基于非连通金属−介质−金属波导耦合O形谐振腔的多法诺共振传感器

赵小龙; 常旭艳; 刘艳莉; 张志东

doi:10.37188/CO.EN-2025-0017

基于非连通金属−介质−金属波导耦合O形谐振腔的多法诺共振传感器

赵小龙^{1, 2,},
常旭艳^1,,
刘艳莉^{1, 3, ,},
张志东^1, ,

1.
中北大学极限环境光电测试技术与仪器全国重点实验室, 山西太原 030051
2.
中北大学电气与控制工程学院, 山西太原 030051
3.
中北大学创新创业学院, 山西太原 030051

详细信息

中图分类号: O482.31
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出版历程
- 收稿日期: 2025-03-06
- 修回日期: 2025-03-13
- 录用日期: 2025-04-08
- 网络出版日期: 2025-05-21

Multi-Fano resonances sensing based on a non-through metal-insulator-metal waveguide coupling D-shaped cavity

doi: 10.37188/CO.EN-2025-0017

ZHAO Xiao-long^{1, 2
,},
CHANG Xu-yan^1
,,
LIU Yan-li^{1, 3
, ,},
ZHANG Zhi-dong^{1
, ,}

1.
State key Laboratory of Extreme Environment Optoelectronic Dynamic Testing Technology and Instrument, North University of China, Taiyuan 030051, China
2.
School of Electrical and Control Engineering, North University of China, Taiyuan 030051, China
3.
Institute of Innovation and Entrepreneurship, North University of China, Taiyuan 030051, China

Funds: Supported by Key Research and Development Program of Shanxi Province (No. 202102020101010)

More Information

Author Bio:
ZHAO Xiao-long (1986—), male, born in Heishan, Liaoning Province, Doctor, associate professor, received her PhD degree from North University of China. He is an Associate Professor in the School of Electrical and Control Engineering of North University of China. His current research interests include micro/nano-photonics sensors. E-mail: zhaoxiaolong@nuc.edu.cn

CHANG Xu-yan (2000—), female, born in Xinzhou, Shanxi Province. She is a current master's student at North China University, majoring in Instrumentation Engineering. E-mail: 1927744674@qq.com

LIU Yan-li (1985—), female, born in huaibei, Anhui Province, Doctor, associate professor， received her PhD degree from North University of China. She is an Associate Professor in the School of Information and Communication Engineering, of North University of China. Her current research interests include micro/nano-photonics. E-mail: 565347436@qq.com

ZHANG Zhi-dong (1985—), male, born in Jingle, Shanxi Province, Doctor, Professor, graduate student supervisor, received his PhD from Southwest Jiaotong University. He is currently an Professor in the school of Instrumentation and Electronics of North University of China. His research interests include micro/nanosensors and nanophotonics. E-mail: zdzhang@nuc.edu.cn

Corresponding author: liuyanli0561@126.com; zdzhang@nuc.edu.cn

摘要

摘要:
本文设计了一种由两个一端封堵的金属-绝缘体-金属（MIM）波导与一个D形腔耦合组成的表面等离激元波导结构。使用有限元方法（FEM）模拟了该结构的传输特性、磁场分布以及折射率传感特性。在透射光谱中可以明显观察到多Fano共振现象。这些Fano共振源于D形谐振腔产生的共振离散态与一端封堵的MIM波导产生的连续态之间的相互耦合。通过系统地调整结构参数，研究了其对Fano共振调制的影响。此外，通过改变MIM波导中绝缘层的折射率，研究了基于Fano共振折射率传感特性。结果表明，该结构实现的最大折射率灵敏度和品质因子（FOM）分别为1155 RIU/nm和40。这些研究对高灵敏度光子器件、微型传感器、未来新型片上传感的设计和研究提供了新的途径。
- 表面等离激元 /
- 金属-绝缘体-金属波导 /
- D形谐振腔 /
- 双Fano共振 /
- 折射率传感器
Abstract:
A plasmonics waveguide structure that consist of a non-through metal–insulator–metal (MIM) waveguide coupled with a D-shaped cavity was designed. And the transmission properties, magnetic field distribution, and refractive index sensing functionality were simulated using the finite element method (FEM). A multi-Fano resonance phenomenon was clearly observable in the transmission spectra. The Fano resonances observed in the proposed structure arise from the interaction between the discrete states of the D-shaped resonant cavity and the continuum state of the non-through MIM waveguide. The influence of structural parameters on Fano resonance modulation was investigated through systematic parameter adjustments. Additionally, the refractive index sensing properties, based on the Fano resonance, were investigated by varying the refractive index of the MIM waveguide's insulator layer. A maximum sensitivity and FOM of 1155 RIU/nm and 40 were achieved, respectively. This research opens up new possibilities for designing and exploring high-sensitivity photonic devices, micro-sensors, and innovative on-chip sensing architectures for future applications.
- surface plasmon polaritons /
- metal-insulator-metal (MIM) waveguide /
- D-shaped resonant cavity /
- double Fano resonance /
- refractive index sensor

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Figure 1. Two-dimensional schematic for the non-through MIM waveguide and a D-shaped cavity

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Figure 2. Transmission spectra for three distinct configurations

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Figure 3. Contour profiles of the normalized Hz field distributions of the non-through MIM waveguide D-shape cavity. (a) λ = 0.455 μm, (b) λ = 0.465 μm, (c) λ = 0.595 μm, and (d) λ =0.62 μm, (e) λ = 1.185 μm, and (f) λ =1.22 μm

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Figure 4. (a) Transmission spectra of the non-through MIM waveguide D-shape cavity with changing r; (b) the shift of resonance peak with changing r

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Figure 5. (a) Transmission spectra of the non-through MIM waveguide D-shape cavity with changing l; (b) the shift of resonance peak with changing l

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Figure 6. (a) Transmission spectra of the non-through MIM waveguide D-shape cavity with changing g; (b) the shift of resonance peak with changing g

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Figure 7. (a)Transmission spectra of the non-through MIM waveguide D-shape cavity with changing d; (b) the relationship between the resonance peak with changing d, and (c) the shift of resonance peak with changing d

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Figure 8. (a) Transmission spectra of the non-through MIM waveguide-coupled D-shape cavity with changing n; (b) shift of the Fano resonance peak as a function of the refractive index change n

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