量/μm RMSE3D/μm ε3D/% 最大三维
误差/μm有效测量
点比例/%50 0.13 0.63 0.36 79.35 100 0.26 0.64 0.69 78.14 150 0.37 0.63 0.98 80.37
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表 4 不同加载量下3次重复测量的RMSE3D数据与统计结果
Table 4. Raw data and statistical results of RMSE3D for 3 repeated measurements under different indentation depths
PZT加载量/μm 测量1/μm 测量2/μm 测量3/μm 统计结果（平
均值±标准差）50 0.13 0.16 0.14 0.14±0.01 100 0.26 0.31 0.27 0.28±0.03 150 0.37 0.42 0.43 0.40±0.04
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